Electrically tunable optical filter utilizing a deformable multi-layer mirror

• US 5,739,945 A
• Filed: 09/27/1996
• Issued: 04/14/1998
• Est. Priority Date: 09/29/1995
• Status: Expired due to Term

• Current Assignee: Hanger Solutions, LLC (IP Investments Group LLC)
• Original Assignee: Parviz Tayebati
• Inventors: Tayebati, Parviz
• Primary Examiner(s): EPPS, GEORGIA Y
• Assistant Examiner(s): Robbins, Thomas
• Application Number:
  US08/726,050
• Time in Patent Office: 564 Days
• Field of Search: 359/291, 359/290, 257/415, 257/419, 356/352
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/002 the movement or the deformation controlling the frequency of light, e.g. by Doppler effect
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H01S 5/0614 controlled by electric field, i.e. whereby an additional electric field is used to tune the bandgap, e.g. using the Stark-effect
• CPC Class Codes: H01S 5/18363 comprising air layers
• CPC Class Codes: H01S 5/18366 Membrane DBR, i.e. a movable DBR on top of the VCSEL

Abstract

An electrically tunable optical filter utilizing a deformable multi-layer mirror construction.

Claims

1. An electrically tunable optical filter comprising:

a laterally-extending base comprising an optically-transparent semiconductor material;

a first laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air;

a second laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) air;

said first laterally-extending mirror being fixedly mounted to said laterally-extending base;

said second laterally-extending mirror being movably mounted to said laterally-extending base such that an air gap extends between said first laterally-extending mirror and said second laterally-extending mirror;

a first electrode electrically connected to said first laterally-extending mirror; and

a second electrode electrically connected to said second laterally-extending mirror;

whereby when a voltage difference is applied across said first and second electrodes, the electrically tunable optical filter will change its spectral response.

2. An electrically tunable optical filter according to claim 1 wherein said second laterally-extending mirror is mounted to said base with a cantilever construction.

3. An electrically tunable optical filter according to claim 1 wherein said second laterally-extending mirror is mounted to said base with a trampoline construction.

4. An electrically tunable optical filter comprising:

a laterally-extending base comprising an optically-transparent semiconductor material;

a first laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) an oxide material;

a second laterally-extending mirror comprising alternating layers of (i) said optically-transparent semiconductor material, and (ii) an oxide material;

said first laterally-extending mirror being fixedly mounted to said laterally-extending base;

said second laterally-extending mirror being movably mounted to said laterally-extending base such that an air gap extends between said first laterally-extending mirror and said second laterally-extending mirror;

a first electrode electrically connected to said first laterally-extending mirror; and

a second electrode electrically connected to said second laterally-extending mirror;

whereby when a voltage difference is applied across said first and second electrodes, the electrically tunable optical filter will change its spectral response.

5. An electrically tunable optical filter according to claim 4 wherein said second laterally-extending mirror is mounted to said base with a cantilever construction.

6. An electrically tunable optical filter according to claim 4 wherein said second laterally-extending mirror is mounted to said base with a trampoline construction.