Guideless stage with isolated reaction stage

  • US 5,528,118 A
  • Filed: 04/01/1994
  • Issued: 06/18/1996
  • Est. Priority Date: 04/01/1994
  • Status: Expired due to Term
First Claim
Patent Images

1. A stage assembly comprising:

  • a base;

    a stage slidably movable on the base;

    a reaction frame laterally surrounding the stage and supported independently of the base;

    a first follower frame slidably movable on the reaction frame in a first direction; and

    a second follower frame slidably movable on the reaction frame in a second direction orthogonal to the first direction;

    wherein the stage is slidably movable along the first follower frame in the second direction and along the second follower frame in the first direction.

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