Antifuse with improved antifuse material

  • US 5,592,016 A
  • Filed: 04/14/1995
  • Issued: 01/07/1997
  • Est. Priority Date: 04/14/1995
  • Status: Expired due to Term
First Claim
Patent Images

1. An antifuse comprising:

  • a first conductive electrode;

    an antifuse layer disposed over said first conductive electrode, said antifuse layer comprising a solid hydrocarbon material stable at temperatures below about 600°

    C., having a defect density less than about 100 defects/cm2, a breakdown field less than about 10 megavolts/cm, a dielectric constant lower than about 4.0, a resistivity of greater than about 104 ohm-cm; and

    a second conductive electrode disposed over said antifuse layer.

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