Grid-actuated charge controlled mirror and method of addressing the same

• US 6,038,058 A
• Filed: 10/15/1998
• Issued: 03/14/2000
• Est. Priority Date: 10/15/1998
• Status: Expired due to Term

• Current Assignee: Intel Corporation
• Original Assignee: Memsolutions, Inc.
• Inventors: Little, Michael J., Robinson, William P., Gifford, Eric A.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): BURKE, MARGARET A
• Application Number:
  US09/172,614
• Time in Patent Office: 516 Days
• Field of Search: 359/293, 359/298, 359/223, 359/224, 348/781, 348/782
• US Class Current: 359/293
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A micromirror light valve target configuration that overcomes the problems of limited deflection range, electrostatic and resolution by forming the secondary electron collector grid of a fine conductive mesh and placing it in close proximity to the micromirror array. The source, preferably a fixed beam array, addresses the micromirror array such that it exhibits a secondary emission coefficient less than one to write a negative charge pattern onto the mirrors so that they are attracted to the collector grid. If the anode is also in close proximity to the array, the mirrors can be addressed so that they deflect up toward the grid and down toward the anode thereby increasing the deflection range.

Claims

1. A light modulator, comprising:

an array of electrostatically-actuable micromirrors;

a collector grid that is biased at a grid potential;

an anode electrode spaced apart from said micromirror array opposite said collector grid; and

a source that emits primary electrons which accelerate towards the anode electrode, pass through said collector grid and strike the micromirrors thereby ejecting secondary electrons and depositing a negative charge pattern on said micromirrors,

said collector grid collecting the ejected secondary electrons and producing attractive electrostatic forces that deflect said micromirrors toward said collector grid in accordance with the difference between said grid potential and the respective micromirror potentials induced by said negative charge pattern.

2. The light modulator of claim 1, wherein said source comprises an array of fixed sources that each emit a beam of primary electrons that strike the micromirror opposite said fixed source.

3. The light modulator of claim 1, wherein said collector grid comprises a fine conductive mesh having at least one cell per micromirror.

4. The light modulator of claim 1, wherein each micromirror is supported on a conductive pad that shields the micromirror from said anode electrode.

5. The light modulator of claim 1, wherein said source selectively deposits said negative charge pattern and a positive charge pattern onto said micromirrors so that they can respectively deflect toward said collector grid and said anode electrode.

6. The light modulator of claim 5, wherein said micromirror has a threshold potential, which if exceeded will cause said micromirror to snap over toward said anode electrode, said collector grid is biased so that said grid potential is less than said threshold potential.

7. The light modulator of claim 1, further comprising a plurality of control pads that partially cover the respective micromirrors and exhibit an electron affinity opposite that of said micromirror.

8. A light modulator, comprising:

an anode that is held at an anode potential;

a collector grid that is spaced apart from said anode, said collector grid being biased at a grid potential above said anode potential to establish a uniform electric field;

an array of electrostatically-actuable micromirrors between said collector grid and said anode and in said uniform electric field, said micromirrors assuming a floating potential at which the opposing attractive forces to said collector grid and said anode cancel;

an array of control pads on said respective micromirrors that exhibit an electron affinity opposite that of said micromirrors, said control pads only partially covering said micromirrors so that each said micromirror has a first portion that has a secondary emission coefficient less than one and a second portion that has a secondary emission coefficient greater than one; and

an array of fixed sources that emit primary electrons which are accelerated toward said anode, pass through said collector grid and strike the micromirrors'"'"' first and second portions thereby ejecting secondary electrons into said uniform electric field that are collected by said collector grid and leaving a charge pattern on said micromirrors that modulates the micromirrors'"'"' floating potentials,

said collector grid comprising a fine conductive mesh that is positioned close enough to said array of micromirrors that the change in the micromirrors'"'"' floating potentials produces sufficient imbalances in the opposing attractive forces to deflect said micromirrors outward toward said collector grid in accordance with said charge pattern.

9. The light modulator of claim 8, wherein said fine conductive mesh has at least one cell per micromirror.

10. The light modulator of claim 8, wherein each said micromirror is supported on a conductive pad that shields the micromirror from said anode electrode.

11. The light modulator of claim 8, wherein a plurality of said sources direct primary electrons onto said second portions to drive the mirrors'"'"' floating potentials toward the grid potential into an erase state and a different plurality of said sources direct primary electrons onto said second portions to reduce the mirrors'"'"' floating potentials to respective write states.

12. The light modulator of claim 11, wherein said different plurality of said sources selectively writes negative and positive charge patterns on said micromirrors so that the mirrors are respectively attracted toward said collector grid and said anode electrode.

13. The light modulator of claim 12, wherein each said micromirror has a threshold potential, which if exceeded will cause said micromirror to snap over toward said anode electrode, said collector grid biased so that said grid potential is less than said threshold potential.

14. A light modulator, comprising:

a transparent substrate;

an anode electrode on said substrate that is held at an anode potential;

an array of electrostatically-actuable micromirrors on said substrate;

a collector grid that is spaced apart from said micromirrors opposite said anode electrode, said collector grid being held at a grid potential above said anode potential to establish a uniform electric around the array of micromirrors, said micromirrors stabilizing at a floating potential at which the opposing attractive forces to said collector grid and said anode electrode cancel; and

an array of sources that emit primary electrons which pass through said collector grid and strike the micromirrors thereby ejecting secondary electrons into said uniform electric field that are collected by said collector grid and leaving a charge pattern on said micromirrors that modulates their floating potentials,

said collector grid and said anode layer being positioned close enough to said array of micromirrors that the modulation of the micromirrors'"'"' floating potentials produces sufficient imbalances in the opposing attractive forces to selectively deflect said micromirrors toward said collector grid and said anode layer when said charge pattern is negative and positive, respectively.

15. The light modulator of claim 14, wherein said collector grid comprises a fine conductive mesh having at least one cell per micromirror.

16. The light modulator of claim 14, wherein said anode electrode comprises a buried layer on said substrate beneath said micromirror array, each said micromirror being supported on a conductive pad that assumes the same floating potential as said mirror, each said conductive pad having a hole through which said anode potential can attract said micromirror.

17. The light modulator of claim 14, wherein said micromirror has a threshold potential, which if exceeded will cause said micromirror to snap over toward said anode electrode, said collector grid is biased so that said grid potential is less than said threshold potential.

18. The light modulator of claim 14, further comprising a plurality of control pads that partially cover the respective micromirrors and exhibit an electron affinity opposite that of said micromirror.

19. A method of addressing a micromirror light modulator having an array of micromirrors positioned between an anode electrode and a collector grid, which is biased at a grid potential above the anode potential, comprising:

directing primary electrons onto said micromirrors to eject secondary electrons and write a negative charge pattern onto said micromirrors;

collecting the secondary electrons to hold the negative charge pattern; and

attracting said collector grid in accordance with said negative charge pattern.

20. The method of claim 19, wherein said primary electrons are first directed onto said micromirrors to drive their potentials toward the grid potential and into an erase state, and are then directed to write said negative charge pattern onto said micromirrors.

21. The method of claim 20, wherein said primary electrons are selectively directed to write said negative charge pattern, which attracts some of the micromirrors toward said collector grid, and to write a positive charge pattern, which attracts the remaining micromirrors toward said anode electrode.