Apparatus for cleaning robot end effector

• US 6,024,107 A
• Filed: 12/03/1996
• Issued: 02/15/2000
• Est. Priority Date: 07/15/1996
• Status: Expired due to Term

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Jones, Oliver David
• Primary Examiner(s): Stinson, Frankie L
• Application Number:
  US08/757,698
• Time in Patent Office: 1,169 Days
• Field of Search: 134/104.1, 134/902, 134/198, 134/95.2, 134/102.3, 134/199, 134/15, 239/690, 239/580, 901/43, 422/292
• US Class Current: 134/104.1
• CPC Class Codes: H01L 21/67034 for drying
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

In a spin dryer for semiconductor wafers, the wafer is held beneath a platen with its active side (i.e., the side containing the components or circuitry) facing upward. One or more nozzles spray rinse water on the top surface of the wafer and the wafer is rotated to remove the excess rinse water, thereby drying the wafer. A splash guard adjacent the edge of the wafer insures that the excess rinse water thrown off by the spinning wafer is deflected downward where it cannot again come into contact with the active side of the wafer. The platen is rotated dry at the same time, with no rinse water being splashed back onto the active side of the wafer. The spin dryer also includes a separate section which cleans and dries the end-effector of the robot which inserts the wafer into the spin dryer while the wafer is being dried.

Claims

1. Apparatus for cleaning a robot end-effector, comprising a pair of flat, rigid plates held in a parallel, spaced-apart relationship by a rigid spacer extending between margins of said plates, said spacer defining sidewalls of a rigid, generally rectangular cavity between said plates for receiving said end-effector for cleaning, said sidewalls having an opening defining an entrance into said cavity through which said end-effector is inserted into, retracted from, and rigidly supported within said cavity by an arm of said robot in a position between and spaced apart from said plates, at least one of said plates having at least one opening therethrough defining a nozzle flush with said plate for directing a flow of fluid away from said entrance and against said end-effector.

2. The apparatus of claim 1, wherein said fluid comprises a gas or a liquid.

3. The apparatus of claim 1, wherein said at least one plate has at least two openings therethrough, each said opening defining a nozzle flush with said plate for directing a flow of a gas and a flow of a liquid, respectively, against said end-effector.

4. The apparatus of claim 3, wherein said at least one gas nozzle is nearer to said entrance of said cavity than said at least one liquid nozzle.

5. The apparatus of claim 3, wherein said at least two holes in said at least one plate each comprises a respective one of a first and a second set of holes, each said hole in each said set defining a nozzle flush with said plate for directing a flow of a gas and a flow of a liquid, respectively, against said end-effector.

6. The apparatus of claim 5, wherein at least one of said first and said second set of holes is arranged in V-shaped rows of said holes.

7. The apparatus of claim 5, further comprising a manifold on a surface of said at least one plate opposite to said cavity between said plates for providing said first set of said holes with said flow of said gas and said second set of said holes with said flow of said liquid.

8. The apparatus of claim 7, wherein said manifold comprises a pair of separate chambers, each said chamber being registered in fluid communication with a respective one of said first and said second sets of holes.

9. The apparatus of claim 1, wherein said at least one hole in said at least one plate is formed at an angle relative to said plate to direct said flow of fluid away from said entrance to said cavity.

10. The apparatus of claim 9, wherein said angle is about 45°

.

11. The apparatus of claim 1, wherein said end-effector comprises a pair of bifurcated fingers, and further comprising an elongated member extending between said parallel plates and disposed between said fingers when said end-effector is resident in said cavity, said member having a conduit extending therethrough in fluid communication with a surface of each of said plates opposite to said cavity.