Element interconnections for multiple aperture transducers

• US 5,977,691 A
• Filed: 02/10/1998
• Issued: 11/02/1999
• Est. Priority Date: 02/10/1998
• Status: Expired due to Fees

• Current Assignee: Koninklijke Philips N.V.
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Pendergrass, Larry, Stephens, Thomas P., Ossmann, William J., Mooney, Matthew
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US09/021,596
• Time in Patent Office: 630 Days
• Field of Search: 310/334-337
• US Class Current: 310/334
• CPC Class Codes: A61B 8/00 Diagnosis using ultrasonic, sonic or infrasonic waves imaging of objects using sonar G01S15/00
• CPC Class Codes: A61B 8/4494 characterised by the arrangement of the transducer elements devices for short-range imaging using particular transducer elements arrangements under G01S15/8909; arrangements of transducers in generation of mechanical vibrations of infrasonic, sonic or ultrasonic frequency B06B1/0607
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H04R 17/08 signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously

Abstract

A multiple aperture ultrasonic transducer having a linear array of elements, each element having a plurality of segments forming apertures of the array, and a connection assembly for interconnecting the segments and connecting the segments to circuits. The connection assembly includes an electrode layer directly adjacent to the segments, at least one insulating layer, and at least one connector layer. The electrode layer has an electrode area for each segment and one of the insulating layers has a connection opening for each segment and connection areas for pairs of segments while the connection layer has segment to segment connectors and segment pad connectors. Each element may be divided into sub-elements with connection cross-overs offset by one sub-element along the array and alternately reversed while alternate middle segments connect to alternate sides. The connection assembly may include interlayer connector layer and may be constructed onto a carrier which may be removed before attachment to a backing body, or the connection assembly may be deposited onto the array before attachment to a backing body. The connection assembly may be fabricated as a single assembly with a monolithic block of piezoelectric material and the assembly diced to a predetermined depth and across a predetermined width so that selected connections between electrode areas and to the pads remain intact. Interlayer vias are staggered and have clearance openings extending into the dicing kerf to reduce space and to insure connection after dicing.

Claims

1. A multiple aperture ultrasonic transducer including a linear array of transmitting and receiving elements wherein each element is comprised of a middle segment and at least one pair of outer segments, the middle segment and outer segments forming apertures of the array, and a connection assembly for interconnecting the outer segments of each element and for connecting the segments of each element to transmit/receive circuits, the connection assembly comprising:

for each element of the array,

an electrode layer located directly adjacent the segments of the element and having

an electrode area corresponding to each segment of the element, each electrode area being located adjacent to and connecting to the corresponding segment,

an insulating layer superimposed on the electrode layer and having

a segment to segment connection opening corresponding to and located within the electrode area of each outer segment,

a segment to segment connection area for and corresponding to each pair of outer segments forming an aperture, each segment to segment connection area extending between the segment to segment connection openings of the pair of outer segments,

a middle segment connection opening corresponding to and located within the electrode area of the middle segment,

a middle segment connection area extending from the middle segment connection opening and to an edge of the element, and

a connection layer superimposed on the insulating area and having

a middle segment connector connected to the middle segment electrode and extending from the middle segment connection opening and across the middle segment connection area to a pad at the edge of the element to connect to a transmit/receive circuit, and

for each pair of outer segments forming an aperture,

a segment to segment connector extending across the segment to segment connection area of the outer segments and connected to the electrode areas of the outer segments and to a pad at the edge of the element to connect to a transmit/receive circuit.

2. The multiple aperture ultrasonic transducer of claim 1 wherein each element is divided into sub-elements and wherein:

one half of the segments of each sub-element and the connection assembly connections thereto are offset along the length of the array by one sub-element relative to the other half of the segments of the sub-element, and

the order of the pads connecting the middle segment and outer segment conductors to the transmit/receive circuits are reversed on alternate sub-elements.

3. The multiple aperture transducer of claim 1 wherein the middle segment connector of successive elements along the linear array are routed to alternate edges of the linear array.

4. The multiple aperture transducer of claim 1 wherein:

the connection assembly is constructed on a carrier,

the carrier and connection assembly are assembled to the transmitting and receiving elements, and

the carrier and connection assembly are assembled to a backing body so that the carrier is a mechanical and acoustic element of the transducer structures.

5. The multiple aperture transducer of claim 1 wherein:

the connection assembly is constructed on a carrier,

the carrier and connection assembly are assembled to the transmitting and receiving elements,

the carrier is removed from the connection assembly, and

the connection assembly and transmitting and receiving elements are assembled to a backing body.

6. The multiple aperture transducer of claim 1 wherein:

the electrode layer, the insulating layer and the connector layer are formed by deposition process onto a matching layer carrier comprised of a material having acoustic properties to function as a matching layer of the transducer and the matching layer carrier with the electrode layer, the insulating layer and the connector layer are assembled to a transmitting and receiving face of the transducer to function as a matching layer.

7. The multiple aperture transducer of claim 1, wherein:

the electrode layer, the insulating layer and the connector layer are formed by deposition process onto the transmitting and receiving elements.

8. The multiple aperture transducer of claim 1 wherein the elements are initially constructed of a monolithic block of transducer element material and wherein the connection assembly is initially fabricated as a single assembly including the electrode layer, insulating layer and connection layer for all elements of the transducer that is assembled to the monolithic block and wherein the monolithic block of transducer element material is thereafter diced into the individual elements of the linear array by dicing the assembly of the monolithic block and transducer element material and the connection assembly across the width of the array in cross sectional dicing areas bounded by a predetermined dicing depth and a predetermined dicing width, the connection assembly further comprising:

a plurality of vias for connecting the electrode areas of the segments to the corresponding connectors of the connector layer, wherein

a first area of the electrode layer, the insulating layer and the connector layer are within the dicing areas,

a reserved portion of at least the insulating and connector layers is located in a cross section area outside the dicing area,

so that the connections formed between the electrode areas of the segments and from the electrode areas to the pads in the reserved area of the connector layer remain intact.

9. The multiple aperture transducer of claim 8 wherein each element of the linear array is comprised of at least two layers of transducer material with an interlayer electrode layer between the layers of transducer material and with interlayer electrode areas formed in the interlayer electrode layer and connecting middle segments of the elements through interlayer vias with the layers of the connection assembly, wherein:

the interlayer vias are located along the edges of the middle segments to connect with the interlayer electrode layer connecting to the middle segments, and are arrayed in staggered patterns, so that when the layers of transducer material are diced into the elements of the linear array, at least one interlayer via connected to each middle segment will remain intact.

10. The multiple aperture transducer of claim 9 wherein interlayer vias remain unconnected to selected layers of the connection assembly by forming clearance holes around the interlayer vias where the interlayer vias pass through the selected layers and wherein the interlayer vias having clearance holes are located adjacent the edges of the electrode areas so that each clearance hole extends into a dicing kerf between the elements.