Multilayer amorphous silicon antifuse
First Claim
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1. An antifuse comprising:
- first and second conductive layers; and
an antifuse layer, positioned between the first and second conductive layers, having a thickness of less than about 100 nm, the antifuse layer including first and second undoped amorphous silicon layers and an oxide layer positioned between the first and second undoped amorphous silicon layers, wherein the oxide layer has a thickness of less than about 10 nm.
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Abstract
Antifuses are provided which include first and second conductive layers and an antifuse layer positioned between the first and second conductive layers. The antifuse layer includes at least one oxide layer positioned between two amorphous silicon layers. Interconnect structures and programmable logic devices are also provided which include the antifuses.
67 Citations
30 Claims
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1. An antifuse comprising:
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first and second conductive layers; and an antifuse layer, positioned between the first and second conductive layers, having a thickness of less than about 100 nm, the antifuse layer including first and second undoped amorphous silicon layers and an oxide layer positioned between the first and second undoped amorphous silicon layers, wherein the oxide layer has a thickness of less than about 10 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An interconnect structure for interconnecting logic blocks in a programmable logic device comprising:
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a plurality of antifuses, at least one antifuse including first and second conductive layers and an antifuse layer having a thickness of less than about 100 nm positioned between the first and second conductive layers, the antifuse layer including first and second undoped amorphous silicon layers and an oxide layer positioned between the first and second undoped amorphous silicon layers, wherein the oxide layer has a thickness of less than about 10 nm ; and a plurality of interconnect lines, each line connected to at least one antifuse at either the first or second conductive layer of the antifuse. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A programmable logic device comprising:
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a plurality of logic blocks; an interconnect structure attached to each of the logic blocks for interconnecting two or more of the plurality of logic blocks, the interconnect structure including a plurality of antifuses, at least one antifuse including first and second conductive layers and an antifuse layer having a thickness of less than about 100 nm positioned between the first and second conductive layers, the antifuse layer including first and second undoped amorphous silicon layers and an oxide layer positioned between the first and second undoped amorphous silicon layers, wherein the oxide layer has a thickness of less than about 10 nm, and a plurality of interconnect lines, each line connected to at least one antifuse at either the first or second conductive layer of the antifuse. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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Specification