Tuning-fork vibratory gyro and sensor system using the same

• US 5,757,107 A
• Filed: 02/07/1997
• Issued: 05/26/1998
• Est. Priority Date: 11/01/1994
• Status: Expired due to Term

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Wakatuki, Noboru, Ono, Masaaki, Yamada, Sumio, Kikuchi, Kazutugu, Yamauchi, Motoi
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US08/796,680
• Time in Patent Office: 473 Days
• Field of Search: 310/316, 310/326, 310/365, 310/370, 310/366
• US Class Current: 310/370
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719
• CPC Class Codes: H03H 9/21 Crystal tuning forks

Abstract

A vibratory gyro includes a tuning-fork vibrator having a piezoelectric member, and a supporting member supporting the tuning-fork vibrator. The tuning-fork vibrator has a driving-side vibration and a detection-side vibration. The turning-fork vibrator resonates in the driving-side vibration, and the turning-fork vibrator and the supporting member resonate as a whole in the detection-side vibration.

Claims

1. A vibratory gyro comprising:

a tuning-fork vibrator having a piezoelectric member; and

a supporting member supporting the tuning-fork vibrator, said tuning-fork vibrator having a driving-side vibration mode and a detection-side vibration mode different from said driving-side vibration mode,

wherein said tuning-fork vibrator comprises;

first and second arms;

detection electrodes provided only on the first arm;

driving electrodes provided only on the second arm; and

a ground electrode provided on the second arm such that the driving electrodes are in a floating state with respect to the ground electrode,

said tuning-fork vibrator resonating in the driving-side vibration mode, and both said tuning-fork vibrator and said supporting member resonating together as a unit in the detection-side vibration mode.

2. The vibratory gyro as claimed in claim 1, wherein said vibrator comprises a piezoelectric single crystal.

3. The vibratory gyro as claimed in claim 1, wherein said supporting means has a structure for providing a mechanical Q value of the detection-side vibration mode to be smaller than that of the driving-side vibration mode.

4. The vibratory gyro as claimed in claim 1, wherein said supporting member has an elastic characteristic such that an anti-resonance frequency of the detection-side vibration mode is equal to a resonance frequency of the driving-side vibration mode.

5. The vibratory gyro as claimed in claim 4, wherein said supporting means has a structure for providing a mechanical Q value of the detection-side vibration mode to be smaller than that of the driving-side vibration mode.

6. The vibratory gyro as claimed in claim 4, wherein said means comprises a groove for adjusting a stiffness of the supporting member.

7. The vibratory gyro as claimed in claim 4, wherein said means comprises a weight member provided on the supporting member.

8. The vibratory gyro as claimed in claim 1, wherein the detection electrodes include an electrode connected to said ground electrode.

9. The vibratory gyro as claimed in claim 8, wherein:

the second arm has a rectangularly-shaped cross-section; and

said electrode connected to said ground electrode is provided on three out of four surfaces of said second arm.

10. The vibratory gyro as claimed in claim 1, further comprising a supporting portion which supports the supporting member on a predetermined member.

11. The vibratory gyro as claimed in claim 10, wherein said supporting portion comprises a pin member and an elastic member supporting the pin member.

12. The vibratory gyro as claimed in claim 1, wherein said vibrator has a thickness equal to or nearly equal to a thickness of the supporting member.

13. The vibratory gyro as claimed in claim 1, further comprising an adhesive layer which fixedly secures the vibrator and the supporting member together.

14. The vibratory gyro as claimed in claim 1, wherein the supporting member has an elastic characteristic such that the detection-side vibration mode is attenuated at a first end portion of the supporting member.

15. The vibratory gyro as claimed in claim 14, wherein said means comprises relatively wide portions and relatively narrow portions which are alternately arranged between the first end portion and a second end portion in which the vibrator is attached to the supporting member.

16. The vibratory gyro as claimed in claim 1, further comprising:

a first electrode pattern formed on the vibrator;

a second electrode pattern formed on the supporting member; and

a connecting member electrically connecting the first electrode pattern and the second electrode pattern together.

17. The vibratory gyro as claimed in claim 16, wherein said connecting member comprises one of solder and paste.

18. A sensor system comprising:

a vibratory gyro;

a driving circuit which drives the vibratory gyro; and

a detector circuit which detects an output signal output from the vibratory gyro, said vibratory gyro comprising;

a tuning-fork vibrator having first and second arms and a piezoelectric member;

detection electrodes provided only on the first arm;

driving electrodes provided only on the second arm;

a around electrode provided on the second arm such that the driving electrodes are in a floating state with respect to the ground electrode; and

a supporting member supporting the tuning-fork vibrator,

said tuning-fork vibrator having a driving-side vibration mode and a detection-side vibration mode different from said driving side vibration mode,

said tuning-fork vibrator resonating in the driving-side vibration mode, and both said tuning-fork vibrator and said supporting member resonating together as a unit in the detection-side vibration mode.