Two-stage kinematic mount

• US 5,748,827 A
• Filed: 10/23/1996
• Issued: 05/05/1998
• Est. Priority Date: 10/23/1996
• Status: Expired due to Term

• Current Assignee: Washington University In St Louis
• Original Assignee: University of Washington
• Inventors: Sabeti, Roya R., Holl, Mark R.
• Primary Examiner(s): Healy, Brian
• Application Number:
  US08/736,336
• Time in Patent Office: 559 Days
• Field of Search: 385/14, 385/49, 385/50, 385/51, 385/134, 385/136, 385/137, 385/147
• US Class Current: 385/134
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment

Abstract

This invention provides rapid, accurate and repeatable alignment of components in three spatial coordinate directions to within about ±10 μm. It comprises a two-stage kinematic mount and a corresponding two-stage mountable module, each having a macrostage for initial alignment and a microstage for further, high accuracy alignment. The microstage of the mount preferably has either three alignment pins or three constraints and the microstage of the mountable module likewise preferably has either three pins or three constraints, so that the constraints of one component receive the pins of the other. A compliant layer is positioned between the microstage and macrostage of the mountable module. This invention further includes two-stage mount and mountable modules incorporating optical, electrical, mechanical or fluidic elements. In a preferred embodiment, the microstage module has a V-groove fluid flow channel suitable for use in optical flow cytometry.

Claims

1. A two-stage mountable module for coupling with a two-stage kinematic mount, said mount having a macrostage mount and a microstage mount, said module comprising:

a macrostage module comprising a macrostage body and further comprising a plurality of macrostage alignment members positioned on said macrostage body;

a microstage module comprising a microstage body and further comprising three microstage kinematic members positioned on said microstage body; and

a compliant layer positioned between and in contact with said macrostage body and said microstage body;

wherein said macrostage and microstage modules are adapted to be removably coupled with said macrostage and microstage mounts, respectively.

2. The module of claim 1 wherein said microstage body is a silicon wafer.

3. The module of claim 2 wherein said microstage kinematic members comprise a pit, a groove and a flat on the surface of said silicon wafer.

4. The module of claim 3 further including a fluid flow channel etched into said silicon wafer.

5. The module of claim 2 further comprising an element fabricated on or in said silicon wafer, said element selected from the group consisting of a fluid flow channel, a semiconductor laser, a photodetector, an optical waveguide, and a fiber optic guide groove.

6. The module of claim 1 wherein said macrostage body is made of plastic or metal.

7. The module of claim 1 wherein said plurality of macrostage alignment members comprises three macrostage kinematic members.

8. The module of claim 7 wherein said macrostage kinematic members are selected from the group consisting of (1) three pins, (2) three grooves, and (3) a pit, groove and flat.

9. The module of claim 1 wherein said plurality of macrostage alignment members are selected from the group consisting of (1) two rails and (2) two slots.

10. The module of claim 1 wherein said macrostage body has an access port therein, providing access to said microstage body.

11. The module of claim 1 wherein said compliant layer is a polymer sheet.

12. The module of claim 1 further comprising an assembly mount for positioning said microstage body on said macrostage body.

13. The module of claim 12 wherein said assembly mount comprises two rails positioned on said macrostage body and two slots positioned on said microstage body.

14. A two-stage kinematic mount for coupling with a two-stage mountable module, said module having a macrostage module and a microstage module said mount comprising:

a body;

a macrostage mount comprising a plurality of macrostage alignment members positioned on said body; and

a microstage mount comprising three microstage kinematic members positioned on said body;

wherein said macrostage and microstage mounts are adapted to be removably coupled with said macrostage and microstage modules, respectively.

15. The mount of claim 14 wherein said body comprises a macrostage body having said macrostage alignment members positioned thereon and further comprises a microstage body, attached to said macrostage body, having said microstage kinematic members positioned thereon.

16. The mount of claim 15 wherein said microstage body is a silicon wafer.

17. The mount of claim 16 further comprising an element fabricated on or in said silicon wafer, said element selected from the group consisting of a fluid flow channel, a semiconductor laser, a photodetector, an optical waveguide and a fiber optic guide groove.

18. The mount of claim 16 wherein said macrostage body has an access port therein, providing access to said microstage body.

19. The mount of claim 14 wherein said plurality of macrostage alignment members comprises three macrostage kinematic members.

20. The mount of claim 19 wherein said microstage kinematic members and said macrostage kinematic members are each selected from the group consisting of (1) three pins, (2) three grooves, and (3) a pit, groove and flat.

21. The mount of claim 20 wherein said microstage kinematic members comprise three pins.

22. The mount of claim 14 further comprising an element positioned on or in said body, said element selected from the group consisting of a fluid flow element, a light source, a photodetector, an optical waveguide, a fiber optic, a fiber optic mount, an electrical element, a mechanical element, an optical element and a mask.

23. The mount of claim 14 wherein said body has an access port therein, providing access to the area in the center of said microstage members.

24. A two-stage kinematic mount ensemble comprising the two-stage kinematic mount of claim 14 and further comprising:

a macrostage module comprising a macrostage body and further comprising a plurality of macrostage alignment members positioned on said macrostage body;

a microstage module comprising a microstage body and further comprising three microstage kinematic members positioned on said microstage body; and

a compliant layer positioned between and in contact with said macrostage body and said microstage body;

wherein said macrostage and microstage modules are adapted to be removably coupled with said macrostage and microstage mounts, respectively.