Pressure sensor package and method of making the same

• US 5,831,170 A
• Filed: 04/04/1996
• Issued: 11/03/1998
• Est. Priority Date: 04/04/1996
• Status: Expired due to Fees

• Current Assignee: SSI Technologies, Inc. (Amphenol Corporation)
• Original Assignee: SSI Technologies, Inc. (Amphenol Corporation)
• Inventors: Sokn, Erick L.
• Primary Examiner(s): FELBER, JOSEPH LEON
• Application Number:
  US08/627,618
• Time in Patent Office: 943 Days
• Field of Search: 73/715, 73/706, 29/505, 29/523, 220/378, 215/270, 215/271
• US Class Current: 73/706
• CPC Class Codes: G01L 19/0038 being part of the housing other details about the housing G01L19/14
• CPC Class Codes: G01L 19/0084 to the outside of the housing other details about the housing see G01L19/14
• CPC Class Codes: Y10T 29/49908 Joining by deforming
• CPC Class Codes: Y10T 29/4994 Radially expanding internal tube

Abstract

A pressure sensor package and a method of producing the same. The package includes a pressure sensor base, a pressure sensor diaphragm positioned over the base, and a sealing ring positioned over the pressure sensor diaphragm and creating an interference fit with the pressure sensor base. The sealing ring forms a mechanical interference with the pressure sensor base by either positioning the ring within an under cut in a sidewall of the base or deforming a portion of the base over the top of the ring. The pressure sensor base includes a recess having a bottom surface and a groove in the bottom surface, and the sealing ring and/or the pressure sensor diaphragm is positioned within the groove. The package further includes external threads for securing the package to a threaded orifice, the external threads being positioned on the output side of the package, as defined by the diaphragm.

Claims

1. A pressure sensor package comprising:

a pressure sensor base having a sidewall defining a recess;

said pressure sensor base also defining a cavity opening into said recess;

a pressure sensor diaphragm received by said recess and positioned in overlapping relation to said cavity; and

a sealing ring received by said recess and engaged with said sidewall, wherein one of said sidewall and said sealing ring is deformed so that engagement of said sealing ring and said sidewall forms an interference fit therebetween to secure said pressure sensor diaphragm to said pressure sensor base and to seal said cavity and wherein said sidewall is deformed so that a portion of said sidewall extends into said recess to engage a portion of said sealing ring.

2. A pressure sensor package comprising:

a pressure sensor base having a sidewall defining a recess, said pressure sensor base also defining a cavity opening into said recess;

a pressure sensor diaphragm received by said recess and positioned in overlapping relation to said cavity; and

a sealing ring received by said recess and engaged with said sidewall, wherein one of said sidewall and said sealing ring is deformed so that engagement of said sealing ring and said sidewall forms an interference fit therebetween to secure said pressure sensor diaphragm to said pressure sensor base and to seal said cavity and wherein said sidewall is deformed so that a portion of said sidewall overlaps a portion of said sealing ring.

3. A pressure sensor package comprising:

a pressure sensor base having a sidewall defining a recess;

said pressure sensor base also defining a cavity opening into said recess;

a pressure sensor diaphragm received by said recess and positioned in overlapping relation to said cavity; and

a sealing ring received by said recess and engaged with said sidewall, wherein one of said sidewall and said sealing ring is deformed so that engagement of said sealing ring and said sidewall forms an interference fit therebetween to secure said pressure sensor diaphragm to said pressure sensor base and to seal said cavity, and wherein said sidewall and said sealing ring each are deformed so that said sealing ring is secured within said recess.

4. A pressure sensor package comprising:

a pressure sensor base including a sidewall and a bottom surface, said sidewall and said bottom surface cooperating to form a recess and a cavity opening toward said recess;

a pressure sensor diaphragm positioned within said recess and in overlapping relation to said cavity; and

a sealing ring positioned within said recess, said sealing ring being engaged with said sidewall and forming a seal with said sidewall, and said sealing ring retaining said pressure sensor diaphragm within said recess, wherein said sidewall is deformed so that a portion of said sidewall extends into said recess to engage a portion of said sealing ring.

5. A pressure sensor package comprising:

a pressure sensor base including a sidewall and a bottom surface, said sidewall and said bottom surface cooperating to form a recess and a cavity opening toward said recess;

a pressure sensor diaphragm positioned within said recess and in overlapping relation to said cavity; and

a sealing ring positioned within said recess, said sealing ring being engaged with said sidewall and forming a seal with said sidewall, and said sealing ring retaining said pressure sensor diaphragm within said recess, wherein said sidewall is deformed so that a portion of said sidewall overlaps a portion of said sealing ring.

6. A pressure sensor package comprising:

a pressure sensor base including a sidewall and a bottom surface, said sidewall and said bottom surface cooperating to form a recess and a cavity opening toward said recess;

a pressure sensor diaphragm positioned within said recess and in overlapping relation to said cavity; and

a sealing ring positioned within said recess, said sealing ring being engaged with said sidewall and forming a seal with said sidewall, and said sealing ring retaining said pressure sensor diaphragm within said recess, wherein said sidewall and said sealing ring each are deformed so that said sealing ring is retained within said recess.

7. A pressure sensor package comprising:

a pressure sensor base including a sidewall defining a recess, said pressure sensor base also defining a cavity opening into said recess; and

a one-piece, integrally formed pressure sensor diaphragm received by said recess, said pressure sensor diaphragm including an inner portion extending over said cavity, and an outer portion engaging said sidewall;

wherein one of said sidewall and said outer portion of said pressure sensor diaphragm is deformed to form an interference fit therebetween so that said pressure sensor diaphragm is sealingly secured to said pressure sensor base and so that said cavity is sealed and wherein said sidewall is deformed so that a portion of said sidewall overlaps a portion of said outer portion of said pressure sensor diaphragm.