Leakage tracking device sample for IDDQ measurement and defect resolution
First Claim
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1. Method for detecting defects in a semiconductor device using a sample of said device comprising the steps of:
- setting a screen condition for a device under test;
measuring the quiescent current of said device under test;
measuring the quiescent current of a sample of said device under test, wherein said sample of said device under test is a separate device from said device under test and is a small scale sample of said device under test, and wherein said sample of said device under test and said device under test are located on the same substrate;
determining if the ratio of the quiescent current measurement of said device under test to the quiescent current measurement of said sample of said device under test exceeds said screen condition.
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Abstract
A method for detecting defect in a semiconductor device using IDDQ testing techniques that are not dependent upon the background leakage current for defect resolution. One embodiment of the present invention uses device sampling, i.e. creates a small sample of a device that is representative of the whole device, such that the ratio of the quiescent current of the device to the quiescent current of the sample exhibits a linear relationship to the ratio of the component count of the device to the component count of the sample.
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7 Claims
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1. Method for detecting defects in a semiconductor device using a sample of said device comprising the steps of:
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setting a screen condition for a device under test; measuring the quiescent current of said device under test; measuring the quiescent current of a sample of said device under test, wherein said sample of said device under test is a separate device from said device under test and is a small scale sample of said device under test, and wherein said sample of said device under test and said device under test are located on the same substrate; determining if the ratio of the quiescent current measurement of said device under test to the quiescent current measurement of said sample of said device under test exceeds said screen condition. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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