Coated transparent substrate

• US 5,473,468 A
• Filed: 06/01/1994
• Issued: 12/05/1995
• Est. Priority Date: 12/13/1991
• Status: Expired due to Fees

• Current Assignee: Balzers Aktiengesellschaft (OC Oerlikon Corporation AG)
• Original Assignee: Balzers Aktiengesellschaft (OC Oerlikon Corporation AG)
• Inventors: Rudigier, Helmut, Sperger, Reinhard
• Primary Examiner(s): Lerner, Martin
• Assistant Examiner(s): Chang, Audrey Y.
• Application Number:
  US08/252,576
• Time in Patent Office: 552 Days
• Field of Search: 359/580, 359/586, 359/359, 359/589, 359/590, 428/432, 428/336, 428/697, 428/698
• US Class Current: 359/359
• CPC Class Codes: C03C 17/3435 comprising a nitride, oxynitride, boronitride or carbonitride
• CPC Class Codes: C23C 14/0021 Reactive sputtering or evaporation
• CPC Class Codes: C23C 14/0641 Nitrides C23C14/0617 takes precedence
• CPC Class Codes: C23C 14/0676 Oxynitrides
• CPC Class Codes: G02B 5/282 reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
• CPC Class Codes: Y10T 428/24975 No layer or component greater than 5 mils thick

Abstract

A coated wear resistant and transparent glass substrate has a multi-layer system with at least one layer of an oxynitride of one of hafnium, zirconium, tantalum and titanium, and with no metal layer. The substrate with multi-layer system has a reduced sun energy transmittance and anti-reflective effect in the visual spectral range.

Claims

1. A coated wear resistant and transparent substrate comprising a multi-layer system with at least one layer of an oxynitride of one of hafnium, zirconium, tantalum and titanium, and with no metal layer, the substrate with multi-layer system having a reduced sun energy transmittance and reduced anti-reflective effect in the visual spectral range.

2. The substrate of claim 1, wherein said at least one layer has a thickness of at least 30 nm.

3. The substrate of claim 2, wherein the thickness of said at least one layer is at least 50 nm.

4. The substrate of claim 1, wherein the thickness of said at least one layer is at least 70 nm.

5. The substrate of claim 1, wherein the thickness of said at least one layer is at least 90 nm.

6. The substrate of claim 1, comprising a multi-layer transparent layer-system with at least one layer of the oxynitride of one of hafnium, zirconium, tantalum and titanium, on both sides of the substrate.

10. The substrate of claim 1, wherein said layer of oxynitride forms the second outer layer of said multi-layer system considered in a direction from a surface for said multi-layer system, toward said substrate.

13. The substrate of claim 1, wherein reflection of light for a substantial part of the visible light spectrum and up to impinging angles of at least 60°

is reduced with respect to such a reflection of the substrate if it is not coated by the multi-layer system.

14. The substrate of claim 13, said reduction of reflection occurring up to impinging angles of at least 65°

.

15. The substrate of claim 1, having a reflection of 18% at most, at least for light in the spectral range according to light-wave-length of between 520 nm and 620 nm (both limits included) and considered at least on one side of the substrate with the multi-layer system.

16. The substrate of claim 15, said reflection being valid up to impinging angles of at least 60°

.

17. The substrate of claim 16, said reflection being valid for impinging angles of at least 65°

.

18. The substrate of claim 16, said reflection being 15% at most.

19. The substrate of claim 1, wherein transmittivity of light for the substrate and multi-layer system, at least in the spectral range according to light-wave-length of 450 nm to 600 nm (both limit values included) being at least 70%.

20. The substrate of claim 19, said transmittivity being at least 75%.

21. The substrate of claim 1, wherein the index of refraction of said oxynitride is 2.5 to 3 (both limit values included) for light with a wave-length of 400 nm.

22. The substrate of claim 21, said index of refraction being between 2.6 and 2.8 (both limit values included).

23. The substrate of claim 21, wherein the extinction coefficient k of said oxynitride is at most 0.02.

24. The substrate of claim 23, wherein the substrate extinction coefficient k is at most 0.01.

25. The substrate of claim 1, wherein said multi-layer system comprises a sequence of a hafnium-oxynitride layer and a silicon-oxide layer.

26. The substrate of claim 25, comprising following layers of respective thicknesses, considered in a direction from said substrate:

space="preserve" listing-type="tabular">______________________________________ HfON;

8 nm, SiO.sub.2 ;

42 nm, HfON;

103 nm, SiO.sub.2 ;

193 nm, HfON;

98 nm, SiO.sub.2 ;

95 nm. ______________________________________

27. The substrate of claim 1, wherein said multi-layer system is constructed, considered in a direction from said substrate, as follows:

a layer of oxynitride of one of hafnium, zirconium, tantalum and titanium;

a nitride layer;

an oxynitride layer; and

additional layers.

28. The substrate of claim 27, wherein said nitride layer is made of the nitride of the same metal as said oxynitride layer of one of hafnium, zirconium, tantalum and titanium.

29. The substrate of claim 27, wherein said oxynitride layer is made of the oxynitride of the same metal as said nitride layer is made from.

30. The substrate of claim 27, wherein said additional layers are formed by further said multi-layer systems.

31. The substrate of claim 1, said multi-layer system being constructed considered in a direction from said substrate, as follows:

an indium-tin-oxide layer;

a layer with low index of refraction;

an indium-tin-oxide layer; and

further layers.

32. The substrate of claim 31, said layer with low index of refraction is made of silicon-oxide.

33. The substrate of claim 31, wherein said further layers are formed by additional said multi-layer systems.

34. The substrate of claim 1, wherein said multi-layer system is constructed, considered in a direction from said substrate, as follows, and with respective layer thicknesses:

space="preserve" listing-type="tabular">______________________________________ HfON;

38 nm, HfN;

14 nm, HfON;

43 nm, SiO.sub.2 ;

182 nm, HfON;

95 nm, SiO.sub.2 ;

81 nm. ______________________________________

35. The substrate of claim 1, wherein said multi-layer system is constructed, considered in a direction from said substrate, as follows, and with respective layer thicknesses:

space="preserve" listing-type="tabular">______________________________________ indium-tin-oxide;

13 nm SiO.sub.2 ;

40 nm, indium-tin-oxide;

137 nm SiO.sub.2 ;

199 nm, HfON;

97 nm, SiO.sub.2 ;

98 nm. ______________________________________

36. The substrate of claim 1, comprising on both sides of said substrate, equal multi-layer systems.

37. The substrate of claim 1, said oxynitride being oxynitride of hafnium.

38. The substrate of claim 37, said hafnium-oxynitride considered in the form HfO_x N_y, having a ratio x/y, according to

39. The substrate of claim 38, wherein said ratio x/y is:

space="preserve" listing-type="equation">3/2≦

x/y≦

2.

40. The substrate of claim 38, wherein said ratio x/y is 1.7 at least approximately.

41. The substrate of claim 37, wherein the index of refraction of said hafnium-oxynitride is within the range of 2.5 to 2.8 (both limits included) for light with a wave-length of 400 nm.

42. The substrate of claim 37, wherein the index of refraction of said hafnium-oxynitride is within the range of 2.5 to 2.8 (both limit values included) and the extinction coefficient k is at the most 0.02.

43. The substrate of claim 42, wherein said extinction coefficient k is at the most 0.01.

44. The substrate of claim 37, further comprising at least one hafnium-nitride layer.

45. The substrate of claim 1, wherein at least said oxynitride layer is produced by a reactive deposition process.

46. The substrate of claim 45, wherein said reactive deposition process is one of a reactive ion-plating process and a reactive sputter-deposition process.

47. The substrate of claim 1, being a transparent window-substrate.

48. The substrate of claim 47, being a motor vehicle window.

11. The substrate of claim 11, wherein the transmittance at least for a predominant part of the visible light spectrum is at least 70%.

7. The substrate of claim 11, further comprising a multi-layer layer-system with at least one layer of a nitride of one of hafnium, zirconium, tantalum and titanium and of indium-tin-oxide.

8. The substrate of claim 7, wherein said nitride is a nitride of the same metal from which said oxynitride is formed.

9. The substrate of claim 8, wherein said nitride-layer and said oxynitride-layer are provided one above the other.

12. The substrate of claim 11, wherein said transmittance is at least 75%.