Filamented multi-wavelength vertical-cavity surface emitting laser

• US 5,774,487 A
• Filed: 10/16/1996
• Issued: 06/30/1998
• Est. Priority Date: 10/16/1996
• Status: Expired due to Term

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Morgan, Robert A.
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Leung, Quyen Phan
• Application Number:
  US08/734,403
• Time in Patent Office: 622 Days
• Field of Search: 372/96, 372/46, 372/45, 359/154, 359/344
• US Class Current: 372/45.01
• CPC Class Codes: H01S 2301/18 Semiconductor lasers with special structural design for influencing the near- or far-field
• CPC Class Codes: H01S 5/1096 in a single cavity
• CPC Class Codes: H01S 5/18308 having a special structure for lateral current or light confinement
• CPC Class Codes: H01S 5/18327 Structure being part of a DBR H01S5/18391 takes precedence
• CPC Class Codes: H01S 5/18361 Structure of the reflectors, e.g. hybrid mirrors
• CPC Class Codes: H01S 5/18369 based on dielectric materials
• CPC Class Codes: H01S 5/18377 comprising layers of different kind of materials, e.g. combinations of semiconducting with dielectric or metallic layers

Abstract

A Vertical-Cavity Surface Emitting Laser (VCSEL) for producing a filamented light output. In a preferred embodiment, this is accomplish by providing a number of discrete objects that are positioned adjacent to or within one or both of the cladding mirrors, or within the active region itself. The discrete objects may alter the reflectance, current injection and/or gain of the VCSEL at corresponding discrete locations, thereby causing the filamented light output. Besides providing a filamented output, the VCSEL of the present invention operates at a low drive current, provides high performance, and occupies less physical area than a broad-area (wide aperture) VCSEL. Thus, the VCSEL of the present invention has a number of advantages provided by a conventional laser including speed, efficiency and power, but does not suffer from many of the disadvantages of high coherence. The utilization of speckle averaging within multi-mode fiber interconnections and CD-like spatial imaging applications are contemplated.

Claims

1. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal, the first mirror region generally having a first reflectance value;

a second mirror region situated substantially parallel to the first mirror region and electrically coupled to a second terminal, the second mirror region generally having a second reflectance value;

at least one of the first and second mirror regions having a number of discrete locations, wherein each of the number of discrete locations has a different reflectance value than the corresponding first and second reflectance value; and

an active region situated between the first and second mirror regions.

2. A VCSEL according to claim 1 wherein the first and second mirror regions each comprise a number of layers, and wherein said each of the number of discrete locations corresponds to an object positioned within one or more of the number of layers.

3. A VCSEL according to claim 2 wherein the first and second mirror regions are formed from one or more materials, and the objects are formed from a material that is different from the one or more materials.

4. A VCSEL according to claim 3 wherein the first and second mirror regions each comprise a number of layers, wherein selected ones of the number of layers are saturated with a predetermined dopant, thereby forming the number of discrete locations.

5. A VCSEL according to claim 2 wherein the objects comprise one or more dopant atoms.

6. A VCSEL according to claim 1 wherein the first and second mirror regions each comprise a number of layers, wherein at least one of the number of layers includes a patterned layer wherein the pattern corresponds to the number of discrete locations.

7. A VCSEL according to claim 6 wherein the patterned layer comprises a patterned metal layer.

8. A VCSEL according to claim 6 wherein the patterned layer comprises a patterned dielectric layer.

9. A VCSEL according to claim 1 wherein the first and second mirror regions each comprise a number of layers, wherein each of the number of discrete locations corresponds to a via positioned within one or more of the number of layers.

10. A VCSEL according to claim 1 wherein a first portion of the number of discrete locations are of a first size and a second portion of the number of discrete locations are of a second size.

11. A VCSEL according to claim 1 wherein the number of discrete locations are non-uniformly spaced.

12. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal, the first mirror region generally having a first resistance value;

a second mirror region situated substantially parallel to the first mirror and electrically coupled to a second terminal, the second mirror region generally having a second resistance value;

at least one of the first and second mirror regions having a number of discrete locations, wherein each of the number of discrete locations has a different resistance value than the corresponding first and second resistance value; and

an active region situated between the first and second mirror regions.

13. A VCSEL according to claim 12 wherein the first and second mirror regions each comprise a number of layers, and wherein each of the number of discrete locations corresponds to an object positioned within one or more of the number of layers.

14. A VCSEL according to claim 13 wherein the first and second mirror regions are formed from one or more materials, and the object is formed from a material that is different from the one or more materials.

15. A VCSEL according to claim 13 wherein the object comprises one or more dopant atoms.

16. A VCSEL according to claim 13 wherein the first and second mirror regions each comprise a number of layers, and wherein selected ones of the number of layers are saturated with a predetermined dopant, thereby forming the number of discrete locations.

17. A VCSEL according to claim 12 wherein the first and second mirror regions each comprise a number of layers, and wherein at least one of the number of layers includes a patterned layer wherein the pattern corresponds to the number of discrete locations.

18. A VCSEL according to claim 17 wherein the patterned layer comprises a patterned metal layer.

19. A VCSEL according to claim 17 wherein the patterned layer comprises a patterned dielectric layer.

20. A VCSEL according to claim 12 wherein the first and second mirror regions each comprise a number of layers, and wherein each of the number of discrete locations corresponds to a via positioned within one or more of the number of layers.

21. A VCSEL according to claim 12 wherein a first portion of the number of discrete locations are of a first size and a second portion of the number of discrete locations are of a second size.

22. A VCSEL according to claim 12 wherein the number of discrete locations are non-uniformly spaced from one another.

23. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal;

an active region situated below the first mirror region;

a second mirror region situated below the active region and electrically coupled to a second terminal;

an exit window positioned above the first mirror region; and

a patterned layer situated above the first mirror region and substantially aligned with the exit window, wherein the patterned layer provides filamentation to the filamented light output.

24. A VCSEL according to claim 23 wherein the patterned layer comprises a number of discrete locations of a predetermined material.

25. A VCSEL according to claim 24 wherein the predetermined material is a metal.

26. A VCSEL according to claim 24 wherein the predetermined material is a dielectric.

27. A VCSEL according to claim 24 wherein a first portion of the number of discrete locations are of a first size and a second portion of the number of discrete locations are of a second size.

28. A VCSEL according to claim 24 wherein the number of discrete locations are non-uniformly spaced from one another.

29. A VCSEL according to claim 23 wherein the patterned layer comprises a number of vias.

30. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal;

a second mirror region situated substantially parallel to the first mirror and electrically coupled to a second terminal; and

an active region situated between the first and second mirror regions, the active region generally having a first gain, but further having a number of discrete locations wherein the gain at each of the number of discrete locations is different from the first gain value, thereby providing the filamented light output.

31. A VCSEL according to claim 30 wherein a first portion of the number of discrete locations are of a first size and a second portion of the number of discrete locations are of a second size.

32. A VCSEL according to claim 30 wherein the number of discrete locations are non-uniformly spaced from one another.

33. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal;

a second mirror region situated substantially parallel to the first mirror and electrically coupled to a second terminal;

an active region situated between the first and second mirror regions, the active region having a gain; and

means for altering the gain at a number of discrete locations.

34. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal, wherein the first mirror region has a reflectance;

a second mirror region situated substantially parallel to the first mirror and electrically coupled to a second terminal;

an active region situated between the first and second mirror regions, the active region having a gain; and

means provided in the first mirror region for altering the reflectance of the first mirror region at a number of discrete locations.

35. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal, wherein the first mirror region has a resistance;

a second mirror region situated substantially parallel to the first mirror and electrically coupled to a second terminal;

an active region situated between the first and second mirror regions, the active region having a gain; and

means provided in the first mirror region for altering the resistance of the first mirror region at a number of discrete locations.

36. A VCSEL for providing a filamented light output, comprising:

a first mirror region electrically coupled to a first terminal;

a second mirror region situated substantially parallel to the first mirror and electrically coupled to a second terminal;

an active region situated between the first and second mirror regions, the active region generally having a gain; and

means provided in the active region for altering the gain of the active region at a number of discrete locations.