Scanning near-field optic/atomic force microscope in which imaging light is controlled in relation to a vibrating position of an optical fiber probe

• US 5,627,365 A
• Filed: 03/22/1995
• Issued: 05/06/1997
• Est. Priority Date: 03/24/1994
• Status: Expired due to Term

• Current Assignee: SII NanoTechnology Inc. (Hitachi, Ltd.)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Chiba, Norio, Muramatsu, Hiroshi
• Primary Examiner(s): Westin, Edward P.
• Assistant Examiner(s): CALOGERO, STEPH
• Application Number:
  US08/408,622
• Time in Patent Office: 776 Days
• Field of Search: 250/234, 250/309, 250/310, 250/311, 250/306, 73/104, 73/105
• US Class Current: 250/234
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 60/06 SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: G01Q 60/32 AC mode
• CPC Class Codes: G03F 7/70375 Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation
• CPC Class Codes: Y10S 977/862 Near-field probe

Abstract

A radiated light of a light source for optical characteristic measurement is amplitude modulated by an optical modulator and directed into a light-propagating probe. A phase and intermittent rate of the optical modulator are adjusted by a phase shifter. A sample characteristic measuring light is radiated onto the surface of the sample from the distal end of the probe. A light transmitted through or scattered by the sample, or fluorescent light generated from the sample is directed into a photoelectric converter via an optical system. The light radiating area of sample characteristic measuring light can be efficiently modified to improve the resolution of a light characteristic image of the surface topography and optical characteristic of the sample at high resolution, without relying on the existence of transmissivity and conductivity in the sample.

Claims

1. A scanning near-field optic/atomic force microscope comprising:

a probe made of a light-propagating body for scanning above a sample to observe a topography and optical characteristics thereof;

vibration means for vibrating a distal end of the probe and the sample relative to one another;

a light source for generating a radiating light onto the sample;

optical modulating means for modulating an amplitude of the radiating light in synchronism with a vibrating position of the distal end of the probe;

a phase shifter for modifying a phase and/or an intermittent rate of the radiating light of the optical modulating means;

displacement detection means for optically detecting displacement of the probe;

a photoelectric converter and optical system for detecting light from the sample; and

a rough-motion mechanism and a fine-motion mechanism for moving the sample and the probe relative to each other.

2. A scanning near-field optic/atomic force microscope according to claim 1;

wherein the vibration means vibrates the distal end of the probe vertically relative to the surface of the sample; and

wherein the optical modulating means modulates the amplitude of the radiating light in synchronism with the vibrating position of the distal end of the probe and the phase shifter modifies the phase and/or the intermittent rate of the radiating light in order to radiate light when the probe is at a maximum proximity to the sample to reduce a light radiation area.

3. A scanning near-field optic/atomic force microscope according to claim 1;

wherein the vibration means vibrates the distal end of the probe horizontally relative to the surface of the sample; and

wherein the optical modulating means modulates the amplitude of the radiating light in synchronism with the vibrating position of the distal end of the probe and the phase shifter modifies the phase and/or the intermittent rate of the radiating light in order to radiate light in a center of vibration to align a radiation spot to a measuring point on the sample.