Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device

  • US 5,844,666 A
  • Filed: 05/02/1996
  • Issued: 12/01/1998
  • Est. Priority Date: 05/30/1995
  • Status: Expired due to Term
First Claim
Patent Images

1. A positioning device with an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.

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