Method of fabricating a focal plane array for hybrid thermal imaging system
First Claim
1. A method of fabricating an array of thermal sensitive elements for use with a hybrid thermal imaging system, the method comprising the steps of:
- forming a layer of optical coating on a carrier substrate;
forming a film layer of pyroelectric material on the optical coating layer by mixing particles with liquid pyroelectric material to provide nucleation sites for growing the film layer;
depositing a first layer of electrically conducting material between the optical coating layer and the pyroelectric film layer; and
forming a second layer of electrically conducting material on the pyroelectric film layer opposite from the first layer of electrically conducting material; and
patterning the pyroelectric film layer to form an array of thermal sensitive elements.
4 Assignments
0 Petitions
Accused Products
Abstract
A hybrid thermal imaging system (20, 120) often includes a focal plane array (30, 130), a thermal isolation structure (50, 150) and an integrated circuit substrate (60, 160). The focal plane array (30, 130) includes thermal sensitive elements (42, 142) formed from a pyroelectric film layer (82), such as barium strontium titanate (BST). One side of the thermal sensitive elements (42, 142) may be coupled to a contact pad (62, 162) disposed on the integrated circuit substrate (60, 160) through a mesa strip conductor (56, 150) of the thermal isolation structure (50, 150). The other side of the thermal sensitive elements (42, 142) may be coupled to an electrode (36, 136). The various components of the focal plane array (30, 130) may be fabricated from multiple heterogenous layers (74, 34, 36, 82, 84) formed on a carrier substrate (70).
52 Citations
10 Claims
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1. A method of fabricating an array of thermal sensitive elements for use with a hybrid thermal imaging system, the method comprising the steps of:
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forming a layer of optical coating on a carrier substrate; forming a film layer of pyroelectric material on the optical coating layer by mixing particles with liquid pyroelectric material to provide nucleation sites for growing the film layer; depositing a first layer of electrically conducting material between the optical coating layer and the pyroelectric film layer; and forming a second layer of electrically conducting material on the pyroelectric film layer opposite from the first layer of electrically conducting material; and patterning the pyroelectric film layer to form an array of thermal sensitive elements. - View Dependent Claims (2, 5)
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3. A method of fabricating an array of thermal sensitive elements for use with a hybrid thermal imaging system, the method comprising the steps of:
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forming a film layer of pyroelectric material on a carrier substrate by mixing particles with liquid pyroelectric material to provide nucleation sites for growing the film layer; and patterning the pyroelectric film layer to form an array of thermal sensitive elements; wherein the step of forming the pyroelectric film layer comprises the steps of; using metal organic deposition and spin coating techniques to deposit liquid pyroelectric material on the carrier substrate; mixing particles of a selected material with the liquid pyroelectric material to provide nucleation sites for grain growth of the pyroelectric material; and spinning the mixture of liquid and nucleation sites onto the carrier substrate to form the pyroelectric film layer.
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4. A method of fabricating an array of thermal sensitive elements for use with a hybrid thermal imaging system, the method comprising the steps of:
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forming a separation layer on a carrier substrate; forming a layer of optical coating material on the separation layer; forming a first layer of electrically conductive material on the optical coating layer; forming a film layer of pyroelectric material on the first layer of electrically conductive material from a solution of liquid pyroelectric material and powder nucleation sites; forming a second layer of electrically conductive material on the pyroelectric film layer opposite from the first layer of electrically conductive material; and patterning the pyroelectric film layer to form an array of thermal sensitive elements. - View Dependent Claims (6, 7, 8, 9, 10)
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Specification