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Method of measuring gas concentrations and microfabricated sensing device for practicing same

  • US 5,514,253 A
  • Filed: 07/13/1994
  • Issued: 05/07/1996
  • Est. Priority Date: 07/13/1994
  • Status: Expired due to Term
First Claim
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1. A microfabricated sensing device for measuring a concentration of a dissolved gas in a liquid sample, comprising:

  • (a) a working electrode (WE) and a counter/reference electrode (CRE) established on the same or separate planar substrates, said WE and CRE being separated by a distance effective to minimize WE contamination by components of said CRE;

    (b) an electrolyte layer (EL) established on said substrate and enclosing said WE; and

    (c) a gas permeable membrane (GPM) established on but not enclosing said EL and positioned over said WE, each of said GPM and EL having respective dimensions and configurations relative to said WE such that a flux of gas to said WE, from a liquid sample in contact with the device, is a function of an amount of gas passing through said GPM.

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