Apparatus for mass flow measurement of a gas

• US 5,684,245 A
• Filed: 11/17/1995
• Issued: 11/04/1997
• Est. Priority Date: 11/17/1995
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Hinkle, Luke D.
• Primary Examiner(s): NOLAND, THOMAS
• Application Number:
  US08/560,037
• Time in Patent Office: 718 Days
• Field of Search: 73/3, 73/865, 73/861.02, 73/861.03, 73/199, 73/861, 73/1.34
• US Class Current: 73/1.35
• CPC Class Codes: G01F 25/15 specially adapted for gas meters G01F25/11 - G01F25/14, G01F25/17 take precedence
• CPC Class Codes: G01F 25/17 using calibrated reservoirs

Abstract

Apparatus for and method of measuring mass flow of a gas in a gas delivery system. The apparatus is adapted to be connected to a source of a gas. The apparatus includes a fixed-volume chamber in fluid connection with the gas source. A flow control device can be used to control the flow of the gas into the chamber. A transducer assembly comprises, in combination, a pressure transducer in fluid connection with the chamber, and a signal modifying network associated with the pressure transducer. The pressure transducer permits measurement of the pressure of the gas in the chamber and provides a first electrical signal representative of the pressure of the known volume of the gas. The signal modifying network modifies the first signal to produce an output signal which is proportional to PV/RT and thus directly represents the number of moles of the gas in the chamber. The apparatus is useful for calibrating mass flow controllers and the like.

Claims

1. A transducer assembly for use with means for defining a fixed volume of space for containing a gas whose mass is to be measured, said transducer assembly comprising:

(a) means for generating a first signal as a function of the pressure of said gas within said fixed volume of space, and

(b) means for generating an output signal, in response to the first signal and as a function of the temperature of said gas within said fixed volume of space, representative of the mass of said gas in said fixed volume, wherein said means for generating an output signal comprises a voltage dividing network including (a) an input terminal for receiving said first signal, (b) an output terminal for providing said output signal,

(c) at least one temperature-sensitive resistance element having a resistance value dependent on the temperature of the gas in said fixed volume, (d) at least one temperature-insensitive resistance element, coupled in series with said temperature-sensitive resistance element, having a resistance value substantially independent of the temperature of the gas in said fixed volume,

wherein one of said resistance elements is connected between said input and output terminals so that said output terminal is disposed between said temperature-sensitive resistance element and said temperature-insensitive resistance element, and said means for generating said output signal includes means for measuring the signal level at said output terminal.

2. An apparatus according to claim 1, wherein said means for generating said first signal includes means for generating said first signal so that said first signal is substantially proportional to said pressure of said gas within said fixed volume of space.

3. Apparatus according to claim 1, wherein said temperature-sensitive resistance element is electrically connected between said input terminal and said output terminal.

4. Apparatus according to claim 1, wherein said temperature-sensitive resistance element is electrically connected between said output terminal and ground.

5. Apparatus according to claim 4, wherein said temperature-sensitive resistance element is a thermistor.

6. Apparatus according to claim 1, wherein said voltage dividing network further includes means, coupled to said output terminal, for buffering said output signal.

7. Apparatus according to claim 6, wherein said buffering means comprises at least one operational amplifier electrically connected to said output terminal.

8. Apparatus according to claim 1, wherein said temperature-insensitive resistance element has a resistance value R_F equal to -R_TCref (1-α

T_ref), wherein said temperature-sensitive resistance element has a resistance value R_TC equal to R_TCref (1+α

(T-T_ref)), wherein R_TCref is the resistance of said temperature-sensitive resistance element at an absolute reference temperature T_ref in Kelvin, α

is the temperature coefficient of resistance of said temperature-sensitive resistance element in ppm/K, and T is the absolute temperature in Kelvin of said gas in said fixed volume of space.

9. Apparatus according to claim 1, wherein the magnitude of said output signal is proportional to the ratio of the product of the pressure and volume of said gas in said chamber to the temperature of said gas in said chamber, and wherein said output signal is expressed in standard mass units of said gas per unit of signal energy.

10. Apparatus according to claim 9, wherein said output signal is expressed in moles of said gas per volt.

11. Apparatus according to claim 1, wherein said pressure transducing means comprises a capacitance manometer.

12. An apparatus for measuring the mass flow of a gas, said apparatus comprising:

A. means for defining a fixed volume of space for containing a gas whose mass is to be measured;

B. means for connecting said apparatus to a source of said gas so that gas can be introduced into said fixed volume of space; and

C. a transducer assembly in fluid and thermal communication with the fixed volume of space, said assembly including (a) means for generating a first signal as a function of the pressure of said gas within said fixed volume of space, and (b) means for generating an output signal, in response to the first signal and as a function of the temperature of said gas within said fixed volume of space, representative of the mass of said gas in said fixed volume, wherein said means for generating an output signal comprises a voltage dividing network including (a) an input terminal for receiving said first signal, (b) an output terminal for providing said output signal, (c) at least one temperature-sensitive resistance element having a resistance value dependent on the temperature of the gas in said fixed volume, (d) at least one temperature-insensitive resistance element, coupled in series with said temperature-sensitive resistance element, having a resistance value substantially independent of the temperature of the gas in said fixed volume,

wherein one of said resistance elements is connected between said input and output terminals so that said output terminal is disposed between said temperature-sensitive resistance element and said temperature-insensitive resistance element, and said means for generating said output signal includes means for measuring the signal level at said output terminal.

13. An apparatus according to claim 12, wherein said means for defining a fixed volume of space comprises a chamber, an inlet to said chamber and an outlet to said chamber, and valve means for selectively opening and closing said inlet and outlet to said chamber.

14. An apparatus according to claim 12, wherein said means for generating said first signal includes means for generating said first signal so that said first signal is substantially proportional to said pressure of said gas within said fixed volume of space.

15. Apparatus according to claim 12, wherein said temperature-sensitive resistance element is electrically connected between said input terminal and said output terminal.

16. Apparatus according to claim 12, wherein said temperature-sensitive resistance element is electrically connected between said output terminal and ground.

17. Apparatus according to claim 16, wherein said temperature-sensitive resistance element is a thermistor.

18. Apparatus according to claim 12, wherein said voltage dividing network further includes means, coupled to said output terminal, for buffering the said output signal.

19. Apparatus according to claim 18, wherein said buffering means comprises at least one operational amplifier electrically connected to said output terminal.

20. Apparatus according to claim 12;

wherein said temperature-insensitive resistance element has a resistance value R_F equal to -R_TCref (1-α

T_ref), wherein said temperature-sensitive resistance element has a resistance value R_TC equal to R_TCref (1+α

(T-T_ref)), wherein R_TCref is the resistance of said temperature-sensitive resistance element at an absolute reference temperature T_ref in Kelvin, α

is the temperature coefficient of resistance of said temperature-sensitive resistance element in ppm/K, and T is the absolute temperature in Kelvin of said gas in said chamber.

21. Apparatus according to claim 12, wherein the magnitude of said output signal is proportional to the ratio of the product of the pressure and volume of said gas in said chamber to the temperature of said gas in said chamber, and wherein said output signal is expressed in standard mass units of said gas per unit of signal energy.

22. Apparatus according to claim 21, wherein said output signal is expressed in moles of said gas per volt.

23. Apparatus according to claim 12, wherein said pressure transducing means comprises a capacitance manometer.

24. Apparatus according to claim 12, further including means for controlling the flow of gas into said fixed volume of space.

25. Apparatus according to claim 24, wherein said means for controlling the flow of gas includes a mass flow controller.

26. Apparatus for measuring the flow of a gas, said apparatus comprising:

A. a source of a gas;

B. a chamber in fluid connection with said source and having a gas inlet port, a gas outlet port and valve means for selectively opening and closing said ports to a flow of said gas, said chamber having a known constant volume;

C. flow controlling means for conducting a controlled flow of said gas from said source into said chamber; and

D. a transducer assembly comprising, in combination,

i. pressure transducing means for measuring the pressure of said gas in said chamber and for providing a first signal representative of and proportional to said pressure, and

ii. means, associated with said pressure transducing means, for modifying said first signal to obtain an output signal representative of the mass of said gas in said chamber,

wherein said signal modifying means comprises a voltage dividing network having an input terminal, at least one temperature-sensitive resistance element and at least one temperature-insensitive resistance element electrically connected in series between said input terminal and ground, and an output terminal between said temperature-sensitive resistance element and said temperature-insensitive resistance element.

27. Apparatus according to claim 26, wherein said temperature-sensitive resistance element is electrically connected between said input terminal and said output terminal.

28. Apparatus according to claim 26, wherein said temperature-sensitive resistance element is electrically connected between said output terminal and ground.

29. Apparatus according to claim 28, wherein said temperature-sensitive resistance element is a thermistor.

30. Apparatus according to claim 26, wherein said temperature-sensitive resistance element is in thermal connection with said gas in said chamber.

31. Apparatus according to claim 26, wherein said voltage dividing network further includes means for buffering said output signal.

32. Apparatus according to claim 31, wherein said buffering means comprises at least one operational amplifier electrically connected to said output terminal.

33. Apparatus according to claim 26, wherein said temperature-insensitive resistance element has a resistance value R_F equal to -R_TCref (1-α

T_ref), wherein said temperature-sensitive resistance element has a resistance value R_TC equal to R_TCref (1+α

(T-T_ref)), wherein R_TCref is the resistance of said temperature-sensitive resistance element at an absolute reference temperature T_ref in Kelvin, α

is the temperature coefficient of resistance of said temperature-sensitive resistance element in ppm/K, and T is the absolute temperature in Kelvin of said gas in said chamber.

34. Apparatus according to claim 26, wherein the magnitude of said output signal is proportional to the ratio of the pressure and volume of said gas in said chamber to the temperature of said gas in said chamber, and wherein said output signal is expressed in standard mass units of said gas per unit of signal energy.

35. Apparatus according to claim 34, wherein said output signal is expressed in moles of said gas per volt.

36. Apparatus according to claim 26, wherein said pressure transducing means comprises a capacitance manometer.

37. A method of measuring the mass flow of a gas, said method comprising:

A. introducing the gas whose mass is to be measured into a fixed volume of space for containing the gas; and

B. generating a first signal as a function of the pressure of said gas within said fixed volume of space, and generating an output signal, in response to the first signal and as a function of the temperature of said gas within said fixed volume of space, representative of the mass of said gas in said fixed volume,

wherein the step of generating said output signal includes the steps of;

generating said first signal as a voltage across a voltage divider including at least one temperature-sensitive resistance element having a resistance value dependent on the temperature of the gas in said fixed volume, and at least one temperature-insensitive resistance element, coupled in series with said temperature sensitive resistance element, having a resistance value substantially independent of the temperature of the gas in said fixed volume, said divider being connected to ground, and

measuring the output signal at a point between said resistance elements and ground.

38. A method according to claim 37, wherein said step of generating said first signal includes the step of generating said first signal so that said first signal is substantially proportional to the pressure of the gas within the fixed volume of space.

39. A method according to claim 37, wherein the step of measuring includes the step of measuring the voltage across said temperature-sensitive resistance element.

40. A method according to claim 37, wherein the step of measuring includes the step of measuring the voltage across said temperature-insensitive resistance element.

41. A method according to claim 37, further including the step of buffering said output signal.

42. A method according to claim 37, wherein the step of introducing the gas whose mass is to be measured into a fixed volume of space includes the step of controlling the flow of said gas into said fixed volume.

43. A method of calibrating a mass flow controller for use in controlling mass flow of a gas, said method comprising:

A. connecting said mass flow controller to a source of gas;

B. transmitting the gas whose mass is to be measured through said controller and into a fixed volume of space for containing the gas;

C. generating a first signal as a function of the pressure of said gas within said fixed volume of space, and generating an output signal, in response to the first signal and as a function of the temperature of said gas within said fixed volume of space, representative of the mass of said gas in said fixed volume; and

D. comparing the value of mass represented by said output signal with the corresponding measurement of said mass flow controller,

wherein the step of generating said output signal includes the steps of;

generating said first signal as a voltage across a voltage divider including at least one temperature-sensitive resistance element having a resistance value dependent on the temperature of the gas in said fixed volume, and at least one temperature-insensitive resistance element, coupled in series with said temperature sensitive resistance element, having a resistance value substantially independent of the temperature of the gas in said fixed volume, said divider being connected to ground, and

measuring the output signal at a point between said resistance elements and ground.

44. A method according to claim 43, wherein said step of generating said first signal includes the step of generating said first signal so that said first signal is substantially proportional to the pressure of the gas within the fixed volume of space.

45. A method according to claim 43, wherein the step of measuring includes the step of measuring the voltage across said temperature-sensitive resistance element.

46. A method according to claim 43, wherein the step of measuring includes the step of measuring the voltage across said temperatureinsensitive resistance element.

47. A method according to claim 43, further including the step of buffering said output signal.

48. A method according to claim 43, wherein the step of introducing the gas whose mass is to be measured into a fixed volume of space includes the step of controlling the flow of said gas into said fixed volume.