Method for simultaneous formation of contacts between metal layers and fuse windows in semiconductor manufacturing

• US 6,008,075 A
• Filed: 02/11/1999
• Issued: 12/28/1999
• Est. Priority Date: 02/11/1999
• Status: Expired due to Term

• Current Assignee: Vanguard International Semiconductor Corporation
• Original Assignee: Vanguard International Semiconductor Corporation
• Inventors: Lien, Wah-Yih, Liaw, Ing-Ruey
• Primary Examiner(s): Nguyen, Tuan H.
• Application Number:
  US09/247,976
• Time in Patent Office: 320 Days
• Field of Search: 438/132, 438/638, 438/639, 438/643, 438/644, 438/648, 438/636, 438/653, 438/654, 438/656, 438/661, 438/662, 438/685, 438/700, 257/529
• US Class Current: 438/132
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10B 12/09 with simultaneous manufacture of the peripheral circuit region and memory cells

Abstract

A method for simultaneous fabrication of an interlever metal contact and a fuse window reducing the number of masking steps required while providing a high yield for the fuse. A semiconductor substrate is provided having a device area with a first metal layer over an InterLevel Dielectric layer and a fuse area with a polysilicon fuse buried within the InterLevel Dielectric layer. A thick anti-reflective coating is formed on the first metal layer. The first metal layer and the anti-reflective coating are patterned to form a first metal line. An InterMetal Dielectric layer is formed over the InterLevel Dielectric layer and the first metal line. The InterMetal Dielectric layer, the InterLevel Dielectric layer, and the anti-reflective coating are patterned, simultaneously opening a via hole extending partially into the anti-reflective coating and a fuse window opening extending into the InterLevel Dielectric layer without exposing the fuse. An adhesion layer is formed over the InterMetal Dielectric layer. A Tungsten layer is blanket deposited on the adhesion layer and anisotropically etched, forming a W-plug in the via hole and a W-ring on the sidewalls of the fuse window opening. An upper metal layer is formed on the adhesion layer, the W-plug, and the W-ring and patterned to form an upper metal line. This etch also forms an upper metal ring on the inside wall of the W-ring. A passivation layer and a dielectric layer are formed and patterned to extend the fuse window opening through the passivation layer without exposing the fuse.

Claims

1. A method for simultaneous fabrication of an interlevel metal contact and a fuse window consisting of the steps of:

a) providing a semiconductor substrate having an InterLevel Dielectric layer;

said substrate having a device area with a first metal layer over said InterLevel Dielectric layer and a fuse area with a polysilicon fuse buried within said InterLevel Dielectric layer;

b) forming an anti-reflective coating on said first metal layer;

c) patterning said first metal layer and said anti-reflective coating to form a first metal line;

d) forming an InterMetal Dielectric layer over said InterLevel Dielectric layer and said first metal line;

e) patterning said InterMetal Dielectric layer, said InterLevel Dielectric layer, and said anti-reflective coating to simultaneously open a via hole extending partially into the anti-reflective coating and a fuse window opening extending into said InterLevel Dielectric layer without exposing said fuse;

said via hole and said fuse window having sidewalls and bottoms;

f) forming an adhesion layer over said InterMetal Dielectric layer, said anti-reflective coating, and said InterLevel Dielectric;

g) blanket depositing a Tungsten layer on said adhesion layer;

h) anisotropically etching said Tungsten layer;

said etch stopping on said adhesion layer;

thereby forming a W-plug in said via hole and a W-ring on said sidewalls of said fuse window opening;

said W-ring having an inside wall;

i) forming an upper metal layer on said adhesion layer, said W-plug, and said W-ring;

j) patterning said upper metal layer using an anisotropic etch to form a upper metal line contacting said W-plug;

said anisotropic etch forming an upper metal ring on said inside wall of said W-ring;

whereby said upper metal ring and said W-ring form a moisture barrier guard ring;

k) forming a passivation layer over said upper metal layer, said InterMetal Dielectric layer, and said InterLevel Dielectric layer;

l) forming a dielectric layer on said passivation layer; and

m) patterning said dielectric layer and said passivation layer;

thereby extending said fuse window through said passivation layer.

2. The method of claim 1 wherein said polysilicon fuse is buried within said InterLevel Dielectric Layer at a depth of between about 1 μ

m and 2 μ

m.

3. The method of claim 1 wherein said anti-reflective coating is composed of TiN having a thickness in the range between 1000 Å

and 1500 Å

.

4. The method of claim 1 wherein said InterMetal Dielectric layer is composed of silicon dioxide having a thickness in the range between 5,000 Å

and 10,000 Å

.

5. The method of claim 1 wherein, following step e, said InterLevel Dielectric layer in said fuse window opening has a depth of between about 2000 Å

and 4000 Å

; and

said via hole extends into said anti-reflective coating to a depth in the range between about 50 Å and

200 Å

.

6. The method of claim 1 wherein said fuse window opening has a width in the range between 10 μ

m and 20 μ

m.

7. The method of claim 1 wherein said adhesion layer (26) is composed of TiN having a thickness in the range between 500 Å

and 1000 Å

.

8. The method of claim 1 wherein said Tungsten layer (28) has a thickness in the range between 5,000 Å

and 10,000 Å

.

9. The method of claim 1 wherein said W-ring has a thickness in the range between 500 Å

and 1000 Å

.

10. A method for simultaneous fabrication of an interlevel metal contact and a fuse window consisting of the steps of:

a) providing a semiconductor substrate having an InterLevel Dielectric layer;

said substrate having a device area with a first metal layer over said InterLevel Dielectric layer and a fuse area with a polysilicon fuse buried within said InterLevel Dielectric layer at a depth of at least 1 μ

m;

b) forming an anti-reflective coating on said first metal layer;

c) patterning said first metal layer and said anti-reflective coating to form a first metal line;

d) forming an InterMetal Dielectric layer over said InterLevel Dielectric layer and said first metal line;

e) patterning said InterMetal Dielectric layer, said InterLevel Dielectric layer, and said anti-reflective coating to simultaneously open a via hole extending partially into the anti-reflective coating and a fuse window opening extending into said InterLevel Dielectric layer to a depth less than half the depth of said fuse;

said fuse window having sidewalls and bottoms;

f) forming an adhesion layer over said InterMetal Dielectric layer, said anti-reflective coating, and said InterLevel Dielectric;

g) blanket depositing a Tungsten layer on said adhesion layer;

h) anisotropically etching said Tungsten layer;

said etch stopping on said adhesion layer;

thereby forming a W-plug in said via hole and a W-ring on said sidewalls of said fuse window opening;

said W-ring having an inside wall;

i) forming an upper metal layer on said adhesion layer, said W-plug, and said W-ring;

j) patterning said upper metal layer using an anisotropic etch to form an upper metal line contacting said W-plug;

said anisotropic etch forming an upper metal ring on said inside wall of said W-ring;

k) forming a passivation layer over said upper metal layer, said InterMetal Dielectric layer, and said InterLevel Dielectric layer;

l) forming a dielectric layer on said passivation layer; and

m) patterning said dielectric layer and said passivation layer;

thereby extending said fuse window through said passivation layer without exposing said fuse.

11. The method of claim 10 wherein said polysilicon fuse is buried within said InterLevel Dielectric Layer at a depth of between 1 μ

m and 2 μ

m.

12. The method of claim 10 wherein said anti-reflective coating is composed of TiN having a thickness in the range between 1000 Å

and 1500 Å

.

13. The method of claim 10 wherein said InterMetal Dielectric layer is composed of silicon dioxide having a thickness in the range between 5,000 Å

and 10,000 Å

.

14. The method of claim 10 wherein, following the etch of step e, said InterLevel Dielectric layer in said fuse window opening has a depth of between about 2000 Å

and 4000 Å

, and following the etch of step m said InterLevel Dielectric layer in said fuse window opening has a depth of between about 0 and 2000 Å

.

15. The method of claim 10 wherein said via hole (22) has a width in the range between 0.3 μ

m and 1 μ

m and said fuse window opening has a width in the range between 10 μ

m and 20 μ

m.

16. The method of claim 10 wherein said adhesion layer is composed of TiN having a thickness in the range between 500 Å

and 1000 Å

.

17. The method of claim 10 wherein said Tungsten layer has a thickness in the range between 5,000 Å

and 10,000 Å

.

18. The method of claim 10 wherein said W-ring has an thickness in the range between 50 Å

and 1000 Å

.