Nanostructure multilayer dielectric materials for capacitors and insulators

  • US 5,742,471 A
  • Filed: 11/25/1996
  • Issued: 04/21/1998
  • Est. Priority Date: 11/25/1996
  • Status: Expired due to Term
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First Claim
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1. A capacitor, comprising:

  • at least one pair of metal conductor layers that function as capacitor electrodes;

    a dielectric-conductor interface layer in between and in contact with each of the conductor layers; and

    a multilayer dielectric disposed between and in contact on opposite sides with corresponding dielectric-conductor interface layers and comprising a plurality of alternating layers of oxides of at least two different metals.

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