Method for detecting etching endpoint, and etching apparatus and etching system using the method thereof

• US 5,885,472 A
• Filed: 10/07/1996
• Issued: 03/23/1999
• Est. Priority Date: 12/08/1994
• Status: Expired due to Term

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Sumitomo Metal Industries Limited (Nippon Steel Corporation)
• Inventors: Nakamura, Toshiyuki, Tanaka, Hiroyuki, Hayami, Toshihiro, Miyazaki, Toshiya, Nakatsuka, Tadao
• Primary Examiner(s): Breneman, Bruce
• Assistant Examiner(s): ALEJANDRO MULERO, LUZ L
• Application Number:
  US08/729,717
• Time in Patent Office: 897 Days
• Field of Search: 156/626.1, 156/345 MT, 156/345 P, 216/59, 216/60, 204/298.32, 118/723 R, 118/723 E, 438/7, 438/8, 438/9, 438/14
• US Class Current: 216/60
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

A method for detecting an etching endpoint and a plasma etching apparatus and a plasma etching system using such a device are disclosed, in which time series data of a signal corresponding to the amount of light of the plasma light generated during the plasma etching process are arithmetically processed, so that the change of light amount is corrected and an etching endpoint is detected from the time series data after the correction.

Claims

1. A method for detecting an etching endpoint, comprising steps of:

receiving plasma light generated during a plasma etching process;

producing time series data including a plurality of data values of a signal corresponding to an amount of receiving light;

performing an arithmetic operation on the time series data and thereby digitally correcting the time series data according to changes in a quality of the received plasma light; and

detecting an etching endpoint from the corrected time series data.

2. A method for detecting an etching endpoint according to claim 1, further comprising steps of:

calculating an average value of an original time series data for a predetermined period; and

calculating a coefficient for corrective arithmetic operation using said average value,

wherein said correcting step is for correcting the time series data using said coefficient.

3. A method for detecting an etching endpoint according to claim 2, wherein said correcting step includes substeps of reducing (offsetting) the original value of the time series data to zero and multiplying an offset time series data by a predetermined value in addition to correcting for the change in quality of the received plasma light.

4. A method for detecting an etching endpoint according to claim 2, wherein said correcting step sets a reference value for a predetermined period when an amount of light becomes stable during the etching process and corrects the time series data after the predetermined period using said reference value.

5. A method for detecting an etching endpoint according to claim 2, wherein said predetermined period is determined by an arithmetic operation.

6. A method for detecting an etching endpoint according to claim 1, wherein said correcting step corrects the time series data by a function holding a ratio between values apart from each other by a predetermined period.

7. A method for detecting an etching endpoint according to claim 6, further comprising a step of setting an unstable rise time in a test run, wherein said correcting step corrects the time series data after an unstable rise time.

8. A method for detecting an etching endpoint according to claim 6, wherein said correcting step subtracts a predetermined value from the corrected time series data.