Electrostatic capacity-type pressure sensor

• US 5,675,086 A
• Filed: 07/15/1996
• Issued: 10/07/1997
• Est. Priority Date: 07/17/1995
• Status: Expired due to Term

• Current Assignee: Yamatake Corporation
• Original Assignee: Yamatake-Honeywell Company Limited
• Inventors: Kimura, Shigeo, Goshoo, Yasuhiro, Ishikura, Yoshiyuki, Kihara, Takashi
• Primary Examiner(s): Dougherty, Elizabeth L.
• Assistant Examiner(s): AMROZOWICZ, PAUL DOUGLAS
• Application Number:
  US08/680,173
• Time in Patent Office: 449 Days
• Field of Search: 73/718, 73/724, 361/283.1, 361/283.2, 361/283.3, 361/283.4
• US Class Current: 73/718
• CPC Class Codes: G01L 13/026 involving double diaphragm
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

An electrostatic capacity-type pressure sensor includes a diaphragm support body, first and second lids, a fixed electrode, a coupling member, an electrode support member, and a movable electrode. The diaphragm support body is formed into a tube shape. The first and second lids have thin diaphragm portions and thick fixing portions formed integrally with peripheral edge portions of the diaphragm portions and are arranged to face each other by bringing the fixing portions in tight contact with the two end portions of the diaphragm support body. The first and second lids separate the interior of the diaphragm support body from the outside by closing the two end portions of the diaphragm support body. The fixed electrode is formed on the inner surface of the fixing portion of at least one of the first and second lids. The coupling member has two ends respectively connected to the first and second lids to couple the diaphragm portions facing each other. The electrode support member is supported by the coupling member and arranged between the first and second lids at a predetermined interval. The movable electrode is formed on the electrode support member so as to face the fixed electrode. The movable electrode and the fixed electrodes are arranged parallel to each other at a predetermined interval to constitute a capacitor.

Claims

1. An electrostatic capacity-type pressure sensor comprising:

a diaphragm support body formed into a tube shape;

first and second lids made of an insulating material and each having a thin diaphragm portion, said first and second lids each having a thick fixing portion formed integrally with a peripheral edge portion of said diaphragm portions, respectively, and arranged to face each other by bringing said thick fixing portions in tight contact with two end portions of said diaphragm support body, said first and second lids separating an interior of said diaphragm support body from the outside by closing said two end portions of said diaphragm support body;

a fixed electrode formed directly on an inner surface of said thick fixing portion of at least one of said first and second lids;

a coupling member having two ends respectively connected to said first and second lids to couple said diaphragm portions facing each other;

an electrode support member supported by said coupling member and arranged between said first and second lids at a predetermined interval; and

a movable electrode formed on said electrode support member facing said fixed electrode, said movable electrode and said fixed electrode being arranged parallel to each other at a predetermined interval to constitute a capacitor.

2. A sensor according to claim 1, wherein said coupling member is constituted by a support, said electrode support member is constituted by a support plate vertically supported by said support and arranged parallel to said first and second lids, and said movable electrode is formed on a side surface of said support plate.

3. A sensor according to claim 2, wherein said electrode support plate has a size smaller than an inner size of said diaphragm support body and larger than a size of a connection portion between each diaphragm portion and each thick fixing portion, and said movable electrode is formed at a peripheral edge portion of said side surface of said electrode support plate which overlaps said thick fixing portion.

4. A sensor according to claim 1, wherein said coupling member and said electrode support member are formed integrally.

5. A sensor according to claim 1 wherein said fixed electrode is aligned substantially flush with said thin diaphragm portion.

10. A sensor according to claim 5 wherein said first and second fixed electrodes are aligned substantially flush with said thin diaphragm portions, respectively.

6. An electrostatic capacity-type pressure sensor comprising:

a diaphragm support body formed into a tube shape;

first and second lids made of an insulating material and each having a thin diaphragm portion, said first and second lids each having a thick fixing portion formed integrally with peripheral edge portions of said diaphragm portions and arranged to face each other by bringing said thick fixing portions in tight contact with two end portions of said diaphragm support body, said first and second lids separating an interior of said diaphragm support body from the outside by closing said two end portions of said diaphragm support body;

a first fixed electrode formed directly on an inner surface of said thick fixing portion of said first lid;

a second fixed electrode formed on an inner surface of said thick fixing portion of said second lid;

a coupling member having two ends connected to said first and second lids to couple said diaphragm portions facing each other;

an electrode support member supported by said coupling member and arranged between said first and second lids at a predetermined interval;

a first movable electrode formed on said electrode support member facing said first fixed electrode, said first movable electrode and said first fixed electrode being arranged parallel to each other at a predetermined interval to constitute a first capacitor; and

a second movable electrode formed on said electrode support member facing said second fixed electrode, said second moveable electrode and said second fixed electrode being arranged parallel to each other at a predetermined interval to constitute a second capacitor. electrode is aligned substantially flush with said thin diaphragm portion.

a second movable electrode formed on said electrode support member so as to face said second fixed electrode, said second movable electrode and said second fixed electrode being arranged parallel to each other at a predetermined interval to constitute a second capacitor.

7. A sensor according to claim 6, wherein said coupling member is constituted by a support, said electrode support member is constituted by a support plate vertically supported by said support and arranged parallel to said first and second lids, and said first and second movable electrodes are formed on two side surfaces of said support plate.

8. A sensor according to claim 7, wherein said electrode support plate has a size smaller than an inner size of said diaphragm support body and larger than a size of a connection portion between each diaphragm portion and each thick fixing portion, and said first and second movable electrodes are formed at peripheral edge portions of said two side surfaces of said electrode support plate which overlap said thick fixing portions.

9. A sensor according to claim 6, wherein said coupling member and said electrode support member are formed integrally.