Integrated optics waveguide accelerometer with a proof mass adapted to exert force against the optical waveguide during acceleration
First Claim
1. An accelerometer comprising:
- a) a substrate having a first planar side and a second planar side;
b) a first optical waveguide coil secured to the first planar side of said substrate, said first optical waveguide coil having a first end and a second end;
c) a first mirror positioned at the second end of said first optical waveguide coil and adapted to reflect light back into said first optical waveguide coil;
d) a second optical waveguide coil secured to the second planar side of said board member, said second optical waveguide coil having a first end and a second end;
e) a second mirror positioned at the second end of said second optical waveguide coil and adapted to reflect light back into said second waveguide optical coil;
f) a light source emitting light;
g) a beamsplitter receiving light from said light source and directing a fraction of said light into said first end of said first optical waveguide coil and directing a fraction of said light into said first end of said second optical waveguide coil;
h) an optical detector receiving combined light from said beamsplitter;
i) a first proof mass positioned on the first side of said substrate and adapted to exert a force against and deform a portion of said first optical waveguide coil;
j) a second proof mass positioned on the second side of said substrate and adapted to exert a force against and deform a portion of said second optical waveguide coil.
1 Assignment
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Accused Products
Abstract
A sensor, an optical accelerometer, which is sensitive enough for the measurement of nano-g'"'"'s as well as thousands of g'"'"'s. The sensor is created by an optical waveguide coil which is secured to a substrate. At one end of the waveguide coil, a mirror reflects the emitting light back into the waveguide coil. Positioned along one side of the substrate, a proof mass is adapted to exert force against and deform the optical waveguide coil during acceleration of the sensor. An identical optical waveguide coil is secured to the opposing side of the substrate with its associated proof mass positioned on the side of the substrate opposite the other side'"'"'s proof mass. A beamsplitter communicates light into the ends of the two waveguide coils and then a monitor uses the light being emitted from the ends of the coils to measure the g'"'"'s being applied.
48 Citations
24 Claims
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1. An accelerometer comprising:
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a) a substrate having a first planar side and a second planar side; b) a first optical waveguide coil secured to the first planar side of said substrate, said first optical waveguide coil having a first end and a second end; c) a first mirror positioned at the second end of said first optical waveguide coil and adapted to reflect light back into said first optical waveguide coil; d) a second optical waveguide coil secured to the second planar side of said board member, said second optical waveguide coil having a first end and a second end; e) a second mirror positioned at the second end of said second optical waveguide coil and adapted to reflect light back into said second waveguide optical coil; f) a light source emitting light; g) a beamsplitter receiving light from said light source and directing a fraction of said light into said first end of said first optical waveguide coil and directing a fraction of said light into said first end of said second optical waveguide coil; h) an optical detector receiving combined light from said beamsplitter; i) a first proof mass positioned on the first side of said substrate and adapted to exert a force against and deform a portion of said first optical waveguide coil; j) a second proof mass positioned on the second side of said substrate and adapted to exert a force against and deform a portion of said second optical waveguide coil. - View Dependent Claims (2, 3, 4)
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5. An optical accelerometer comprising:
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a) a sensing member having, 1) a substrate having a first planar side and a second planar side, 2) a first interferometer sensing arm secured to the first planar side of said substrate and having, A) an optical waveguide coil having a first end and a second end, B) a mirror positioned at the second end of said optical waveguide coil and adapted to reflect light back into said optical waveguide coil, C) a proof mass adapted to exert a pressure force against and deform a portion of said optical waveguide coil during acceleration of said sensor; 3) a second interferometer sensing arm secured to the second planar side of said substrate and having, A) an optical waveguide coil having a first end and a second end, B) a mirror positioned at the second end of said optical waveguide coil and adapted to reflect light back into said optical waveguide coil, C) a proof mass adapted to exert a pressure force against and deform a portion of said optical waveguide coil during acceleration of said sensor; b) a beamsplitter adapted to 1) split light entering a first portal between the first end of the optical waveguide coil of the first interferometer sensing arm, and to the first end of the optical waveguide coil of the second interferometer sensing arm, and, 2) interfere light received from the first end of the optical waveguide coil of the first interferometer sensing arm and from the first end of the optical waveguide coil of the second interferometer sensing arm, to a second portal; and
,c) a light source communicating light to said first portal of said beamsplitter. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13)
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14. An accelerometer sensor comprising:
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a) a substrate member; and
,b) a first interferometer sensing arm secured to a first planar side of said substrate member and having, 1) an optical waveguide coil having a first end and a second end, 2) a mirror positioned at the second end of said optical waveguide coil and adapted to reflect emitting light back into said optical waveguide coil, and, 3) a first proof mass adapted to exert a pressure force against and deform a portion of said optical waveguide coil during acceleration of said sensor. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification