Support posts for micro-mechanical devices
First Claim
1. An improved method of fabricating support posts for a micro-mechanical device, wherein the improvement comprises:
- depositing a spacer layer over a substrate;
etching vias into said spacer layer, each via defining the outer surface of a support post;
depositing an oxide layer over said spacer layer and into said vias, such that said oxide layer substantially conformally coats the inside surface of said vias;
etching back said oxide layer to the top surface of said spacer layer, such that a sidewall ring remaining from said oxide layer coats the inside surfaces of each via;
depositing a post metal layer over said spacer layer, such that said post metal layer coats the inside surface of said sidewall rings; and
etching said post metal layer to form said support posts.
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Accused Products
Abstract
An improved support post (16, 23, 25) for micro-mechanical devices (10). A via (34a) that defines the outer surface of the support post (16) is etched into a spacer layer (34). An oxide layer (41) is conformally deposited over the spacer layer (34) and into the via (34a), and then etched back to the top surface of the spacer layer (34), leaving a sidewall ring (23a) on the inner surface of the via (34a). Next, a metal layer (61) is deposited over the spacer layer (34) and into the via (34a) so as to cover the sidewall ring (23a). This metal layer (61) is then etched to form a support post stem (23) inside the via (34a). The spacer layer (34) is removed, leaving the support post stem (23) and a sidewall ring (23a) around the stem (23).
133 Citations
7 Claims
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1. An improved method of fabricating support posts for a micro-mechanical device, wherein the improvement comprises:
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depositing a spacer layer over a substrate; etching vias into said spacer layer, each via defining the outer surface of a support post; depositing an oxide layer over said spacer layer and into said vias, such that said oxide layer substantially conformally coats the inside surface of said vias; etching back said oxide layer to the top surface of said spacer layer, such that a sidewall ring remaining from said oxide layer coats the inside surfaces of each via; depositing a post metal layer over said spacer layer, such that said post metal layer coats the inside surface of said sidewall rings; and etching said post metal layer to form said support posts. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification