Parallel ion optics and apparatus for high current low energy ion beams

  • US 5,811,820 A
  • Filed: 06/12/1996
  • Issued: 09/22/1998
  • Est. Priority Date: 06/13/1995
  • Status: Expired due to Term
First Claim
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1. An apparatus for irradiating a substrate with ions, comprising:

  • an ion source;

    a plurality of first electrode sheets having openings, said electrode sheets aligned substantially parallel such that said openings in said electrode sheets define a plurality of ion channels, each ion channel being defined by an opening in each of said plurality of electrode sheets;

    a plurality of spacers coupled between adjacent electrode sheets;

    a substrate support that supports said substrate;

    a vacuum enclosure enclosing said ion source, said electrode sheets, said spacers, and said substrate support; and

    an electronic device coupled to said electrode sheets, said electronic device selectively applying voltages to said electrode sheets in order to translate ions in said ion channels;

    wherein ions from said ion source are translated through said ion channels to irradiate said substrate.

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