Photosensitive composition comprising aryl-substituted polysilane and peroxide-substituted benzophenone
First Claim
Patent Images
1. A photosensitive composition comprising a polysilane having a repeating unit represented by the following general formula (1) and a benzophenone compound having an organic peroxide;
- ##STR17## wherein Ar represents a substituted or unsubstituted aryl group, wherein a light-exposed portion of said composition becomes soluble in an alkaline solution by decomposition of said polysilane.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention relates to a photosensitive composition comprising a polysilane having a repeating unit represented by the following general formula (1) and a benzophenone type compound having an organic peroxide, ##STR1## wherein Ar represents a substituted or unsubstituted aryl group.
21 Citations
7 Claims
-
1. A photosensitive composition comprising a polysilane having a repeating unit represented by the following general formula (1) and a benzophenone compound having an organic peroxide;
- ##STR17## wherein Ar represents a substituted or unsubstituted aryl group, wherein a light-exposed portion of said composition becomes soluble in an alkaline solution by decomposition of said polysilane.
- View Dependent Claims (2, 3, 4, 5, 6, 7)
Specification