Ceramic electrostatic chuck with built-in heater

• US 5,566,043 A
• Filed: 12/27/1994
• Issued: 10/15/1996
• Est. Priority Date: 12/27/1993
• Status: Expired due to Term

• Current Assignee: Shin-Etsu Chemical Company Limited, Tokyo Electron Limited
• Original Assignee: Shin-Etsu Chemical Company Limited, Tokyo Electron Limited
• Inventors: Nagao, Takaaki, Urano, Kazuhiko, Shindoh, Toshihiko, Ishikawa, Kenji, Kawada, Nobuo, Arami, Junichi
• Primary Examiner(s): Fleming, Fritz M.
• Application Number:
  US08/364,191
• Time in Patent Office: 658 Days
• Field of Search: 361/234, 279/128, 269/8, 29/825, 29/829
• US Class Current: 361/234
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Abstract

The ceramic electrostatic chuck with built-in heater of the present invention is disclosed having electrodes for electrostatic chuck made from an electroconductive ceramic bonded to a surface of a supporting substrate made from an electrically insulating ceramic, a heat generating layer made from an electroconductive ceramic is bonded to the other surface and the side surface and a covering layer made from an electrically insulating ceramic is provided thereon.

Claims

1. A ceramic electrostatic chuck having a built-in heater comprising a supporting substrate of an electrically insulating ceramic having first and second opposing surfaces and a side surface, an electrode of an electroconductive ceramic bonded to the first surface of the substrate, a heat generating layer of an electroconductive ceramic bonded to the second and the side surfaces, and a covering layer of an electrically insulating ceramic covering said electrodes and heat generating layer.

2. The ceramic electrostatic chuck with built-in heater described in claim 1 in which the said supporting substrate and said covering layer are made from boron nitride, a mixture of boron nitride and aluminum nitride or silicon nitride and the said electrodes for electrostatic chuck and said heat generating layer are made from graphite or silicon carbide.

3. The electrostatic chuck of claim 2 wherein the supporting substrate is made from boron nitride or a mixture of boron nitride and aluminum nitride, the supporting substrate having maximum and minimum coefficient of linear thermal expansion the difference between which does not exceed 3.

4. The ceramic electrostatic chuck with built-in heater described in claim 3 in which a diffusion-preventing layer is bonded on to the said covering layer.

5. The ceramic electrostatic chuck with built-in heater described in claim 4 in which the diffusion-preventing layer is made from silicon oxide or silicon nitride.

6. The ceramic electrostatic chuck with built-in heater described in claim 2 in which a diffusion-preventing layer is bonded on to the said covering layer.

7. The ceramic electrostatic chuck with built-in heater described in claim 6 in which the diffusion-preventing layer is made from silicon oxide or silicon nitride.

8. The ceramic electrostatic chuck with built-in heater described in claim 2 in which the said electrodes for electrostatic chuck, said heat generating layer and said covering layer are prepared by chemical vapor-phase deposition.

9. The ceramic electrostatic chuck with built-in heater described in claim 1 in which a diffusion-preventing layer is bonded on to the said covering layer.

10. The ceramic electrostatic chuck with built-in heater described in claim 9 in which the diffusion-preventing layer is made from silicon oxide or silicon nitride.