Programmable interconnect structures and programmable integrated circuits

  • US 5,557,136 A
  • Filed: 06/01/1992
  • Issued: 09/17/1996
  • Est. Priority Date: 04/26/1991
  • Status: Expired due to Term
First Claim
Patent Images

1. A field programmable gate array comprising:

  • a first metal conductor;

    an insulating layer overlaying the first metal conductor, the insulating layer having an opening formed therein;

    a plug in the opening, the plug comprising tungsten, the plug contacting the first conductor, a top surface of the insulating layer having a portion adjacent the plug, the portion being substantially coplanar with a top surface of the plug;

    amorphous silicon having a substantially planar bottom surface which overlays and contacts the plug and also overlays and contacts the adjacent portion of the insulating layer; and

    a second metal conductor overlaying and contacting the amorphous silicon.

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