Single-frequency bidirectional fringe-counting interferometer

• US 5,546,184 A
• Filed: 05/06/1994
• Issued: 08/13/1996
• Est. Priority Date: 11/08/1991
• Status: Expired due to Fees

• Current Assignee: British Technology Group Ltd.
• Original Assignee: British Technology Group Ltd.
• Inventors: Downs, Michael J.
• Primary Examiner(s): Turner, Samuel A.
• Application Number:
  US08/232,280
• Time in Patent Office: 830 Days
• Field of Search: 356/345, 356/351, 356/361, 356/358, 356/346
• US Class Current: 356/496
• CPC Class Codes: G01B 9/02058 by particular optical compensation or alignment elements, e.g. dispersion compensation
• CPC Class Codes: G01B 9/02059 Reducing effect of parasitic reflections, e.g. cyclic errors
• CPC Class Codes: G01B 9/02061 Reduction or prevention of effects of tilts or misalignment
• CPC Class Codes: G01B 9/02081 simultaneous quadrature detection, e.g. by spatial phase shifting
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G01P 3/366 by using diffraction of light for measuring speed of fluids G01P5/26
• CPC Class Codes: G02B 27/144 using partially transparent surfaces without spectral selectivity G02B27/147 takes precedence

Abstract

An optical interferometer includes a beam splitter 131 having a partially reflecting metallic film 135, 137 adapted to induce phase difference between the transmitted and reflected component beams. It incorporates bidirectional fringe counter which includes a switching circuit to convert coupling with the fringe counter means from ac coupling to dc coupling when the counting rate falls below a predetermined threshold value.

Claims

1. A single-frequency bidirectional fringe-counting interferometer system comprising:

an optical source to provide a single-frequency optical beam;

beamsplitter means for dividing said optical beam into a reference beam and a measuring beam, a first phase difference between said optical beam and said reference beam being substantially 90°

;

optical means for providing two interfering beams from said reference beam and said measuring beam, a difference in respective path lengths of said two interfering beams being related to a displacement to be measured;

two light sensing means, arranged to receive said two interfering beams, for providing two electrical signals related to said two interfering beams, each of said two electrical signals having an AC component and a DC component, a second phase difference between said two electrical signals being substantially equal to said first phase difference;

signal processing means for processing said two electrical signals, said signal processing means including;

means for continuously sensing said second phase difference between said two electrical signals, and for adjusting a phase of at least one of said two electrical signals by a first adjusted phase shift when required so that said second phase difference equals 90°

,

means for continuously sensing a rate of change of said difference in said respective path lengths, for comparing said sensed rate of change with a preset rate of change, and for subtracting said respective DC components from said two electrical signals when said sensed rate of change exceeds said preset rate,

means for continuously comparing magnitudes of said respective AC components of said two electrical signals, and for normalizing said respective AC components of said two electrical signals when said compared magnitudes are not equal, and

means for storing said first adjusted phase shift,

said DC components of said two electrical signals, and

said AC components of said two electrical signals; and

fringe counting and fractioning means for fractioning fringes and for counting said fringes formed by said two interfering beams.

2. A single-frequency bidirectional fringe-counting interferometer system according to claim 1, further comprising calibration means for calibrating said system by sensing said second phase difference between said two electrical signals and phase adjusting at least one of said two electrical signals by a second adjusted phase shift so that said second phase difference equals 90°

.

3. A single-frequency bidirectional fringe-counting interferometer system according to claim 2, wherein:

said second phase difference between said two electrical signals is adjusted by at least one of signal addition and signal subtraction.

4. A single-frequency bidirectional fringe-counting interferometer system according to claim 3, wherein:

said system is AC coupled in a first operating mode wherein said difference in respective path lengths of said two interfering beams varies at a first fringe frequency counting rate greater than a predetermined fringe frequency counting rate; and

said system is DC coupled in a second operating mode wherein said difference in respective path lengths of said two interfering beams varies at a second fringe frequency counting rate less than said predetermined fringe frequency counting rate.

5. A single-frequency bidirectional fringe-counting interferometer system according to claim 4, wherein said predetermined fringe frequency counting rate is greater than 10 MHz.

6. A single-frequency bidirectional fringe-counting interferometer system according to claim 4, wherein:

said system operates in a third mode wherein, when said difference in said respective path lengths of said two interfering beams varies at a third fringe frequency counting rate less than a threshold fringe frequency counting rate, said first adjusted phase shift, said DC components of said two electrical signals, and said AC components of said two electrical signals are maintained at respective constant values.

7. A single-frequency bidirectional fringe-counting interferometer system according to claim 1, wherein said optical source is a laser having a short-term power output variation of less than 2%.

8. A single-frequency bidirectional fringe-counting interferometer system according to claim 7, wherein said short-term power output variation is less than 0.1%.

9. A single-frequency bidirectional fringe-counting interferometer system according to claim 7, wherein said laser is a polarized helium-neon laser.

10. A single-frequency bidirectional fringe-counting interferometer system according to claim 1, wherein said optical means comprises a Michelson interferometer.

11. A single-frequency bidirectional fringe-counting interferometer system according to claim 1, wherein said optical means comprises a Jamin interferometer.

12. A single-frequency bidirectional fringe-counting interferometer system according to claim 11, wherein said Jamin interferometer is a gas refractometer.

13. A single-frequency bidirectional fringe-counting interferometer system according to claim 1, further comprising:

a hybrid retroreflector.

14. A single-frequency bidirectional fringe-counting interferometer system according to claim 13, wherein said hybrid retroreflector comprises:

a cube corner retroreflector;

a polarizing beamsplitter;

a quarter wave plate; and

a plane mirror arranged to provide measurement of said difference in said respective path lengths of said two interfering beams, said arrangement of said plane mirror being insensitive to tilt.

15. A single-frequency bidirectional fringe-counting interferometer system according to claim 1, wherein said beamsplitter means comprises a partially reflecting metallic film.

16. A single-frequency bidirectional fringe-counting interferometer system according to claim 15, wherein said partially reflecting metallic film comprises:

a chromium layer;

a gold film overcoated on said chromium layer; and

a chromium film on said gold film.

17. A single-frequency bidirectional fringe-counting interferometer system according to claim 16, wherein:

said chromium layer is 4 nm thick;

said gold film is 16 nm thick; and

said chromium film is between 5 nm and 6 nm thick.

18. A single-frequency bidirectional fringe-counting interferometer system according to claim 15, wherein said partially reflecting metallic film comprises aluminum.

19. A single-frequency bidirectional fringe-counting interferometer system comprising:

a laser source to provide an optical beam of wavelength λ

;

a beamsplitter to divide said optical beam into a reference beam and a measuring beam, a first phase difference φ

between said optical beam and said reference beam being substantially 90°

;

optical means to provide two interfering beams from said reference beam and said measuring beam, a difference L in respective path lengths of said two interfering beams being related to a displacement to be measured;

two photodetectors arranged to receive said two interfering beams and to provide related electrical signals of respective intensities I₁, I₂ of said two interfering beams, where

space="preserve" listing-type="equation">I.sub.1 =(a.sub.1.sup.2 +a.sub.2.sup.2)+2a.sub.1 a.sub.2 cos (2π

L/λ

)

and

space="preserve" listing-type="equation">I.sub.2 =(b.sub.1.sup.2 +b.sub.2.sup.2)+2b.sub.1 b.sub.2 cos (2π

L/λ

+φ

)

where a₁ and a₂ are respective amplitudes of portions of said reference beam and of said measuring beam which comprise a first one of said two interfering beams, and b₁ and b₂ are respective amplitudes of portions of said reference beam and of said measuring beam which comprise a second one of said two interfering beams;

signal processing means for processing said two electrical signals, said signal processing means including;

means for continuously sensing said first phase difference φ

between said two electrical signals, and for adjusting a phase of at least one of said two electrical signals by an adjusted phase shift when required so that said first phase difference equals 90°

,

means for continuously sensing a rate of change of said difference in said respective path lengths, for comparing said sensed rate of change with a preset rate of change, and for subtracting said components a₁² +a₂² from said signal I₁ and subtracting said components b₁² +b₂² from said signal I₂ when said sensed rate exceeds said preset rate of change,

means for continuously comparing magnitudes of components a₁ a₂ and b₁ b₂, and for normalizing said components a₁ a₂ and b₁ b₂ by a normalization amount when said compared magnitudes are not equal, and

means for storing said adjusted phase shift, said subtracted components a₁² +a₂² and b₁² +b₂², and said normalization amount; and

fringe counting and fractioning means for fractioning fringes and for counting said fringes formed by said two interfering beams.

20. A single-frequency bidirectional fringe-counting interferometer system for measuring path length differences in two orthogonal directions comprising:

an optical source to provide a single frequency optical beam;

two beamsplitter means for dividing said optical beam into first and second reference beams and first and second measuring beams, a first phase difference between said first measuring beam and said first reference beam being substantially 90°

, and a second phase difference between said second measuring beam and said second reference beam being substantially 90°

;

optical means for providing a first pair of interfering beams having respective differences in a first pair of path lengths related to a first of two orthogonal displacements in said two orthogonal directions to be measured, and for providing a second pair of interfering beams having respective differences in a second pair of path lengths related to a second of said two orthogonal displacements in said two orthogonal directions to be measured;

four light sensing means, receiving respectively said first pair of interfering beams and said second pair of interfering beams, a first two of said four light sensing means for providing a respective first pair of electrical signals related to said first pair of interfering beams, and a second two of said four light sensing means for providing a respective second pair of electrical signals related to said second pair of interfering beams, each of said first pair of electrical signals and said second pair of electrical signals having an AC component and a DC component, said first pair of electrical signals having a third phase difference equal to said first phase difference, and said second pair of electrical signals having a fourth phase difference equal to said second phase difference;

first signal processing means for processing said first pair of electrical signals, said first signal processing means including;

first means for continuously sensing said third phase difference between said first pair of electrical signals, and for adjusting a phase of at least one of said first pair of electrical signals by a first adjusted phase shift when required so that said third phase difference equals 90°

,

first means for continuously sensing a rate of change of said difference in said respective first pair of path lengths, for comparing said sensed rate of change with a preset rate of change, and for subtracting respective DC components from said first pair of electrical signals when said first sensed rate exceeds said preset rate of change,

first means for continuously comparing magnitudes of respective AC components of said first pair of electrical signals, and for normalizing said respective AC components of said first pair of electrical signals when said compared magnitudes are not equal, and

first means for storing said first adjusted phase shift, said DC components of said first pair of electrical signals, and said AC components of said first pair of electrical signals;

second signal processing means for processing said second pair of electrical signals, said second signal processing means including;

second means for continuously sensing said fourth phase difference between said second pair of electrical signals, and for adjusting a phase of at least one of said second pair of electrical signals by a second adjusted phase shift when required so that said fourth phase difference equals 90°

,

second means for continuously sensing a rate of change of said difference in said respective second pair of path lengths, for comparing said sensed rate of change with said preset rate of change, and for subtracting respective DC components from said second pair of electrical signals when said second sensed rate exceeds said preset rate of change,

second means for continuously comparing magnitudes of respective AC components of said second pair of electrical signals, and for normalizing said respective AC components of said second pair of electrical signals when said compared magnitudes are not equal, and

second means for storing said second adjusted phase shift, said DC components of said second pair of electrical signals, and said AC components of said second pair of electrical signals; and

fringe counting and fractioning means for fractioning fringes and for counting said fringes formed by each of said first pair of interfering beams and said second pair of interfering beams.

21. A method of bidirectionally counting fringes in a single-frequency interferometer system to measure a displacement, said method comprising steps of:

providing a single frequency optical beam;

dividing said single frequency optical beam into a reference beam and a measuring beam, a first phase difference between said reference beam and said measuring beam being substantially 90°

;

interfering said reference beam and said measuring beam to form two interfering beams having a difference in respective path lengths related to said displacement to be measured;

sensing an intensity of each of said two interfering beams so as to provide two electrical signals related to said intensity of said two interfering beams, each of said two electrical signals having an AC component and a DC component, a second phase difference between said two electrical signals being equal to said first phase difference;

processing said two electrical signals by steps of;

continuously sensing said second phase difference between said two electrical signals, and adjusting a phase of at least one of said two electrical signals by a first adjusted phase shift when required so that said second phase difference equals 90°

,

continuously sensing a rate of change of said difference in said respective path lengths, and comparing said sensed rate of change with a preset rate of change, and when said sensed rate exceeds said preset rate of change, subtracting respective DC components from said two electrical signals,

continuously comparing magnitudes of respective AC components of said two electrical signals, and when said compared magnitudes are not equal, normalizing said respective AC components of said two electrical signals, and

storing said adjusted phase shift, said DC components of said two electrical signals, and said AC components of said two electrical signals; and

counting and fractioning interference fringes formed by said two interfering beams.