Piezoelectric actuator
First Claim
1. Piezoelectric actuator having at least one piezoelectric element assigned to an electrode for applying a control voltage, comprising a hollow body in the form of a first tube having a closed chamber formed therein filled with an incompressible liquid, a liquid-tight elastic membrane closing an opening formed in said hollow body, means for controlling the piezoelectric element so as to vary said volume of said hollow body during a deformation of said elastic membrane caused by said incompressible liquid, and a second tube, one of said tubes being received within the other.
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Accused Products
Abstract
Piezoelectric actuator having at least one piezoelectric element assigned to an electrode for applying a control voltage includes a hollow body having a volume filled with an incompressible liquid, an elastic membrane closing an opening formed in the hollow body, and a device for controlling the piezoelectric element so as to vary the volume of the hollow body during a deformation of the elastic membrane caused by the incompressible liquid.
78 Citations
17 Claims
- 1. Piezoelectric actuator having at least one piezoelectric element assigned to an electrode for applying a control voltage, comprising a hollow body in the form of a first tube having a closed chamber formed therein filled with an incompressible liquid, a liquid-tight elastic membrane closing an opening formed in said hollow body, means for controlling the piezoelectric element so as to vary said volume of said hollow body during a deformation of said elastic membrane caused by said incompressible liquid, and a second tube, one of said tubes being received within the other.
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10. Piezoelectric actuator having at least one piezoelectric element assigned to an electrode for applying a control voltage, comprising a hollow body having a closed chamber formed therein filled with an incompressible liquid, a liquid-tight elastic membrane closing an opening formed in said hollow body, and means for controlling the piezoelectric element so as to vary said volume of said hollow body during a deformation of said elastic membrane caused by said incompressible liquid, wherein said hollow body is formed of at least one tube and wherein said at least one tube is formed of piezoelectric material.
- 11. Piezoelectric actuator having at least one piezoelectric element assigned to an electrode for applying a control voltage, comprising a hollow body having a volume filled with an incompressible liquid, an elastic membrane closing an opening formed in said hollow body, and means for controlling the piezoelectric element so as to vary said volume of said hollow body during a deformation of said elastic membrane caused by said incompressible liquid, wherein said hollow body is formed of an outer tube and an inner tube received in said outer tube, and at least part of a hollow chamber is defined between an outer casing surface of the inner tube and an inner casing surface of the outer tube.
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17. Piezoelectric actuator having at least one piezoelectric element assigned to an electrode for applying a control voltage, comprising a hollow body having a closed hollow chamber formed therein filled with an incompressible liquid, an elastic membrane closing an opening formed in said hollow body, and means for controlling the piezoelectric element so as to vary said volume of said hollow body during a deformation of said elastic membrane caused by said incompressible liquid, and an adapter for deflecting an operating direction of the actuator, said membrane being disposed on said adapter, and said adapter being secured to said hollow body so that it is in communication with said hollow chamber.
Specification