Light modulating microdevice and method

• US 6,025,951 A
• Filed: 11/27/1996
• Issued: 02/15/2000
• Est. Priority Date: 11/27/1996
• Status: Expired due to Term

• Current Assignee: National Optics Institute
• Original Assignee: National Optics Institute
• Inventors: Swart, Nicholas R., Jerominek, Hubert
• Primary Examiner(s): Font, Frank G.
• Assistant Examiner(s): RATLIFF, REGINALD A
• Application Number:
  US08/753,697
• Time in Patent Office: 1,175 Days
• Field of Search: 359/245, 359/291, 359/224, 359/846, 359/900
• US Class Current: 359/245
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: Y10S 359/90 Methods

Abstract

The invention relates to spatial light modulators (SLM) for amplitude and phase modulation of incident light. A "flexure" hinge which is provided between the SLM'"'"'s substrate and micromirror comprises integral hinged sections which allow for the micromirror to tilt or to move in a piston-like fashion relative to the substrate in response to an electrostatic force. The hinge is particularly advantageous for large mirrors. In addition, the hinge can provide improved heat sinking capability over previously reported SLM hinge designs based on torsion bars and cantilever beams. The flexure hinge has sufficient mechanical flexibility that the SLM actuation voltage required is not excessively high. The flexure hinge has many applications, the preferred ones being a SLM for modulating high-energy beams and a SLM for optical channel switching.

Claims

1. A hinge for supporting a mirror in a light modulator, comprising at least one arm means adapted to be provided at an upper end thereof with mirror means, said arm means being adapted to extend substantially under the mirror means and being displaceable between deformed and extended positions thereby allowing for the displacement of the mirror means.

2. A hinge as defined in claim 1, wherein said arm means comprise at least first and second sections defining an angle therebetween, said first section being adapted for connection to the mirror means, said first and second sections being adapted to pivot relative to one another thereby allowing said angle to vary and thus the mirror means to tilt and/or to vertically displace in a piston-like fashion.

3. A hinge as defined in claim 2, wherein said arm means comprise a pair of similar arms symmetrical about a plane extending perpendicularly to the mirror means when the mirror means is in an unbiased position thereof.

4. A hinge as defined in claim 3, wherein said first and second sections of each said arm are connected together by hinge means.

5. A hinge as defined in claim 4, wherein said hinge means is integrally formed with said first and second sections.

6. A hinge as defined in claim 3, wherein said arms are connected at lower ends thereof by web means extending substantially parallel to the mirror means when in its unbiased position, upper ends of said first sections of said arms being spaced apart from one another substantially centrally with respect to the mirror means.

7. A hinge as defined in claim 6, wherein said web means is integrally formed with said second sections of said arms.

8. A hinge as defined in claim 4, wherein said first sections each comprise an upper section, said second sections each comprising lower and intermediate sections, the lower sections diverging from one another as they extend upward, said upper sections also diverging from one another as they extend upward, said intermediate section extending between said upper and lower sections of each arm and substantially parallel to the mirror means when in its unbiased position, said upper sections being further spaced than said lower sections, said hinge means being provided at junctions of said intermediate sections with said upper and lower sections.

9. A hinge as defined in claim 4, wherein said arms are each V-shaped with apexes thereof extending outwardly of said plane, said hinge means being provided at said apexes.

10. A mirror for light modulators, comprising light receiving means, hinge means being adapted to be provided at an upper end thereof with said light receiving means, said hinge means being adapted to extend substantially under said light receiving means and being displaceable between deformed and extended positions thereby allowing for the displacement of said light receiving means.

11. A mirror as defined in claim 10, wherein said hinge means comprise at least first and second sections defining an angle therebetween, said first section being connected to said light receiving means, said first and second sections being adapted to pivot relative to one another thereby allowing said angle to vary and thus said light receiving means to tilt and/or to vertically displace in a piston-like fashion.

12. A mirror as defined in claim 11, wherein said hinge means comprise a pair of similar arms symmetrical about a plane extending perpendicularly to said light receiving means when said light receiving means is in an unbiased position thereof.

13. A mirror as defined in claim 12, wherein said arms are connected at lower ends thereof by web means extending substantially parallel to said light receiving means when in said unbiased position, said_-- arms each having at least lower and upper sections, upper ends of said upper sections of said arms being spaced apart from one another substantially centrally with respect to said light receiving means.

14. A mirror as defined in claim 13, wherein said lower sections diverge from one another as they extend upward, said upper sections also diverging from one another as they extend upward, said arms each having an intermediate section extending between said upper and lower sections thereof and substantially parallel to said light receiving means when in said unbiased position, said under sections being further spaced than said lower sections, said intermediate sections being hingedly connected to said upper and lower sections.

15. A mirror as defined in claim 13, wherein said arms are each V-shaped with apexes thereof extending outwardly of said plane, said upper and lower sections being hingedly connected at said apexes.

16. A light modulator comprising mirror means, substrate means provided with electrode means, and hinge means extending between said substrate means and said mirror means and substantially under said mirror means, said hinge means being displaceable between deformed and extended positions for allowing for the displacement of said mirror means.

17. A light modulator as defined in claim 16, wherein said hinge means comprise at least first and second sections defining an angle therebetween, said first section being connected to said mirror means, said first and second sections being adapted to pivot relative to one another thereby allowing said angle to vary and thus said mirror means to tilt and/or to move in a piston-like fashion with respect to said substrate means.

18. A light modulator as defined in claim 17, wherein said hinge means comprise a pair of similar arm means symmetrical about a plane extending perpendicularly to said mirror means when said mirror is in an unbiased position thereof.

19. A light modulator as defined in claim 18, wherein said arm means are connected at lower ends thereof by web means extending onto said substrate means and substantially parallel to said mirror means when in said unbiased position, said arm means each having at least upper and lower sections, upper ends of said upper sections of said arm means being spaced apart from one another substantially centrally with respect to said mirror means.

20. A light modulator as defined in claim 19, wherein said lower sections diverge from one another as they extend upward, said upper sections also diverging from one another as they extend upward, said arm means each having an intermediate section extending between said upper and lower sections of each arm means and substantially parallel to said mirror means when in said unbiased position, said upper sections being further spaced than said lower sections, said intermediate sections being hingedly connected to said upper and lower sections.

21. A light modulator as defined in claim 19, wherein said arm means are each V-shaped with apexes thereof extending outwardly of said plane, said upper and lower sections being hingedly connected at said apexes.

22. A method for producing a light modulator, comprising the steps of:

(a) providing base means containing control circuit means for the light modulator and providing electrode means on said base means;

(b) providing a sacrificial layer means on said base means and electrode means;

(c) patterning said sacrificial layer means, at least part of a shape of which is complementary to a hinge of said light modulator and downwardly extends to said base means;

(d) providing first metal layer means on said sacrificial layer means and said base means for constituting said hinge;

(e) providing second metal layer means on said first metal layer means for constituting a mirror of said light modulator; and

(f) removing said sacrificial layer means.

23. A method for producing a light modulator, comprising the steps of:

(a) providing base means containing control circuit means for the light modulator and providing electrode means on said base means;

(b) providing first sacrificial layer means on said base means and electrode means;

(c) patterning said first sacrificial layer means, at least part of a shape of which is complementary to a hinge of said light modulator and downwardly extends to said base means;

(d) providing first metal layer means on said first sacrificial layer means and said base means for constituting said hinge;

(e) providing second sacrificial layer means on part of said first metal layer means;

(g) providing second metal layer means on said first metal layer means and on said second sacrificial layer means for constituting a mirror of said light modulator; and

(h) removing said first and second sacrificial layer means.

24. A method for producing a light modulator, comprising the steps of:

(a) providing base means containing control circuit means for the light modulator and providing electrode means on said base means;

(b) providing first sacrificial layer means on said base means and electrode means, said first sacrificial layer means having at least part of a shape thereof complementary to a lower part of a hinge of said light modulator and downwardly extending to said base means;

(c) providing first metal layer means on said first sacrificial layer means and said base means for constituting the lower part of said hinge;

(d) providing second sacrificial layer means on part of said first metal layer means;

(e) providing second metal layer means on said first metal layer means and on said second sacrificial layer means for constituting an upper part of said hinge;

(f) providing third sacrificial layer means on said second metal layer means and on said first sacrificial layer means;

(g) providing third metal layer means on said second metal layer means and on said third sacrificial layer means for constituting a mirror of said light modulator; and

(h) removing said first, second and third sacrificial layer means.