Method for fabricating CMOS field effect transistors having sub-quarter micrometer channel lengths with improved short channel effect characteristics

• US 5,646,435 A
• Filed: 04/04/1995
• Issued: 07/08/1997
• Est. Priority Date: 04/04/1995
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Hsu, Charles Ching-Hsiang, Liang, Mong-Song
• Primary Examiner(s): Prenty, Mark V.
• Application Number:
  US08/416,168
• Time in Patent Office: 826 Days
• Field of Search: 257/382, 257/384, 257/387, 257/412, 257/755, 437/41, 437/225
• US Class Current: 257/382
• CPC Class Codes: H01L 21/823412 with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
• CPC Class Codes: H01L 29/0847 of field-effect transistors with insulated gate H01L29/0653 takes precedence; with a passive supplementary region between source or drain and substrate related to punch-through, capacity or isolation phenomena H01L29/1079; with LDD or DDD structure H01L29/7833; for thin film transistors H01L29/78618
• CPC Class Codes: H01L 29/42376 characterised by the length or the sectional shape
• CPC Class Codes: H01L 29/456 on silicon
• CPC Class Codes: H01L 29/66606 with final source and drain contacts formation strictly before final or dummy gate formation, e.g. contact first technology H01L29/66621 takes precedence

Abstract

A reverse self-aligned field effect transistor having sub-quarter micrometer (<0.25 um) channel lengths and shallow source/drain junction depths was achieved. The method for fabricating the FET includes a conducting layer that is deposited and patterned over the source/drain areas of the FET. The sub-quarter micrometer channel length was achieved by reducing the channel opening formed in the conducting layer using sidewall spacer techniques. The conducting layer on the substrate and under the source/drain polysilicon layer also serves as an interface to the diffusing source/drain dopants, and shallow junctions are formed that are about 0.06 to 0.08 um depth. The conducting layer also serves as a low resistant ohmic contact to the source/drain areas.

Claims

1. A method for fabricating reverse self-aligned field effect transistors, comprising the steps of:

providing a semiconductor substrate doped with a first conductive type dopant;

forming field oxide areas on said semiconductor substrate surrounding and electrically isolating device areas;

depositing a first conducting layer on said devices areas and elsewhere on said field oxide areas;

depositing a first polysilicon layer on said first conducting layer, said first polysilicon layer doped with a second conductive type dopant;

depositing a first insulating on said first polysilicon layer;

etching openings having vertical sidewalls in said first insulating layer and said first polysilicon layer to the surface of said first conducting layer, said openings located at least over said device areas and said openings providing for the formation of the gate electrodes of said field effect transistors over said device areas;

etching anisotropically said first conducting layer in said openings to said substrate surface;

depositing a conformal second insulating layer on said first insulating layer and in said openings;

blanket etching back said second insulating layer to said first insulating layer, and thereby forming sidewall spacers on said vertical sidewalls in said openings, and thereby reducing the width of said openings;

implanting in said openings a channel ion implant dopant of said first conductive dopant type;

forming a gate oxide on the surface of said substrate in said openings by thermal oxidation;

heating said substrate and forming doped source/drain areas in portions of said device areas for said transistors by out diffusion of said second conductive dopant type from said first polysilicon layer through said first conductive layer;

depositing a conformal second polysilicon layer on said second insulating layer and in said openings and doped with said second conductive type dopant;

patterning said second polysilicon layer leaving portions over said openings, and thereby forming overlapping gate electrodes for said transistors;

depositing a third insulating layer over said overlapping gate electrodes and over said first insulating layer;

forming contact openings in said third and first insulating layers to said first polysilicon layer, and thereby providing contact means to said source/drain areas;

depositing a second conducting layer on said third insulating layer and in said contact openings;

patterning said second conducting layer, leaving portions over said contact openings, and thereby completing said reverse self-aligned transistors having source/drain areas with said second conducting layer contacts.

2. The method of claim 1, wherein said first conducting layer is composed of cobalt silicide having a thickness of between about 100 to 300 Angstroms.

3. The method of claim 1, wherein the thickness of said first polysilicon layer is between about 1000 to 2000 Angstroma.

4. The method of claim 1, wherein said first insulating layer is composed of silicon oxide having a thickness of between about 500 to 800 Angstroms.

5. The method of claim 1, wherein said first conducting layer is an etch stop for etching said opening in said first polysilicon layer.

6. The method of claim 1, wherein said first conductive layer is composed of titanium silicide (TiSi₂) having a thickness of between about 100 to 300 Angstroms.

7. The method of claim 1, wherein said doped source/drain areas in said portions of said device areas have a junction depth of between about 0.06 to 0.08 micrometer.

8. The method of claim 1, wherein the thickness of said second polysilicon layer is between about 1500 to 2500 Angstroms.

9. The method of claim 1, wherein said first conductive dopant type is boron (B) and the second conductive dopant type is phosphorus (P), and said reverse self-aligned field effect transistor is an N-channel FET.

10. The method of claim 1, wherein said first conductive dopant type is arsenic (As) and the second conductive dopant type is boron (B), and said reverse self-aligned field effect transistor is a P-channel FET.

18. The method of claim 1, wherein said first conducting layer is composed of cobalt silicide having a thickness of between about 100 to 800 Angstroms.

11. A reverse self-aligned field effect transistor, comprising:

a semiconductor substrate doped with a first conductive type dopant;

field oxide areas on said semiconductor substrate surrounding and electrically isolating device areas;

a patterned multilayer structure comprising in increasing elevation from said substrate a first conducting layer, a first polysilicon layer doped with a second conductive type dopant and a first insulating layer, wherein said first conducting layer is composed of cobalt silicide having a thickness of between about 100 and 300 Angstroms;

said patterned multilayer structure having portions larger than and over said device areas and each said portion having an opening with vertical sidewalls, said opening extending across and bisecting said portions of said multilayer structure;

sidewall spacers formed from a second insulating layer on said vertical sidewalls in said openings, and therefore the width between said sidewall spacers is narrower than the width of said openings;

a channel ion implant dopant of said first conductive dopant type in said substrate at exposed areas in said opening, thereby controlling the threshold voltage of said FET;

a gate oxide on the exposed surface of said substrate in said opening;

doped source and drain areas in portions of said device areas under said portion of said multilayer, said source and drain areas formed from out-diffusion of said second conductive dopant type from said first polysilicon layer through said first conductive layer;

a patterned conformal second polysilicon layer over said openings and doped with said second conductive type dopant, and thereby forming an overlapping gate electrode for said FET;

a third insulating layer over said overlapping gate electrodes and multilayer portions having said source/drain areas thereunder;

said third and first insulating layers having contact openings to said multilayer portions thereby providing contact means to said source/drain areas;

a patterned second conducting layer having portions over said contact openings, and thereby providing a completed said reverse self-aligned field effect transistor having said source/drain areas with junction depths between about 0.06 and 0.08 micrometers, said gate electrode and said second conducting layer contacts to said source and drain areas.

12. The field effect transistor of claim 11, wherein the thickness of said first polysilicon layer is between about 1000 to 2000 Angstroms.

13. The field effect transistor of claim 11, wherein the thickness of said second polysilicon layer is between about 1500 to 2500 Angstroms.

14. The field effect transistor of claim 11, wherein said first conductive dopant type is boron (B) and the second conductive dopant type is phosphorus (P), and said reverse self-aligned field effect transistor is an N-channel FET.

15. The field effect transistor of claim 11, wherein said first conductive dopant type is arsenic (As) and the second conductive dopant type is boron (B), and said reverse self-aligned field effect transistor is a P-channel FET.

16. The field effect transistor of claim 11, wherein said spacing between said sidewall spacers in said opening are between about 0.1 to 0.25 micrometers in width.

17. A method for fabricating reverse self-aligned field effect transistors, comprising the steps of:

providing a semiconductor substrate doped with a first conductive type dopant;

forming field oxide areas on said semiconductor substrate surrounding and electrically isolating device areas;

depositing a first conducting layer on said devices areas and elsewhere on said field oxide areas;

depositing a first polysilicon layer on said first conducting layer, said first polysilicon layer doped with a second conductive type dopant and having a thickness between 1000 and 2000 Angstroms;

depositing a first insulating layer having a thickness between 500 and 800 Angstroms on said first polysilicon layer;

etching openings having vertical sidewalls in said first insulating layer and said first polysilicon layer to the surface of said first conducting layer, said openings located at least over said device areas and said openings providing for the formation of the gate electrodes of said field effect transistors over said device areas;

etching anisotropically said first conducting layer in said openings to said substrate surface;

depositing a conformal second insulating layer on said first insulating layer and in said openings;

blanket etching back said second insulating layer to said first insulating layer, and thereby forming sidewall spacers on said vertical sidewalls in said openings, and thereby reducing the width of said openings;

implanting in said openings a channel ion implant dopant of said first conductive dopant type;

forming a gate oxide on the surface of said substrate in said openings by thermal oxidation;

heating said substrate and forming doped source/drain areas in portions of said device areas for said transistors by out diffusion of said second conductive dopant type from said first polysilicon layer through said first conductive layer;

depositing a conformal second polysilicon layer having a thickness between 1500 and 2500 Angstroms on said second insulating layer and in said openings and doped with said second conductive type dopant;

patterning said second polysilicon layer leaving portions over said openings, and thereby forming over-lapping gate electrodes for said transistors;

depositing a third insulating layer over said over-lapping gate electrodes and over said first insulating layer;

forming contact openings in said third and first insulating layers to said first polysilicon layer, and thereby providing contact means to said source/drain areas;

depositing a second conducting layer on said third insulating layer and in said contact openings;

patterning said second conducting layer, leaving portions over said contact openings, and thereby completing said reverse self-aligned transistors having source/drain areas with said second conducting layer contacts.

19. A reverse self-aligned field effect transistor, comprising:

a semiconductor substrate doped with a first conductive type dopant;

field oxide areas on said semiconductor substrate surrounding and electrically isolating device areas;

a patterned multilayer structure comprising in increasing elevation from said substrate a first conducting layer, a first polysilicon layer doped with a second conductive type dopant and a first insulating layer, wherein said first conducting layer is composed of cobalt silicide having a thickness of between about 100 and 300 Angstroms, and the thickness of said first polysilicon layer is between about 1000 and 2000 Angstroms;

said patterned multilayer structure having portions larger than and over said device areas and each of said portions having an opening with vertical sidewalls, said opening extending across and bisecting said portions of said patterned multilayer structure;

sidewall spacers formed from a second insulating layer on said vertical sidewalls in each said opening, and therefore the width between said sidewall spacers is narrower than the width of said opening;

a channel ion implant dopant of said first conductive type dopant in said substrate at exposed areas in said opening, thereby controlling the threshold voltage of said FET;

a gate oxide on the exposed surface of said substrate in said opening;

doped source and drain areas in portions of said device areas under said portions of said multilayer, said source and drain areas formed from out-diffusion of said second conductive type dopant from said first polysilicon layer through said first conductive layer;

a patterned conformal second polysilicon layer over said opening and doped with said second conductive type dopant, and thereby forming an overlapping gate electrode for said FET, wherein the thickness of said second polysilicon layer is between about 1500 and 2500 Angstroms;

a third insulating layer over said overlapping gate electrode and multilayer portions having said source/drain areas thereunder;

said third and first insulating layers having contact openings to said multilayer portions thereby providing contact means to said source/drain areas;

a patterned second conducting layer having portions over said contact openings, and thereby providing a completed said reverse self-aligned field effect transistor having said source/drain areas, said gate electrode and said second conducting layer contacts to said source and drain areas.