Dynamic quantity sensor

• US 5,734,105 A
• Filed: 12/26/1995
• Issued: 03/31/1998
• Est. Priority Date: 10/13/1992
• Status: Expired due to Term

• Current Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Original Assignee: Nippondenso Co., Ltd. (DENSO Corporation)
• Inventors: Mizukoshi, Masahito
• Primary Examiner(s): Oda, Christine K.
• Application Number:
  US08/578,371
• Time in Patent Office: 826 Days
• Field of Search: 73/514.18, 73/514.32, 73/514.02, 73/510, 73/504.02
• US Class Current: 73/504.02
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A dynamic quantity sensor comprises a weight and plurality of L-shaped beams adapted to be anchored at first ends thereof. The weight is supported by second ends of the L-shaped beams. The L-shaped beams each have a predetermined surface thereof sharing a common plane. The weight is movable in two directions within a plane substantially parallel to the common plane in response to a change in dynamic force applied to the dynamic quantity sensor.

Claims

1. A dynamic quantity sensor for detecting first and second orthogonal components of a dynamic force applied thereto comprising:

a substrate;

a weight;

anchor portions fixed to said substrate;

connecting portions for connecting said weight with said anchor portions, each of said connecting portions comprising a first beam portion connected with said weight and a second beam portion connected between one of said anchor portions and said first beam portion, said first beam portion and said second beam portion being disposed perpendicularly to one another;

said weight, anchor portions and connecting portions being integrally formed from a common semiconductor material and each having a predetermined surface mutually disposed in a substantially common plane; and

said connecting portions being flexible so as to enable said weight to be movable in two orthogonal directions within a plane substantially parallel to said common plane, wherein said first component of said dynamic force is detected as a result of movement of said weight in a first of said two directions enabled by deflection of said first beam portion and wherein said second component of said dynamic force is detected as a result of movement of said weight in a second of said two directions enabled by deflection of said second beam portion.

2. A dynamic quantity sensor according to claim 1, wherein said connecting portions each further comprises an intermediate support member for connecting said first beam portion with said second beam portion.

3. A dynamic quantity sensor according to claim 1, further comprising:

peripheral portions disposed in surrounding relation with respect to said weight, said anchor portions, and said connecting portions,

said weight and said peripheral portions having opposing surfaces; and

electrodes disposed on said opposing surfaces of said weight and said peripheral portions, respectively.

4. A dynamic quantity sensor according to claim 3, wherein said opposing surfaces of said weight and said peripheral portions are formed in an interlocking arrangement.

5. A dynamic quantity sensor according to claim 2, further comprising electrodes disposed on opposing surfaces of said weight and said intermediate support member.

6. A dynamic quantity sensor according to claim 2, further comprising

peripheral portions disposed in surrounding relation with respect to said weight, said anchor portions, and said connecting portions;

and

electrodes disposed on opposing surfaces of said peripheral portions and said intermediate support member.

7. A dynamic quantity sensor for detecting first and second components of a dynamic force applied thereto comprising:

a plurality of L-shaped beams adapted to be anchored to a substrate at first ends thereof, said L-shaped beams comprising first and second orthogonal legs; and

a weight supported by second ends of said L-shaped beams, said L-shaped beams each having a predetermined surface thereof sharing a common plane, and said weight being movable in two directions within a plane substantially parallel to said common plane in response to a change in dynamic force applied to said dynamic quantity sensor; and

wherein movement of said weight in a first of said two directions is enabled by deflection of said first leg of said L-shamed beams to enable said dynamic quantity sensor to detect said first component of said dynamic force, and wherein movement of said weight in a second of said two directions is enabled by deflection of said second leg of said L-shamed beams to enable said dynamic quantity sensor to detect said second component of said dynamic force.

8. A dynamic quantity sensor for detecting first and second components of a dynamic force applied thereto comprising:

first beams adapted to be anchored to a substrate at predetermined portions thereof;

movable intermediate support members each respectively connected with one of said first beams;

second beams each connected with one of said respective intermediate support members and extending in substantially perpendicular relation with respect to said first beams; and

a weight connected with said second beams and being movable in two orthogonal directions within a plane in response to a change in dynamic force applied to said dynamic quantity sensor; and

wherein said first component of said dynamic force is detected as a result of movement of said weight in a first of said two directions enabled by deflection of said first beams, and wherein said second component of said dynamic force is detected as a result of movement of said weight in a second of said two directions enabled by deflection of said second beams.

9. A device for sensing first and second components of an external dynamic force applied thereto comprising:

a semiconductor substrate;

a weight disposed in spaced relation with respect to a surface of said semiconductor substrate;

connecting portions each having respective first and second beam portions for mounting the weight in said spaced relation with respect to said surface of said semiconductor substrate;

said first and second beam portions extending in perpendicular relation with respect to one another and in parallel relation with respect to said surface of said semiconductor substrate, said first beam portions being flexible to permit limited movement of said weight generally within a first predetermined direction of movement, said second beam portions being flexible to permit limited movement of said weight generally within a second predetermined direction of movement, said first and second predetermined directions of movement of said weight being generally parallel to said substrate, said weight thus being movable in two directions generally within a plane parallel to said substrate; and

electrodes connected with said weight and said semiconductor substrate, wherein said electrodes generate electrical signals indicative of said first component of said external dynamic force as a result of movement of said weight in said first predetermined direction enabled by flexing of said first beam portions, and said electrodes generate electrical signals indicative of said second component of said external dynamic force as a result of movement of said weight in said second predetermined direction enabled by flexing of said second beam portions.