Method and system for triangulation-based, 3-D imaging utilizing an angled scaning beam of radiant energy

• US 5,617,209 A
• Filed: 04/27/1995
• Issued: 04/01/1997
• Est. Priority Date: 04/27/1995
• Status: Expired due to Term

• Current Assignee: Melea Limited, Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: View Engineering, Inc. (Quality Vision International, Inc.)
• Inventors: Svetkoff, Donald J., Jackson, Robert L., Rohrer, Donald K., Noblett, David A.
• Primary Examiner(s): Gonzalez, Frank
• Assistant Examiner(s): MERLINO, AMANDA H
• Application Number:
  US08/429,543
• Time in Patent Office: 705 Days
• Field of Search: 356/376, 356/394, 356/398, 382/149, 382/150, 382/151, 348/131, 348/126, 348/82
• US Class Current: 356/608
• CPC Class Codes: G01S 17/48 Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
• CPC Class Codes: G01S 17/88 Lidar systems specially adapted for specific applications
• CPC Class Codes: G01S 17/89 for mapping or imaging
• CPC Class Codes: G01S 7/497 Means for monitoring or calibrating
• CPC Class Codes: H05K 13/0813 Controlling of single components prior to mounting, e.g. orientation, component geometry H05K13/0812 takes precedence

Abstract

A method and system for three-dimensional imaging of objects, including integrated circuit interconnections to improve the efficiency of triangulation-based laser line scanning systems. A scanning beam is incident at a normal angle to the X,Y inspection plane with the scan line oriented at 45°, diagonal to an axis defining a first direction of motion. Motion of the imaging head along the axis is used to acquire line scan images in the non-orthogonal coordinate system.

Claims

1. In a method for the automated high-speed, 3-D imaging of an object at a vision station to develop dimensional information associated with the object, the object having a first set of inspection sites, the method including the steps of scanning a focused beam of radiant energy to create a scanning beam in the form of a scan line having a predetermined orientation and to create a plurality of points on corresponding surfaces of the first set of inspection sites and relatively translating the scanning beam with respect to the first set of inspection sites in a first direction defining a first axis of motion to generate corresponding reflected light signals sensing the amount of energy in the reflected light signals to generate corresponding electrical signals and processing the electrical signals to obtain a first set of data representing the dimensional information, including the heights of the plurality of points on the corresponding surfaces, the improvement comprising:

the predetermined orientation of the scan line is at a predetermined acute angle with respect to the first direction and wherein the step of translating occurs during the step of scanning.

2. The method as claimed in claim 1 further comprising the step of relatively translating the scanning beam with respect to a second set of inspection sites of the object in a direction substantially orthogonal to the first direction and defining a second axis of motion.

3. The method as claimed in claim 2 wherein the predetermined acute angle is approximately 45°

.

4. The method as claimed in claim 1 wherein the first set of data is in a non-orthogonal skewed coordinate system and wherein the method further comprises the step of transforming the first set of data into a second set of data in an orthogonal non-skewed coordinate system.

5. The method as claimed in claim 1 wherein the object is an electrical component and wherein the first set of inspection sites are electrical interconnections.

6. The method as claimed in claim 1 wherein the plurality of points in a scan line is adjustable in the range of 32 to 1024.

7. In a system for the automated high-speed, 3-D imaging of an object at a vision station to develop dimensional information associated with the object, the object having a first set of inspection sites, the system including means for scanning a focused beam of radiant energy to create a scanning beam in the form of a scan line having a predetermined orientation and to create a plurality of spots at a plurality of points on corresponding surfaces of the first set of inspection sites, means for relatively translating the scanning beam with respect to the first set of inspection sites in a first direction defining a first axis of motion to generate corresponding reflected light signals, means for sensing the amount of energy in the reflected light signals to generate corresponding electrical signals and means for processing the electrical signals to obtain a first set of data representing the dimensional information, including the heights of the plurality of points on the corresponding surfaces, the improvement comprising:

the predetermined orientation of the scan line is at a predetermined acute angle with respect to the first direction and wherein the means for translating translates the scanning beam during creation of the scanning beam.

8. The system as claimed in claim 7 wherein the means for relatively translating also relatively translates the scanning beam with respect to a second set of inspection sites of the object in a direction substantially orthogonal to the first direction and defining a second axis of motion.

9. The system as claimed in claim 8 wherein the predetermined acute angle is approximately 45°

.

10. The system as claimed in claim 9 wherein the first set of data is in a non-orthogonal skewed coordinate system and wherein the system further comprises means for transforming the first set of data into a second set of data in an orthogonal non-skewed coordinate system.

11. The system as claimed in claim 10 wherein the object is an electrical component and wherein the first set of inspection sites are electrical interconnections.

12. The system as claimed in claim 11 wherein the means for translating includes a 3-D laser scanner, the means for sensing includes an image sensor and the means for processing includes an image processing system.

13. The system as claimed in claim 12 wherein the 3-D laser scanner is mounted on the positioning system at the predetermined acute angle and wherein the positioning system moves the 3-D laser scanner relative to the object.

14. The system as claimed in claim 7 wherein the means for scanning includes an adjustable beam deflector for adjusting the plurality of points in a scan line in the range of 32 to 1024.

15. The system as claimed in claim 7 wherein the means for relatively translating moves the object with respect to the means for scanning.