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Electrical interconnect using particle enhanced joining of metal surfaces

  • US 5,506,514 A
  • Filed: 04/12/1995
  • Issued: 04/09/1996
  • Est. Priority Date: 02/14/1990
  • Status: Expired due to Term
First Claim
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1. An apparatus for testing at least one integrated circuit in situ on a silicon wafer, comprising:

  • a probe array having individual interconnect elements for contacting corresponding terminal pads on said integrated circuit, each interconnect element of said probe array having a metal contact layer, including associated particles having a hardness greater than that of said metal; and

    means for applying compressive force normal to said probe array and said integrated circuit;

    whereby a conductive metal matrix is formed between each of said probe array interconnect elements and a corresponding terminal pad when said particles pierce a terminal pad surface.

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