Micromachined silicon electrostatic chuck

• US 5,583,736 A
• Filed: 11/17/1994
• Issued: 12/10/1996
• Est. Priority Date: 11/17/1994
• Status: Expired due to Fees

• Current Assignee: United States Of America As Represented By The Department Of Energy
• Original Assignee: United States Of America As Represented By The Department Of Energy
• Inventors: Anderson, Robert A., Seager, Carleton H.
• Primary Examiner(s): FLEMING, FRITZ M
• Application Number:
  US08/341,089
• Time in Patent Office: 754 Days
• Field of Search: 361/234, 269/8, 269/903, 279/128
• US Class Current: 361/234
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

An electrostatic chuck is faced with a patterned silicon plate 11, createdy micromachining a silicon wafer, which is attached to a metallic base plate 13. Direct electrical contact between the chuck face 15 (patterned silicon plate'"'"'s surface) and the silicon wafer 17 it is intended to hold is prevented by a pattern of flat-topped silicon dioxide islands 19 that protrude less than 5 micrometers from the otherwise flat surface of the chuck face 15. The islands 19 may be formed in any shape. Islands may be about 10 micrometers in diameter or width and spaced about 100 micrometers apart. One or more concentric rings formed around the periphery of the area between the chuck face 15 and wafer 17 contain a low-pressure helium thermal-contact gas used to assist heat removal during plasma etching of a silicon wafer held by the chuck. The islands 19 are tall enough and close enough together to prevent silicon-to-silicon electrical contact in the space between the islands, and the islands occupy only a small fraction of the total area of the chuck face 15, typically 0.5 to 5 percent. The pattern of the islands 19, together with at least one hole 12 bored through the silicon veneer into the base plate, will provide sufficient gas-flow space to allow the distribution of the helium thermal-contact gas.

Claims

1. An electrostatic chuck, comprising:

a metallic base plate;

a silicon plate attached to said metallic base plate; and

a plurality of non-conductive support islands formed on the surface of said silicon plate opposite said metallic base plate for preventing electrical contact between the surface of said patterned silicon plate and a silicon wafer undergoing microelectronic processing.

2. The invention of claim 1 wherein said silicon plate is comprised of a micromachined silicon wafer.

3. The invention of claim 1 wherein said metallic base plate is comprised of aluminum.

4. The invention of claim 1 wherein attachment between of said silicon plate and said metallic base plate provides electrical contact between said silicon plate and said metallic base plate.

5. The invention of claim 4 wherein said attachment of said silicon plate to said metallic base plate is with conductive epoxy therebetween.

6. The invention of claim 4 wherein said attachment of said silicon plate to said metallic base plate is by intermetallic welding of said plates.

7. The invention of claim 4 wherein said attachment of said silicon plate to said metallic base plate is by mechanical entrainment of said silicon plate to said metallic base plate.

8. The invention of claim 1 wherein said plurality of support islands further comprise a pattern of flat-topped silicon dioxide islands that protrude a small distance from the patterned silicon plate surface of said chuck wherein direct electrical contact between said plate surface and said silicon wafer is prevented.

9. The invention of claim 8 wherein said islands may be formed in the shape of small circular islands.

10. The invention of claim 9 wherein said islands would be about 10 micrometers in diameter and spaced about 100 micrometers apart, and one or more concentric rings are formed around the periphery of said chuck to contain a low-pressure helium thermal-contact gas used during fabrication and plasma etching.

11. The invention of claim 10 wherein said islands are about 3 micrometers tall spaced about 100 micrometers apart to prevent silicon-to-silicon electrical contact in the area created between said islands.

12. The invention of claim 8 wherein said islands may be formed in the shape of narrow rails.

13. The invention of claim 12 wherein said rails would be about 10 micrometers wide and spaced about 100 micrometers apart, are about 3 micrometers tall, and one or more concentric rings are formed around the periphery of said chuck to contain a low-pressure helium thermal-contact gas used during fabrication and plasma etching.

14. The invention of claim 13 wherein said rails are arranged in a radial pattern.

15. The invention of claim 1 wherein said chuck has at least one hole bored through said patterned plate and metallic plate to provide sufficient gas-flow space to allow the distribution of a thermal-contact cooling gas.

16. An electrostatic chuck comprising:

a metallic base plate;

a patterned silicon plate attached to said metallic plate, said patterned silicon plate having an exposed surface opposite attachment to said metallic base plate;

a plurality of densely spaced non-conductive contact means formed on said exposed surface of said patterned silicon plate and protruding a small distance from said exposed surface wherein said electrical contact means prevent direct electrical contact between said patterned silicon plate and a silicon wafer;

wherein said chuck has at least one hole bored through said patterned silicon plate and said metallic base plate to provide sufficient gas-flow space to allow the distribution of helium thermal-contact gas, and said plurality of non-conductive contact means comprise a plurality of support island wherein said plurality of support islands are comprised of a pattern of flat-topped silicon dioxide islands that protrude from said patterned silicon plate exposed surface.

17. The invention of claim 16 wherein said metallic base plate is comprised of aluminum.

18. The invention of claim 16 wherein said islands are circular and would be about 10 micrometers in diameter, spaced about 100 micrometers apart, and protrude about 3 micrometers from said patterned silicon plate surface, and one or more concentric rings are formed around the periphery of said chuck to contain a low-pressure helium thermal-contact gas used during fabrication and plasma etching, and wherein said islands are tall enough and close enough together to prevent silicon-to-silicon electrical contact in the space created between said islands.

19. The invention of claim 16 wherein said islands are rails and are about 10 micrometers wide, spaced about 100 micrometers apart, and protrude less than 5 micrometers from said patterned silicon plate surface, and one or more concentric rings are formed around the periphery of said chuck to contain a low-pressure helium thermal-contact gas used during fabrication and plasma etching, and wherein said islands are tall enough and close enough together to prevent silicon-to-silicon electrical contact in the space created between said islands.

20. The invention of claim 16 wherein said islands are rails arranged in a radial pattern and are about 10 micrometers wide, spaced about 100 micrometers apart, and protrude less than 5 micrometers from said patterned silicon plate surface, and one or more concentric rings are formed around the periphery of said chuck to contain a low-pressure helium thermal-contact gas used during fabrication and plasma etching, wherein said islands prevent silicon-to-silicon electrical contact in area created between said islands.

21. An electrostatic chuck comprising:

an aluminum base plate;

a patterned silicon plate having a silicon surface attached in electrical contact to said aluminum base plate; and

a plurality of support island wherein said plurality of support islands are comprised of a pattern of flat-topped silicon dioxide islands that protrude less than 5 micrometers away from said silicon surface of said patterned silicon plate and said islands are about 10 micrometers wide and spaced about 100 micrometers apart;

wherein said chuck has at least one hole bored through said patterned silicon plate and said aluminum base plate to provide sufficient gas-flow space to allow the distribution of the helium thermal-contact gas, and wherein direct electrical contact between said patterned silicon plate surface and a silicon wafer to be supported is prevented.