Process for producing semiconductor strain-sensitive sensor

• US 5,654,244 A
• Filed: 04/26/1995
• Issued: 08/05/1997
• Est. Priority Date: 04/27/1994
• Status: Expired due to Term

• Current Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Original Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Inventors: Fukada, Tsuyoshi, Sakai, Minekazu, Sugito, Hiroshige
• Primary Examiner(s): Bowers, Jr., Charles L.
• Assistant Examiner(s): WHIPPLE, MATTHEW LAVERNE
• Application Number:
  US08/427,960
• Time in Patent Office: 832 Days
• Field of Search: 437/225, 437/228, 437/228 O, 437/228 H, 437/228 SEN, 437/901, 437/921, 437/928, 437/60, 156/656.1, 156/657.1, 156/662.1, 361/283.4
• US Class Current: 438/53
• CPC Class Codes: G01L 9/0042 Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively

Abstract

In the present invention, a first protective layer formed over a diaphragm is prevented from being etched unnecessarily at the time of etching a second protective layer, and the detection accuracy of the diaphragm is improved.

In a process for producing a semiconductor pressure sensor, a first protective layer 4, a metal layer 8 and a second protective layer 6 are successively formed by deposition over a diaphragm 1a, and the second protective layer 6 is removed by etching so that the second protective layer 6 is left on a predetermined portion of an electrode 5. Since the metal layer 8 acts as an etching stopper layer at the time of removing the second protective layer 6 by etching, the first protective layer 4 over the diaphragm 1a is prevented from being etched. The metal layer 8 is removed by etching thereafter so that only the first protective layer 4 is formed over the diaphragm 1a.

Claims

1. A process for producing a semiconductor strain-sensitive sensor wherein a first protective layer is formed over a region of the semiconductor substrate which is to form a displacement portion, and a second protective layer is formed on an electrode through which an electric signal in accordance with the displacement of the displacement portion is taken out, comprising the steps of

forming said first protective layer, and subsequently forming a metal layer over said first protective layer,

forming said second protective layer over the metal layer,

removing said second protective layer over said region by etching while said metal layer acts as an etching stopper layer, and

removing said metal layer over said region.

2. The process according to claim 1, wherein said first protective layer comprises a SiO₂ layer and a PSG layer.

3. The process according to claim 2, wherein the relationship between the thickness of said first protective layer and that of said displacement portion satisfies the following equation:

(thickness of first protective layer)/(thickness of displacement portion)<

3.7×

10^-2.

4. The process according to claim 2, wherein the thickness of said PSG layer is at least 800 Å

.

5. The process according to claim 1, wherein said electrode and said metal layer are formed in the same step.

6. The process according to claim 2, wherein said process comprises the step of forming a gauge resistor in said displacement portion after forming said first protective layer, said first protective layer has a double layer structure comprising an SiO₂ layer and a PSG layer over the region where the gauge resistor is formed, and a monolayer structure of only a PSG layer over the region where the gauge resistor is not formed.

7. The process according to claim 1, wherein said etching is wet etching.

8. The process according to claim 7, wherein the etching selectivity of said metal layer to said first protective layer is at least 100/1.

18. The process according to claim 1, wherein said semiconductor strain-sensitive sensor is a semiconductor pressure sensor.

9. A process for producing a semiconductor strain-sensitive sensor having a displacement portion which is displaced when subjected to a stress and which is formed in a region of the semiconductor substrate to form the displacement portion, comprising the steps of

forming a detector which detects a displacement in said region, and at the same time forming a first protective layer over said region,

forming a metal layer on a contact portion, which is electrically connected to said detector and covers said first protector layer,

forming a second protector layer over the metal layer, and

removing said second protective layer over said region while said metal layer is allowed to act as an etching stopper layer, and subsequently removing said metal layer over said region so that said first protective layer is left over said region and said metal layer and said second protective layer are left on said contact portion.

10. The process according to claim 9, wherein said first protective layer comprises an SiO₂ layer and a PSG layer.

11. The process according to claim 9, wherein the relationship between the thickness of said first protective layer and that of said displacement portion satisfies the following equation:

(thickness of first protective layer)/(thickness of displacement portion)<

3.7×

10^-2.

12. The process according to claim 10, wherein the thickness of said PSG layer is at least 800 Å

.

13. The process according to claim 10, wherein said process comprises the step of forming a gauge resistor in said displacement portion after forming said first protective layer, said first protective layer has a double layer structure comprising an SiO₂ layer and a PSG layer over the region where the gauge resistor is formed, and only a monolayer structure of a PSG layer in the region where the gauge resistor is not formed.

14. The process according to claim 9, wherein said etching is wet etching.

15. The process according to claim 14, wherein the etching selectivity of said metal layer to said first protective layer is at least 100/1.

19. The process according to claim 9, wherein said semiconductor strain-sensitive sensor is a semiconductor pressure sensor.

16. A process for producing a semiconductor strain-sensitive sensor having a displacement portion which is displaced when subjected to a stress and which is formed in a displacement region of the semiconductor substrate to form the displacement portion, comprising the steps of

forming a detector which detects a displacement in said displacement region, forming a circuit constituent through which an electric signal generated from said detector is processed in another region of said semiconductor substrate, and further forming a first protective layer over said semiconductor substrate,

forming a first metal layer over the first protective layer,

removing said first metal layer over resistors constituting a complete circuit in cooperation with said circuit constituent, and forming a resistor layer over the whole surface of the semiconductor substrate,

removing said resistor layer by etching so that said first metal layer is allowed to act as an etching stopper layer while a portion of said resistor layer, for forming the resistor pattern of said resistors, is left,

removing said first metal layer, forming a second metal layer over the whole surface of said semiconductor substrate, and forming a pattern so that an electrode wiring pattern of said detector and said circuit constituent is formed while said second metal layer is allowed to remain over said displacement region,

forming a second protective layer over the whole surface of said semiconductor substrate and removing said second protective layer by etching so that a portion necessary for protecting said electrode wiring is left while said second metal layer acts as an etching stopper layer over said displacement region, and

removing thereafter the second metal layer over said displacement region.

17. The process according to claim 16, wherein said resistor layer comprises chromium-silicon and titanium-tungsten, and said metal layer is an aluminum layer.

20. The process according to claim 16, wherein said semiconductor strain-sensitive sensor is a semiconductor pressure sensor.