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Device for sputter deposition of thin layers on flat substrates

  • US 5,968,328 A
  • Filed: 12/11/1997
  • Issued: 10/19/1999
  • Est. Priority Date: 12/11/1996
  • Status: Expired due to Fees
First Claim
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1. An apparatus for sputter deposition of thin layers of electrically insulating material on substrates, said apparatus comprising:

  • a first pair of tubular magnetron cathodes arranged in an evacuable chamber connected to a gas source;

    a second pair of magnetron cathodes;

    a medium frequency generator connected in series with a transformer, said transformer having a center tap and secondary winding outputs, each of said secondary winding outputs being connected to a respective cathode of the second pair of magnetron cathodes;

    direct current being fed into lines supplying said first pair of tubular mamagnetron cathods through the center tap of the transformer and via a network operatively associated with said first pair of tubular magnetron cathodes.

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