Microelectronic assembly including columnar interconnections and method for forming same

  • US 6,013,571 A
  • Filed: 06/16/1997
  • Issued: 01/11/2000
  • Est. Priority Date: 06/16/1997
  • Status: Expired due to Term
First Claim
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1. A method for forming a microelectronic assembly including an integrated circuit component attached to a substrate by columnar interconnections, the method comprising:

  • depositing metallic columns onto component bond pads disposed on an integrated circuit component, each said metallic column comprising a solder attachment surface remote from the component bond pad and a peripheral surface intermediate the solder attachment surface and the component bond pad, each said metallic column formed of a first metal having a first melting temperature;

    depositing a solder plate onto each solder attachment surface, said solder plate being formed of a solder having a second melting temperature lower than the first melting temperature;

    oxidizing the peripheral surfaces of the metallic columns to inhibit wetting by solder during reflow;

    superposing the integrated circuit component onto a substrate such that each solder plate contacts a corresponding substrate bond pad on the substrate; and

    reflowing the solder by heating at a temperature above the second melting temperature and below the first melting temperature to bond the metallic column to the substrate bond pad and thereby attach the integrated circuit component to the substrate.

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