Method and apparatus for a touch sensing device having a thin film insulation layer about the periphery of each sensing element

• US 5,869,791 A
• Filed: 03/01/1996
• Issued: 02/09/1999
• Est. Priority Date: 04/18/1995
• Status: Expired due to Fees

• Current Assignee: US Philips Corporation (Koninklijke Philips N.V.)
• Original Assignee: US Philips Corporation (Koninklijke Philips N.V.)
• Inventors: Young, Nigel D.
• Primary Examiner(s): Shankar, Vijay
• Application Number:
  US08/609,876
• Time in Patent Office: 1,075 Days
• Field of Search: 345/173, 345/174, 345/175, 178/18.01, 178/18.03, 178/18.05, 178/18.07, 178/18.09, 178/19.03, 178/20.01
• US Class Current: 178/20.01
• CPC Class Codes: G06V 40/1306 non-optical, e.g. ultrasonic or capacitive sensing
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 13/702 with contacts carried by or formed from layers in a multilayer structure, e.g. membrane switches
• CPC Class Codes: H01H 13/703 characterised by spacers between contact carrying layers
• CPC Class Codes: H01H 2211/00 Spacers
• CPC Class Codes: H01H 2229/016 Selective etching

Abstract

A touch sensing device comprising a plurality of individually operable touch sensing elements having first and second overlapping and spaced conductive layers (12, 15) with the second conductive layer being displaceable towards the first conductive layer in response to a touch input. The device is fabricated by forming on a support a thin film multi-layer structure comprising the first and second conductive layers with an insulating layer (16) therebetween and in which the second conductive layer is provided with apertures at predetermined regions, and subjecting the structure to an etching process which removes insulating material between the conductive layers at the apertured regions via the apertures to form gaps (19). This leaves the second conductive layer (15) at each region supported in spaced relationship to the first conductive layer by the insulating layer around the periphery of the region. The device may be used, for example, as a keypad or, with larger numbers of elements arranged in a row and column matrix, as a graphics tablet or display overlay and operated with a stylus. The device can conveniently be integrated with a liquid crystal display panel using a substsrate of the panel as the support.

Claims

1. A method of making a touch sensing device having a plurality of touch sensing elements

each touch sensing element comprising first and second overlapping electrically conductive layers carried on a common support and

in which the second conductive layer is spaced from the first conductive layer and is displaceable towards the first conductive layer in response to a touch input,

characterized by

providing on the common support a multi-layer thin film structure comprising:

a first layer of electrically conductive material,

a layer of insulating material extending over the first conductive layer and

a second layer of electrically conductive material extending over the insulating layer and which second conductive layer is provided at predetermined regions with apertures extending therethrough, and

performing an etching process to remove via said apertures at each region an underlying part of the insulating layer between the first and second conductive layers at said region to leave the second conductive layer extending over the first conductive layer and supported in spaced relationship to the first conductive layer at that region by the insulating layer extending therearound to form a touch sensing element at each region.

2. A method according to claim 1, characterized in that said first conductive layer is patterned prior to providing the insulating layer to define a physically separate portion at each said region which portion includes an integral connection part extending away from the region.

3. A method according to claim 1, characterized in that said second conductive layer is patterned to define a physically separate portion at each said region which portion includes an integral connection part extending away from the region.

4. A method according to claim 1, characterized:

in that the first conductive layer is patterned to form a first set of strips extending in a first direction over the common support,

in that the second conductive layer is patterned to form a second set of strips extending in a second direction over the common support and crossing over the first set with the apertured regions therein overlying respective portions of the first set of strips at the cross-overs

whereby a two-dimensional matrix array of sensing elements is obtained with the first and second conductive layers of adjacent sensing elements in the first and second directions being interconnected by portions of the first and second sets of strips respectively.

5. A method according to claim 3, characterized in that the second conductive layer is patterned following said etching process.

6. A method according to claim 1, characterized in that the apertures through the second conductive layer at each region are arranged such that the region is divided into a plurality of sub-regions with each sub-region having apertures and such that following the etching process portions of the insulating layer extending between the first and second conductive layers are left between adjacent sub-regions.

7. A method according to claim 1, characterized in that the common support comprises a substrate of an electro-optical display panel.

8. A touch sensing device having a plurality of touch sensing elements, each touch sensing element comprising:

first and second overlying electrically conductive thin-film layers carried on a common support,

with the second conductive layer being spaced from the first conductive layer and displaceable towards the first conductive layer in response to a touch input,

wherein

the second conductive layer has an apertured region at each sensing element location and

said second conductive layer is supported around the periphery of the apertured region by a layer of insulating material carried on the common support

which insulating layer determines a space between the second and first conductive layers

into which space the apertured region of the second conductive layer is displaced in response to a touch input.

9. A touch sensing device according to claim 8, wherein at least one of the first and second conductive layers is patterned such that each sensing element comprises a discrete physically and electrically separate portion, and each discrete portion includes a connection part extending away from the respective sensing element.

10. A touch sensing device according to claim 8, characterized in that the device includes

a first set of conductive strips extending over the common support in a first directions, and

a second set of conductive strips extending over the common support in a second direction and crossing the first set of strips,

which strips constitute the first and second conductive layers respectively with the sensing elements being located at the cross-over regions.

11. A touch sensing device according to claim 8, wherein each said apertured region of the second conductive layer comprises a plurality of adjacent apertured sub-regions and a portion of said insulating layer extending between the first and second conductive layers is located between adjacent sub-regions.

12. A touch sensing device according to claim 8, wherein the second conductive layer is covered by a protective layer of flexible insulating material.

13. A touch sensing device according to claim 8, characterized in that the device is combined with an active matrix liquid crystal electro-optical display panel and said common support comprises a substrate of the electro-optical display panel.

14. A touch sensing device according to claim 13, wherein the touch sensing device is provided on the substrate of the display panel outside the area of the substrate which is occupied by picture elements of the display panel and which is covered by a second substrate of the display panel.

15. The touch sensing device according to claim 8 wherein apertures in said apertured regions form air passages through the second conductive layer, and

the insulating layer is patterned to form a plurality of air gaps with each air gap aligned with an aperture in a respective apertured region such that each air gap communicates directly with the air passage in its aligned aperture.

16. The touch sensing device according to claim 8 wherein a top surface of the insulating layer contacts and supports a bottom surface of the second conductive layer, and

the insulating layer includes a plurality of air gaps with each air gap aligned with an aperture in a respective apertured region of the second conductive layer.

17. The touch sensing device according to claim 8 wherein each apertured region includes multiple apertures, and

the insulating layer includes a plurality of air gaps with each air gap aligned with the multiple apertures in its respective apertured region of the second conductive layer.

18. The touch sensing device according to claim 8 wherein the insulating layer includes a plurality of discrete rectangular air gaps aligned with respective apertured regions and the dimensions of the rectangular air gaps are slightly greater than those of their respective aligned apertured regions.

19. The touch sensing device according to claim 8 wherein the second conductive layer comprises a resilient metal material such that an apertured region is displaced into said space inwardly of its periphery in response to the touch input, and

the thickness of the insulating layer determines said space between the second and first conductive layers.

20. The touch sensing device as claimed in claim 8 wherein the second conductive layer is formed on and is supported by the insulating layer,

the insulating layer is supported on the first conductive layer, the insulating layer being in contact with both the first and second conductive layers, and

apertures in the apertured regions have diameters corresponding to the thickness of the insulating layer and the distance between adjacent apertures is approximately twice their diameter.

21. The touch sensing device according to claim 8 further comprising a second insulating layer located between the first and second conductive layers, and wherein the second conductive layer comprises a thin flexible material.