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Substrate processing system

  • US 5,745,946 A
  • Filed: 07/29/1996
  • Issued: 05/05/1998
  • Est. Priority Date: 07/15/1994
  • Status: Expired due to Term
First Claim
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1. An assembly for processing a substrate, said assembly comprising:

  • a wet processing station;

    a cover for directing liquid from said wet processing station into an enclosure housing said wet processing station, said cover coupled to said enclosure;

    said cover comprising side sections, an angled back section, a top section, and a front section comprising a plurality of angled portions;

    said side sections coupled to said angled back section, said top section, and said front section;

    said angled back section coupled to said top section;

    said top section coupled to said front section;

    said cover having a closed position, wherein said top section is horizontal and a lower area of each of said side sections, said front section and said back section is contained within a space defined by said enclosure;

    said plurality of angled portions of said front section comprising a first angled portion, a second angled portion, and a third angled portion, said first angled portion coupled to said top section, said second angled portion coupled to said first angled portion, said third angled portion coupled to said second angled portion, wherein, when said cover is in said closed position, said first angled portion extends outward and downward from said top section, said second angled portion extends from said first angled portion into said enclosure in at least downward direction, and said third angled portion extends downward and inward from said second angled portion into said enclosure, and further wherein, when said cover is in said closed position, any of said liquid from said wet processing station accumulating on said front section runs down said first angled portion to said second angled portion to said third angled portion and into said enclosure, and any of said liquid accumulating on said angled back section runs down said angled back section and into said enclosure;

    said cover having an open position, wherein said third angled portion is disposed above a portion of said enclosure, and further wherein any of said liquid on said third angled portion runs down said third angled portion and into said enclosure, and any of said liquid on said second angled portion runs down said second angled portion to said first angled portion to said top section to said angled back section, and any of said liquid on said first angled portion runs down said first angled portion to said top section to said angled back section, and any of said- liquid on said top section runs down said top section to said angled back section.

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