Capacitance based tunable micromechanical resonators

• US 5,640,133 A
• Filed: 06/23/1995
• Issued: 06/17/1997
• Est. Priority Date: 06/23/1995
• Status: Expired due to Term

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Bertsch, Fred M., Shaw, Kevin A., MacDonald, Noel C., Adams, Scott G.
• Primary Examiner(s): Lee, Benny
• Assistant Examiner(s): GAMBINO, DARUIS
• Application Number:
  US08/494,024
• Time in Patent Office: 725 Days
• Field of Search: 333/186, 333/187-192, 333/219, 361/278, 361/283.1, 361/287
• US Class Current: 333/197
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 9/02417 involving adjustment of the transducing gap
• CPC Class Codes: H03H 9/02425 by electrostatically pulling the beam
• CPC Class Codes: H03H 9/46 Filters multiple-port electromechanical filters H03H9/70

Abstract

A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.

Claims

1. A micromechanical actuator, comprising

a micromechanical structure having a first stationary component and a second component relatively movable with respect to said first component;

a first set of spaced-apart, substantially parallel comb-type electrode fingers mounted on said first component;

a second set of spaced-apart, substantially parallel comb-type electrode fingers mounted on said second component, said fingers of said first and second sets being coplanar and in opposed, nonoverlapping relationship with a gap therebetween; and

a bias voltage source connected across said first and second sets of electrodes to produce an electrostatic field therebetween.

2. The actuator of claim 1, wherein said voltage source is variable.

3. The actuator of claim 2, wherein said second component is movable along an axis, and wherein said gap is parallel to said axis.

4. The actuator of claim 3, wherein said electrode fingers of said first set are offset from said electrode fingers of said second set.

5. The actuator of claim 3, wherein said electrode fingers of said first set are aligned with said electrode fingers of said second set.

6. The actuator of claim 3, wherein said second component is a movable beam mounted within a cavity in a single crystal silicon substrate, said first set of electrode fingers being integral with said substrate and said second set of electrode fingers being integral with said movable beam.

7. The actuator of claim 6, wherein said relatively movable component has a natural mechanical stiffness, said voltage source being variable to adjust said stiffness.

8. The actuator of claim 6, wherein said beam is mounted for motion by at least one spring arms secured to said substrate, said movable beam, spring arm and second set of electrodes being movable at a natural frequency of resonance, said voltage source being adjustable to adjust said frequency of resonance.

9. The actuator of claim 8, wherein said electrode fingers of said first set are aligned with said electrode fingers of said second set, said voltage source being variable to increase said resonant frequency.

10. The actuator of claim 8, wherein said electrode fingers of said first set are offset from said electrode fingers of said second set, said voltage source being variable to reduce said resonant frequency.

11. The actuator of claim 10, wherein said voltage source provides a sufficiently high bias to said actuator to produce a double well potential.

12. An electromicromechanical resonator, comprising:

a substrate;

a micromechanical beam structure having micron-scale dimensions movable with respect to said substrate along an axis;

spring arms connected between said beam and said substrate, said spring arms and movable beam having a rest position and having a natural resonant frequency;

first and second electrostatic actuators, each actuator having a first set of finger electrodes mounted on said beam, and each actuator having a second set of finger electrodes mounted on said substrate, said first and second sets of electrodes each actuator being opposed and non-overlapping to provide a gap therebetween; and

an adjustable bias voltage connected across each set of electrodes to adjust said resonant frequency.

13. The resonator of claim 12, wherein the electrodes of said first set of finger electrodes for each actuator are aligned with corresponding electrodes of the second set of finger electrodes.

14. The resonator of claim 12, wherein the electrodes of said first set of finger electrodes for each actuator are offset from corresponding electrodes of the second set of finger electrodes.

15. The resonator of claim 12, wherein said first and second actuators are coplanar and symmetrical, whereby said actuators provide no net force on said beam in the rest position.

16. The resonator of claim 15, further including drive means for moving said beam at a frequency at or near said natural frequency.

17. The resonator of claim 12, wherein said gap is parallel to said axis.

18. The resonator of claim 12, wherein said gap is perpendicular to said axis.