Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer

• US 5,972,430 A
• Filed: 11/26/1997
• Issued: 10/26/1999
• Est. Priority Date: 11/26/1997
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Van Buskirk, Peter C., Bilodeau, Steven M., DiMeo, Frank Jr.
• Primary Examiner(s): King, Roy V.
• Application Number:
  US08/979,465
• Time in Patent Office: 699 Days
• Field of Search: 427/255.28, 427/255.29, 427/255.31, 427/225.32, 427/255.36, 427/255.395, 427/553, 427/554, 505/473, 505/480
• US Class Current: 427/255.32
• CPC Class Codes: C23C 16/409 of the type ABO3 with A representing alkali, alkaline earth metal or lead and B representing a refractory metal, nickel, scandium or a lanthanide
• CPC Class Codes: C23C 16/45531 specially adapted for making ternary or higher compositions

Abstract

A chemical vapor deposition (CVD) method for forming a multi-component oxide layer. There is first provided a chemical vapor deposition (CVD) reactor chamber. There is then positioned within the chemical vapor deposition (CVD) reactor chamber a substrate. There is then formed over the substrate a multi-component oxide precursor layer. The multi-component oxide precursor layer is formed from at minimum a first precursor reactant source material and a second precursor reactant source material introduced simultaneously into the chemical vapor deposition (CVD) reactor chamber in absence of an oxidant reactant source material. There is then oxidized with the oxidant reactant source material within the chemical vapor deposition (CVD) reactor chamber the multi-component oxide precursor layer formed over the substrate to form a multi-component oxide layer formed over the substrate. The oxidant reactant source material is introduced into the chemical vapor deposition (CVD) reactor chamber in absence of the first precursor reactant source material and the second precursor reactant source material.

Claims

1. A digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer comprising:

(i) providing a chemical vapor deposition (CVD) reactor chamber;

(ii) positioning within the chemical vapor deposition (CVD) reactor chamber a substrate;

(iii) forming over the substrate a multi-component oxide precursor layer, the multi-component oxide precursor layer being formed from a multiplicity of precursor reactant source materials comprising at minimum a first precursor reactant source material and a second precursor reactant source material introduced simultaneously into the chemical vapor deposition (CVD) reactor chamber in absence of an oxidant reactant source material; and

(iv) oxidizing with the oxidant reactant source material within the chemical vapor deposition (CVD) reactor chamber the multi-component oxide precursor layer formed over the substrate to form the multi-component oxide layer over the substrate, the oxidant reactant source material being introduced into the chemical vapor deposition (CVD) reactor chamber in absence of the first precursor reactant source material and the second precursor reactant source material.

2. The method of claim 1 wherein the multi-component oxide layer is formed with an enhanced precursor reactant source material incorporation efficiency of the multiplicity of precursor reactant source materials in comparison with a second multi-component oxide layer formed employing conditions equivalent to the conditions employed in forming the multi-component oxide layer, but with simultaneous introduction into the chemical vapor deposition (CVD) reactor chamber of the first precursor reactant source material, the second precursor reactant source material and the oxidant reactant source material.

3. The method of claim 1 wherein the multi-component oxide layer is formed with an enhanced crystallinity at a lower substrate temperature in comparison with a second multi-component oxide layer formed employing conditions equivalent to the conditions employed in forming the multi-component oxide layer, but with simultaneous introduction into the chemical vapor deposition (CVD) reactor chamber of the first precursor reactant source material, the second precursor reactant source material and the oxidant reactant source material.

4. The method of claim 1 wherein the multi-component oxide layer is selected from the group consisting of barium strontium titanate (BST) layers, bismuth titanate (BT) layers, lead zirconium titanate (PZT) layers, strontium bismuth tantalate (SBT) layers, strontium bismuth niobate tantalate (SBNT), doped lanthanum manganese oxide (LMO) layers, yttrium barium copper oxide (YBCO) layers, and bismuth strontium calcium copper oxide (BSCCO) layers.

5. The method of claim 1 wherein the substrate is employed within a fabrication selected from the group consisting of microelectronics fabrications and sensor fabrications.

6. The method of claim 5 wherein the microelectronics fabrications are selected from the group consisting of integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.

7. The method of claim 5 wherein the sensor fabrications are selected from the group consisting of piezoelectric sensor fabrications, pyroelectric sensor fabrications, magnetoresistive (MR) sensor fabrications and chemical gas detector sensor fabrications.

8. The method of claim 1 wherein at minimum the first precursor reactant source material and the second precursor reactant source material are introduced into the chemical vapor deposition (CVD) reactor chamber through a liquid source delivery method.

9. The method of claim 8 wherein the liquid source delivery method employs at minimum a coordinated first precursor reactant source material and a coordinated second precursor reactant source material each of sufficient stability to attenuate a reaction of the coordinated first precursor reactant source material and the coordinated second precursor reactant source material when introducing the coordinated first precursor reactant source material and the coordinated second precursor reactant source material into the chemical vapor deposition (CVD) reactor chamber through the liquid source delivery method.

10. The method of claim 1 wherein the oxidant reactant source material is selected from the group consisting of oxygen, ozone, nitrous oxide, nitric oxide, nitrogen dioxide, water vapor, hydrogen peroxide vapor, mixtures thereof, plasma activated derivatives thereof, UV light activated derivatives thereof, laser activated derivatives thereof, ion activated derivatives thereof, and electron activated derivatives thereof.

11. The method of claim 1 further comprising purging of at minimum the first precursor reactant source material and the second precursor reactant source material from the chemical vapor deposition (CVD) reactor chamber intervening step (iii) and step (iv).

12. A digital chemical vapor deposition (CVD) method for forming a thickness of a multi-component oxide layer over a substrate comprising:

(i) providing a chemical vapor deposition (CVD) reactor chamber;

(ii) positioning within the chemical vapor deposition (CVD) reactor chamber a substrate;

(iii) forming over the substrate a multi-component oxide precursor layer, the multi-component oxide precursor layer being formed from a multiplicity of precursor reactant source materials comprising at minimum a first precursor reactant source material and a second precursor reactant source material introduced simultaneously into the chemical vapor deposition (CVD) reactor chamber in absence of an oxidant reactant source material; and

(iv) oxidizing with the oxidant reactant source material within the chemical vapor deposition (CVD) reactor chamber the multi-component oxide precursor layer formed over the substrate to form the multi-component oxide layer over the substrate, the oxidant reactant source material being introduced into the chemical vapor deposition (CVD) reactor chamber in absence of the first precursor reactant source material and the second precursor reactant source material, wherein;

step (iii) and step (iv) are carried out sequentially and repetitively for a sufficient number of repetitive cycles to yield the multi-component oxide layer over the substrate at the thickness.

13. The method of claim 12 wherein the multi-component oxide layer is formed with an enhanced precursor reactant source material incorporation efficiency of the multiplicity of precursor reactant source materials in comparison with a second multi-component oxide layer formed employing conditions equivalent to the conditions employed in forming the multi-component oxide layer, but with simultaneous introduction into the chemical vapor deposition (CVD) reactor chamber of the first precursor reactant source material, the second precursor reactant source material and the oxidant reactant source material.

14. The method of claim 12 wherein the multi-component oxide layer is formed with an enhanced crystallinity at a lower substrate temperature in comparison with a second multi-component oxide layer formed employing conditions equivalent to the conditions employed in forming the multi-component oxide layer, but with simultaneous introduction into the chemical vapor deposition (CVD) reactor chamber of the first precursor reactant source material, the second precursor reactant source material and the oxidant reactant source material.

15. The method of claim 12 wherein the multi-component oxide layer is selected from the group consisting of barium strontium titanate (BST) layers, bismuth titanate (BT) layers, lead zirconium titanate (PZT) layers, strontium bismuth tantalate (SBT) layers, strontium bismuth niobate tantalate (SBNT) layers, doped lanthanum manganese oxide (LMO) layers, yttrium barium copper oxide (YBCO) layers, and bismuth strontium calcium copper oxide (BSCCO) layers.

16. The method of claim 12 wherein the substrate is employed within a fabrication selected from the group consisting of microelectronics fabrications and sensor fabrications.

17. The method of claim 16 wherein the microelectronics fabrications are selected from the group consisting of integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.

18. The method of claim 16 wherein the sensor fabrications are selected from the group consisting of piezoelectric sensor fabrications, pyroelectric sensor fabrications, magnetoresistive (MR) sensor fabrications and chemical gas detector sensor fabrications.

19. The method of claim 12 wherein at minimum the first precursor reactant source material and the second precursor reactant source material are introduced into the chemical vapor deposition (CVD) reactor chamber through a liquid source delivery method.

20. The method of claim 19 wherein the liquid source delivery method employs at minimum a coordinated first precursor reactant source material and a coordinated second precursor reactant source material each of sufficient stability to attenuate a reaction of the coordinated first precursor reactant source material and the coordinated second precursor reactant source material when introducing the coordinated first precursor reactant source material and the coordinated second precursor reactant source material into the chemical vapor deposition (CVD) reactor chamber through the liquid source delivery method.

21. The method of claim 12 wherein the oxidant reactant source material is selected from the group consisting of oxygen, ozone, nitrous oxide, nitric oxide, nitrogen dioxide, water vapor, hydrogen peroxide vapor, mixtures thereof, plasma activated derivatives thereof, UV light activated derivatives thereof, laser activated derivatives thereof, ion activated derivatives thereof, and electron activated derivatives thereof.

22. The method of claim 12 wherein the number of repetitive cycles is from about 5 to about 1000.

23. The method of claim 12 wherein the thickness of the multi-component oxide layer is from about 20 to about 20000 Angstroms.

24. The method of claim 12 further comprising:

a first purging of at minimum the first precursor reactant source material and the second precursor reactant source material from the chemical vapor deposition (CVD) reactor chamber intervening step (iii) and step (iv); and

a second purging of the oxidant reactant source material from the chemical vapor deposition (CVD) reactor chamber intervening step (iv) and step (iii).