Acceleration sensor using a piezoelectric element

• US 5,824,904 A
• Filed: 11/15/1996
• Issued: 10/20/1998
• Est. Priority Date: 03/15/1994
• Status: Expired due to Term

• Current Assignee: Toshiba Storage Device Incorporated (Toshiba Corporation)
• Original Assignee: Fujitsu Limited
• Inventors: Imamura, Takahiro, Kouhei, Tohru
• Primary Examiner(s): Oda, Christine K.
• Application Number:
  US08/746,745
• Time in Patent Office: 704 Days
• Field of Search: 73/514.34, 73/DIG. 4, 210/357, 210/329
• US Class Current: 73/514.34
• CPC Class Codes: G01P 15/0915 of the shear mode type

Abstract

An acceleration sensor is provided which has a plurality of piezoelectric elements having polarization directions which are different from the direction of the acceleration to be detected and which have electrodes provided on both sides are mounted to a substrate, or a singly formed piezoelectric element having a plurality of polarizations with independent electrodes provided for each region is mounted to a substrate, a series electrical connection being made between the substrate side electrodes and the free end electrodes of the piezoelectric elements, the electrodes between which the piezoelectric element are series connected being led out to two electrodes provided on the substrate, and a weight being mounted over and such a manner as to straddle the plurality of piezoelectric elements or singly formed piezoelectric element. When an acceleration acts on this acceleration sensor, the force of inertia of the weight applies a stress to each piezoelectric element, causing the generation of a voltage. Because the piezoelectric elements are connected in series, the voltage that is generated at each piezoelectric element is a voltage corresponding to the superimposition of the acceleration to which each of the piezoelectric element or each region of a singly formed piezoelectric element is subjected. As a result, it is possible to simplify and make smaller the configuration of the acceleration sensor and further possible to achieve an acceleration sensor with a large output.

Claims

1. An acceleration sensor comprising:

a substrate;

first and second electrodes separately provided on said substrate;

a single piezoelectric element having first and second regions, said first region being provided on said first electrode and polarized in a first direction, and said second region being provided on said second electrode and polarized in a second direction parallel to the first direction;

electrical connection means provided on said single piezoelectric element for electrically connecting said first region and said second region; and

weight means provided on said electrical connection means.

2. An acceleration sensor according to claim 1, wherein the first direction of said first region is parallel to a plane of said substrate and perpendicular to a hypothetical line formed by said first and second electrodes, and the second direction of said second region is the same direction as the first direction, whereby said acceleration sensor detects an acceleration acting in the direction of rotation about an axis that is perpendicular to the plane of said substrate.

3. An acceleration sensor according to claim 1, wherein the first direction of said first region is perpendicular to a plane of said substrate, and the second direction of said second region is the opposing direction of the first direction, whereby said acceleration sensor detects an acceleration acting in the direction perpendicular to the plane of said substrate.

4. An acceleration sensor according to claim 1, wherein the first direction of said first region is perpendicular to a plane of said substrate, and the second direction of said second region is the same direction of the first direction, whereby said acceleration sensor detects an acceleration acting in the direction of rotation about an axis that is parallel to the plane of said substrate and perpendicular to a hypothetical line formed by said first and second electrodes.

5. An acceleration sensor according to claim 1, wherein the first direction of said first region is parallel to a plane of said substrate and perpendicular to a hypothetical line formed by said first and second electrodes, and the second direction of said second region is the opposing direction of the first direction, whereby said acceleration sensor detects an acceleration acting in the direction perpendicular to the hypothetical line.

6. An acceleration sensor according to claim 1, wherein the first direction of said first region is parallel to a plane of said substrate and parallel to a hypothetical line combining said first and second electrodes, and the second direction of said second region is the opposing direction of the first direction, whereby said acceleration sensor detects an acceleration acting in the direction parallel to the hypothetical line.

7. An acceleration sensor according to claim 2, wherein said weight means is made of an insulating material.

8. An acceleration sensor according to claim 1, wherein said weight means is singly formed with said electrical connection means.