Color deformable mirror device having optical thin film interference color coatings
First Claim
1. A semiconductor device comprising:
- circuitry for accepting electronic signals;
a plurality of deformable mirrors selectably operable to reflect incident light, responsive to the electronic signals; and
a first group of said plurality of deformable mirrors being coated with an optical thin film interference colour coating having at least a layer that is substantially transparent with respect to the incident light, the optical thin film interference colour coating including at least one further layer that is partially absorbing with respect to the incident light, so that the spectral reflectance and absorptance of the deformable mirror is modified to produce a desired reflected colour by the process of optical interference enhanced absorption in the optical interference colour coating, the layers being of predetermined thicknesses and materials, wherein the thickness of the substantially transparent layer substantially determines the desired reflected colour.
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Accused Products
Abstract
A semiconductor device comprises a plurality of colored deformable mirrors controllable by electrical circuitry. Groups of mirrors, responsive to the electronic signals, are selectably operable to reflect incident light. The deformable mirrors are coated with an optical thin film interference color coating having at least a layer that is substantially transparent to the visible light. As well the optical thin film interference color coating includes at least one further layer that is partially absorbing with respect to the visible light. The spectral reflectance and absorptance of the deformable mirror is modified in order to obtain a desired reflected color by the process of optical interference enhanced absorption in the optical thin film interference color coating. The optical thin film interference color coating has predetermined layer thicknesses and materials; the substantially transparent layer substantially determines the desired reflected color.
352 Citations
18 Claims
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1. A semiconductor device comprising:
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circuitry for accepting electronic signals; a plurality of deformable mirrors selectably operable to reflect incident light, responsive to the electronic signals; and a first group of said plurality of deformable mirrors being coated with an optical thin film interference colour coating having at least a layer that is substantially transparent with respect to the incident light, the optical thin film interference colour coating including at least one further layer that is partially absorbing with respect to the incident light, so that the spectral reflectance and absorptance of the deformable mirror is modified to produce a desired reflected colour by the process of optical interference enhanced absorption in the optical interference colour coating, the layers being of predetermined thicknesses and materials, wherein the thickness of the substantially transparent layer substantially determines the desired reflected colour. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification