Semiconductor device manufacturing machine and method for manufacturing a semiconductor device by using the same manufacturing machine

  • US 6,044,534 A
  • Filed: 12/09/1996
  • Issued: 04/04/2000
  • Est. Priority Date: 12/07/1995
  • Status: Expired due to Fees
First Claim
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1. A semiconductor device manufacturing machine comprising:

  • a processing chamber for processing semiconductor wafers;

    a feeding chamber affixed to said processing chamber;

    a load lock chamber affixed to said feeding chamber;

    a feeding mechanism within said feeding chamber for feeding a semiconductor wafer between said processing chamber and said load lock chamber;

    a semiconductor wafer lift-up mechanism, for lifting up a semiconductor wafer which is within the processing chamber;

    a peripheral member within said processing chamber at least partially surrounding a semiconductor wafer;

    a peripheral member lift-up mechanism within said processing chamber, for lifting up said peripheral member; and

    a holding member extending from said feeding mechanism and capable of selectively holding only said semiconductor wafer, only said peripheral member, and both said semiconductor wafer and said peripheral member, whereby said holding member can selectively transfer either said semiconductor wafer by itself, said peripheral member by itself, and both said semiconductor wafer and said peripheral member together, to said load lock chamber and then to a space external to the semiconductor device manufacturing machine.

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