Temperature distribution measurement methods and apparatus

• US 5,784,401 A
• Filed: 11/14/1996
• Issued: 07/21/1998
• Est. Priority Date: 12/05/1995
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Suzuki, Yoshihiko, Nakano, Katsushi
• Primary Examiner(s): GUTIERREZ, DIEGO F
• Application Number:
  US08/747,784
• Time in Patent Office: 614 Days
• Field of Search: 374/137, 374/120, 374/179, 374/180, 136/230
• US Class Current: 374/137
• CPC Class Codes: G01K 7/08 the object to be measured forming one of the thermoelectric materials, e.g. pointed type

Abstract

Methods and apparatus are disclosed for measuring the temperature distribution or profile of a specimen at high resolution. An apparatus comprises a thin-film membrane formed of a first thermo-electrically conductive material, the membrane having a first major surface for holding the specimen. The apparatus also comprises a probe having a tip radius operable to contact a second major surface of the membrane opposite the first major surface. The tip radius comprises a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force (TEMF) between the tip radius and the thin-film membrane. The probe can be scanned across the second major surface; the TEMF can be measured, processed, and displayed to produce a temperature profile of the specimen.

Claims

1. A method for obtaining a temperature profile of a specimen, the method comprising:

(a) placing a specimen on a first major surface of a thin-film membrane made of a first thermo-electrically conductive material;

(b) contact-scanning a second major surface, opposite the first major surface, of the thin-film membrane using a probe, the probe including a tip radius contacting the second major surface, the tip radius comprising a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force between the tip radius and the thin-film membrane; and

(c) measuring the thermo-electromotive force at plural locations on the second major surface corresponding to locations on the first major surface contacted by the specimen so as to obtain a temperature profile of the specimen.

2. The method of claim 1, further comprising the step of processing data, pertaining to the measured thermo-electromotive force, for display.

3. The method of claim 1, wherein the second major surface is contact-scanned in a raster manner.

4. An apparatus for obtaining a temperature profile of a specimen, the apparatus comprising:

(a) a thin-film membrane formed of a first thermo-electrically conductive material, the thin-film membrane having a first major surface and a second major surface opposite the first major surface, the first major surface holding a specimen in contact with the first major surface;

(b) a probe comprising a tip radius operable to contact the second major surface, the tip radius comprising a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force between the tip radius and the thin-film membrane;

(c) a probe actuator operable to move the probe in a manner by which the tip radius scans across the second major surface; and

(d) a TEMF measurement device connected to the thin-film membrane and to the tip radius, and wherein the TEMF measurement device measures the thermo-electromotive force, generated between the tip radius and the thin-film membrane, at multiple loci on the second major surface as the tip radius is scanned across the second major surface, the loci corresponding to locations on the first major surface contacted by the specimen so as to obtain a temperature profile of the specimen.

5. The apparatus of claim 4, further comprising an environment controller operable to differentially provide thermal energy to the specimen.

6. The apparatus of claim 5, wherein the environment controller comprises an irradiation light source.

7. The apparatus of claim 6, wherein the irradiation light source is operable to produce an illumination light of a wavelength that is differentially absorbed in a heat-generating manner by various structures of the specimen.

8. The apparatus of claim 4, further comprising a specimen holder defining a void spanned by the thin-film membrane.

9. The apparatus of claim 4, wherein the probe actuator is operable to scan the second major surface with the tip radius in a raster manner.

10. The apparatus of claim 4, further comprising a microcomputer connected to the TEMF-measurement device, the microcomputer being operable to process signals from the TEMF-measurement device for display.

11. The apparatus of claim 10, further comprising an actuator drive circuit connected to the probe actuator and to the microcomputer, the actuator drive circuit being operable to controllably move the probe according to electrical commands from the microcomputer.

12. The apparatus of claim 10, further comprising a display connected to the microcomputer, the display being operable to display the temperature profile of the specimen.

13. The apparatus of claim 4, wherein the first thermo-electrically conductive material is selected from a group consisting of nichrome, titanium, aluminum, and silicon.

14. An apparatus for measuring the temperature of a locus of a specimen, the apparatus comprising:

(a) a thin-film membrane formed of a first thermo-electrically conductive material, the thin-film membrane having a first major surface and a second major surface opposite the first major surface, the first major surface holding a specimen in contact with the first major surface;

(b) a probe comprising a tip radius operable to contact the second major surface, the tip radius comprising a second thermo-electrically conductive material that is different from the first thermo-electrically conductive material so as to generate, by the Seebeck effect, a thermo-electromotive force between the tip radius and the thin-film membrane; and

(c) a TEMF measurement device connected to the thin-film membrane and to the tip radius, and wherein the TEMF measurement device measures the thermo-electromotive force, generated between the tip radius and the thin-film membrane, at a locus on the second major surface corresponding to a location on the first major surface contacted by the specimen so as to obtain a temperature of the locus of the specimen.

15. The apparatus of claim 14, further comprising an irradiation light source operable to direct a heat-generating light onto the specimen so as to differentially heat the specimen.

16. The apparatus of claim 14, wherein the probe is operable to be situated at any of various loci on the second major surface, corresponding to respective locations on the first major surface contacted by the specimen, sufficient to obtain a temperature measurement at each of the respective locations on the first major surface.