Surface treatment of copper

• US 6,036,758 A
• Filed: 08/10/1998
• Issued: 03/14/2000
• Est. Priority Date: 08/10/1998
• Status: Expired due to Fees

• Current Assignee: PMD Corporation
• Original Assignee: PMD Corporation
• Inventors: Fairweather, William A.
• Primary Examiner(s): GREEN, ANTHONY J
• Application Number:
  US09/131,532
• Time in Patent Office: 582 Days
• Field of Search: 106/14.11, 106/14.13, 106/14.15, 106/14.41, 106/14.42, 106/14.43, 106/14.44, 148/243, 148/269, 148/271
• US Class Current: 106/14.44
• CPC Class Codes: C23F 1/18 for etching copper or alloys thereof
• CPC Class Codes: H05K 2203/0796 Oxidant in aqueous solution, e.g. permanganate
• CPC Class Codes: H05K 2203/124 Heterocyclic organic compounds, e.g. azole, furan
• CPC Class Codes: H05K 3/383 by microetching
• CPC Class Codes: H05K 3/4611 by laminating two or more circuit boards H05K3/4652 takes precedence

Abstract

A composition useful for the surface treatment of copper, in particular for micro-roughening of the copper surface so as to improve the adhesion characteristics of the copper surface, comprises an oxidizing agent for copper and an aromatic sulfonic acid or a salt thereof. In a preferred embodiment, the oxidizing agent is hydrogen peroxide and the aromatic sulfonic acid is sodium m-nitrobenzenesulfonate. The composition preferably also includes an inorganic acid such as sulfuric acid and a corrosion inhibitor such as benzotriazole.

Claims

1. A composition useful for the surface treatment of copper, said composition comprising 0.5 to 5% w/v hydrogen peroxide and 0.01 to 5% w/v of an aromatic sulfonic acid or a salt thereof.

2. A composition according to claim 1, which is an aqueous solution.

3. A composition according to claim 1, wherein the sulfonic acid or salt thereof includes one or more aromatic groups which are carbocyclic rings.

4. A composition according to claim 1, wherein the sulfonic acid or salt thereof includes one or more aromatic groups which are substituted by one or more substituents selected from the group consisting of nitro, hydroxy, halogen, lower (C_1-6) alkyl and lower (C_1-6) alkoxy.

5. A composition according to claim 1, wherein the sulfonic acid or salt thereof includes an aromatic group which carries one sulfonic acid group.

6. A composition according to claim 1, wherein the sulfonic acid is present as a salt.

7. A composition according to claim 6, wherein the salt is an alkali metal salt.

8. A composition according to claim 6, wherein the salt is a sodium salt.

9. A composition according to claim 1, wherein the sulfonic acid or salt thereof is m-nitrobenzene sulfonic acid or a salt thereof.

10. A composition according to claim 1, wherein the sulfonic acid or salt thereof is sodium m-nitrobenzene sulfonate.

11. A composition according to claim 1, wherein the sulfonic acid or salt thereof is present at a concentration of between 0.01% w/v and 2% w/v.

12. A composition according to claim 1, wherein the hydrogen peroxide is present in the composition at a concentration in the range 0.5 to 3.5% w/v.

13. A composition according to claim 1, wherein the composition includes 2 to 20% w/v of an inorganic acid.

14. A composition as claimed in claim 13, wherein the inorganic acid is sulfuric acid.

15. A composition as claimed in claim 13, wherein the inorganic acid is present in the composition at a concentration of between 5 and 10% w/v.

16. A composition according to claim 1, wherein the composition also includes 0.1 to 2% w/v of a corrosion inhibitor.

17. A composition according to claim 16, wherein the corrosion inhibitor is selected from the group consisting of triazoles, tetrazoles, imidazoles, and mixtures thereof.

18. A composition according to claim 16, wherein the corrosion inhibitor is benzotriazole.

19. A composition according to claim 16, wherein the corrosion inhibitor is present at a concentration of 0.1 to 2% w/v.

20. A composition according to claim 1, wherein the composition consists of 0.5 to 5% w/v hydrogen peroxide, 2 to 20% w/v of an inorganic acid, 0.1 to 2% w/v of a corrosion inhibitor and 0.01 to 5% w/v of the sulfonic acid or salt thereof in aqueous solution.

21. A composition according to claim 20, wherein the inorganic acid is sulfuric acid, the corrosion inhibitor is benzotriazole and the aromatic sulfonic acid or salt thereof is sodium m-nitrobenzenesulfonate.