Chip carrier to allow electron beam probing and FIB modifications
First Claim
1. A method for probing an active region of a die including one or more peripheral input/output bump pads located about the periphery of the active region of said die, the method comprising the steps of:
- supporting said die in a die carrier such that said peripheral bump pads are electrically connected to an external test circuit; and
accessing the active region with a probe beam directed onto the active region of the die through a probe access region,wherein the die carrier includes(a) a membrane having (i) said probe access region for allowing the probe beam to access substantially all of the die'"'"'s active region, (ii) a plurality of peripheral bump contacts adjacent to the probe access region and arranged to make electrical contact with said peripheral bump pads of the die, and (iii) a plurality of socket contacts electrically connected to said peripheral bump contacts; and
(b) a membrane carrier supporting said membrane and having an opening corresponding, at least in part, to the location of said probe access region of the membrane.
1 Assignment
0 Petitions
Accused Products
Abstract
Disclosed are a die carrier and associated method for conducting probe beam tests on chips designed to be packaged in flip-chip packages. The die carrier is a specially modified membrane type carrier that includes a probe access region, such as an opening, in the membrane. A die to be tested is mounted in the die carrier such that its I/O pads make electrical contact with corresponding bump contacts on the membrane. The die/carrier assembly is then mounted in a test socket provided on a chip testing apparatus such that electrical I/O signals can be provided to and from an external test circuit. While the die is being electrical tested, a probe beam is directed through the probe access region and onto the chip active surface. In this manner, the chip active surface is probed while exposed to electrical stimulus.
16 Citations
8 Claims
-
1. A method for probing an active region of a die including one or more peripheral input/output bump pads located about the periphery of the active region of said die, the method comprising the steps of:
-
supporting said die in a die carrier such that said peripheral bump pads are electrically connected to an external test circuit; and accessing the active region with a probe beam directed onto the active region of the die through a probe access region, wherein the die carrier includes (a) a membrane having (i) said probe access region for allowing the probe beam to access substantially all of the die'"'"'s active region, (ii) a plurality of peripheral bump contacts adjacent to the probe access region and arranged to make electrical contact with said peripheral bump pads of the die, and (iii) a plurality of socket contacts electrically connected to said peripheral bump contacts; and (b) a membrane carrier supporting said membrane and having an opening corresponding, at least in part, to the location of said probe access region of the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
Specification