Electronic device

  • US 5,929,527 A
  • Filed: 07/16/1997
  • Issued: 07/27/1999
  • Est. Priority Date: 07/16/1996
  • Status: Expired due to Term
First Claim
Patent Images

1. An electronic device comprising a film pattern made of aluminum or a material containing aluminum as a principal component thereof, wherein,the film made of aluminum or a material containing aluminum as a principal component contains oxygen atoms at a concentration of 8×

  • 1018 atoms·

    cm-3 or less, carbon atoms at a concentration of 5×

    1018 atoms·

    cm-3 or less, and nitrogen atoms at a concentration of 7×

    1017 atoms·

    cm-3 or less.

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